IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Preparation of 3D Alkali Vapor Cell with Vertical Sidewalls

Jin Zhang, Jianfeng Zhang, Jintang Shang

Published Apr 14, 2022• 1 citation

Abstract

This paper demonstrates a new type of 3D alkali vapor cell with vertical sidewalls. We use anisotropic wet etching to prepare blind holes with vertical sidewalls on a (100) silicon wafer, and then complete the preparation of the alkali vapor cell through glass reflow and anodic bonding. The cell is a silicon-glass double-layer structure with a height of 1.7 mm, and the optical path is parallel to the silicon substrate. The 3D alkali vapor cell is suitable for both single - and multi-beam atomic sensors.

DOI: 10.1109/nems54180.2022.9791194

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