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Journal of Applied Physics

Bright single-photon emission from a GeV center in diamond under a microfabricated solid immersion lens at room temperature

Justus Christinck, F. Hirt, H. Hofer, Zhe Liu, Markus Etzkorn, Toni Dunatov, M. Jakšić, J. Forneris, S. Kück

Published May 16, 2023• 13 citations

Abstract

We report on the metrological characterization of the emission from a germanium-vacancy center in diamond under a microfabricated solid immersion lens in a confocal laser-scanning microscope setup. Ge ions were implanted into a synthetic diamond at 3 MeV, and germanium-vacancy centers were then formed by subsequent annealing. Afterward, solid immersion lenses were fabricated in a focused ion beam scanning electron microscope. The photoluminescence was investigated at room temperature in terms of the spectral distribution, the excited state lifetime, the second-order correlation function, and the saturation behavior, proving simultaneous high single-photon purity and high brightness. Two methods were exploited to minimize the residual multi-photon probability: spectral filtering and temporal filtering. According to these results, we assume that Raman scattered photons and emission from neighboring color centers play an important role in the residual multi-photon emission probability. The system efficiency of the single-photon source was investigated and found to be in accordance with the value calculated from all sources of loss in the setup. The branching ratio of the germanium-vacancy center for the decay into the ground state and into metastable state was calculated. The results enable the usage of the single-photon source in future quantum radiometric experiments.

DOI: 10.1063/5.0150208

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Abstract The nanoscale fabrication of μm-spaced single-photon emitter arrays is crucial for the development of integrated photonic chips. We report on the fabrication and systematic characterization of germanium-vacancy (GeV) color centers arrays in diamond obtained upon ion implantation at the nanoscale. Ge2+ ion implantations at 35 keV and 70 keV energies were carried out using a focused ion beam (FIB) equipped with a liquid metal alloy ion source. The arrays of emitters are subsequently aligned to ø300 nm nanopillar waveguiding structures, fabricated using a combination of electron-beam lithography and plasma etching. The photon collection efficiency and photoluminescence (PL) signal-to-background ratio increased by a factor 8 with respect to the unstructured sample. The photophysical properties of the GeV emitters fabricated by this approach were unaltered with respect to those found in unprocessed diamond. The efficiency of the overall manufacturing process to fabricate individual GeV centers was assessed. Up to 33% of the fabricated nanopillars, depending on ion implantation parameters, were found to contain single emitters.

Negatively charged germanium vacancy centers (GeV) in diamond are a promising platform for quantum computing and quantum communication. However, these applications require the precise incorporation of GeV centers with good optical properties inside of nanophotonic structures. In this work, we demonstrate the highly efficient local creation of GeV centers in diamond via focused-ion-beam implantation, followed by high-temperature annealing. We report the successful creation of GeV centers over the depth range of 5.5 - 30 nm. Implantation at low fluence enables the creation of single GeV centers. The formation yield strongly depends on implantation energy and fluence, reaching up to 33% at energies of 35 and 70 keV. This method, therefore, enables the efficient creation of GeV centers within a small, well-defined local sample volume and offers a potential means of incorporating them into photonic structures.

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