Advances in microfabricated vapor cells for chip-scale atomic clocks and sensors
Andrei Mursa, G. Faure, Clément Carlé +16 more
We summarize activities performed at FEMTO-ST Institute and Centrale Lille/IEMN over the last years on the development of microfabricated vapor cells dedicated to atomic clocks, frequency references and sensors. Recent advances on the microcell technology are described. We have demonstrated CPT-based microwave clocks with stability in the low 10−12 range thanks to the implementation of advanced pulsed Ramsey-based interrogation sequences and cells built with low-permeation glass substrates and Al2O3 coatings. We have developed microcell optical frequency references, one based on the two-photon transition of Rb atom at 778 nm and one on saturated absorption of the 6S1/2-7P1/2 transition of Cs atom at 459 nm, with short-term stability levels in the low 10−13 range at 1 s and averaging down in the low 10−14 range after 100 s. Optically pumped magnetometers with sensitivity at the level of 100 fT/√Hz have also been demonstrated. In-progress studies, on both the cell technology and metrology aspects, are also discussed.
•Sep 14, 2026•0 citations