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Advances in microfabricated vapor cells for chip-scale atomic clocks and sensors

Andrei Mursa, G. Faure, Clément Carlé, Martin Callejo, Carlos Manuel Rivera Aguilar, Linda Péroux, Prosenjit Majumder, Arevik Amiryan-Klinger, Quentin A. A. Tanguy, Arthur Dewilde, Aurelien Mazzamurro, Abdelkrim Talbi, Philippe Pernod, Jean-Francois Clement, Damien Teyssieux, Emmanuel Klinger, Vincent Maurice, Nicolas Passilly, Rodolphe Boudot

Published Sep 14, 2026• 0 citations
OpenAlex

Abstract

We summarize activities performed at FEMTO-ST Institute and Centrale Lille/IEMN over the last years on the development of microfabricated vapor cells dedicated to atomic clocks, frequency references and sensors. Recent advances on the microcell technology are described. We have demonstrated CPT-based microwave clocks with stability in the low 10−12 range thanks to the implementation of advanced pulsed Ramsey-based interrogation sequences and cells built with low-permeation glass substrates and Al2O3 coatings. We have developed microcell optical frequency references, one based on the two-photon transition of Rb atom at 778 nm and one on saturated absorption of the 6S1/2-7P1/2 transition of Cs atom at 459 nm, with short-term stability levels in the low 10−13 range at 1 s and averaging down in the low 10−14 range after 100 s. Optically pumped magnetometers with sensitivity at the level of 100 fT/√Hz have also been demonstrated. In-progress studies, on both the cell technology and metrology aspects, are also discussed.

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The convergence of atomic spectroscopy, MEMS cell technologies and integrated photonics has led to the deployment of high-precision chip-scale atomic devices [1]. In this talk, we will present in-progress studies at FEMTO-ST Institute, France, for the development of microcellbased microwave and optical atomic clocks, with enhanced stability performances. In the first part, we will talk about the demonstration of CPT-based microwave cell clocks with stability at 1 day in the low 10−12 range [2], made possible thanks to the combination of advanced Ramsey-based interrogation sequences [3] and cells built with low gas permeation windows [4-5]. In the second part, we will discuss the in-progress development of a microcell-based optical frequency reference based on the two-photon transition of Rb atom at 778 nm. An encouraging short-term stability of 3 × 10−13 at 1 s and 3 × 10−14 at 100 s has been recently achieved [6]. Future studies will be briefly discussed.

•Sep 30, 2024•1 citation

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Microfabricated (MEMS) alkali vapor cells are at the core of high-precision integrated atomic quantum sensors and devices [1], such as microwave and optical clocks, or magnetometers. The first chip-scale atomic device was a microwave atomic clock based on coherent population trapping [2]. It has offered in its industrial and commercialized version an ultra-low size-power -instability budget, impacting a plethora of industrial and scientific applications. Nevertheless, the short-term stability of these clocks is usually limited at about 10−10 at 1 s. Hot vapor MEMS-based optical frequency standards constitute a new generation of miniaturized clocks, with enhanced stability. These references keep the benefit of using wafer-scalable and mass-producible vapor cells while preventing ultra-high vacuum technologies and laser cooling. Among the transitions explored, the 6S1/2 → 7P1/2 near-UV transition of Cs atom was used to demonstrate an optical reference with a stability of 2.1 × 10−13 at 1 s and averaging down to a few 10−14 [3]. However, this reference was based on a 5 cm-long glass-blown cell, not compliant with the advent of a fully-miniaturized and low-power optical clock. In this work [4], we present the characterization of sub-Doppler resonances detected in a microfabricated cell by probing, in a simple saturated absorption configuration, the Cs atom 6S1/2 → 7P1/2 transition at 459 nm. The impact of the laser intensity and cell temperature on the sub-Doppler resonance is experimentally investigated. Optimal values are identified for the development of a near-UV microcell-stabilized frequency reference. Detection noise measurements are also reported, predicting a short-term stability in the 10−13 range at 1 s. Tests of cells with embedded getters are under progress for improved purity of the cell inner atmosphere and narrowing of the resonance.

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Abstract We describe three independent research directions focussed on the development of next-generation chip-scale atomic clocks, which combine small size, low power consumption and manufacturability with high frequency stability. The use of optical transitions in microfabricated vapor cells improves both short- and long-term frequency stability to near 10−13 at the cost of the added complexity of a chip-scale optical frequency comb. Chip-scale atomic beam microwave clocks have been successfully demonstrated and offer the potential for microsecond-level timing accuracy over one week. And finally, Sr vapor cells have been developed with lifetimes exceeding 250 hours and residual gas pressures below 1 Torr.

Journal of Physics Conference Series•Nov 1, 2024•7 citations
We summarize activities performed at FEMTO-ST Institute and Centrale Lille/IEMN over the last years on the development of microfabricated vapor cells dedicated to atomic clocks, frequency references and sensors. Recent advances on the microcell technology are described. We have demonstrated CPT-based microwave clocks with stability in the low 10−12 range thanks to the implementation of advanced pulsed Ramsey-based interrogation sequences and cells built with low-permeation glass substrates and Al2O3 coatings. We have developed microcell optical frequency references, one based on the two-photon transition of Rb atom at 778 nm and one on saturated absorption of the 6S1/2-7P1/2 transition of Cs atom at 459 nm, with short-term stability levels in the low 10−13 range at 1 s and averaging down in the low 10−14 range after 100 s. Optically pumped magnetometers with sensitivity at the level of 100 fT/√Hz have also been demonstrated. In-progress studies, on both the cell technology and metrology aspects, are also discussed.
The convergence of atomic spectroscopy, MEMS cell technologies and integrated photonics has led to the deployment of high-precision chip-scale atomic devices [1]. In this talk, we will present in-progress studies at FEMTO-ST Institute, France, for the development of microcellbased microwave and optical atomic clocks, with enhanced stability performances. In the first part, we will talk about the demonstration of CPT-based microwave cell clocks with stability at 1 day in the low 10−12 range [2], made possible thanks to the combination of advanced Ramsey-based interrogation sequences [3] and cells built with low gas permeation windows [4-5]. In the second part, we will discuss the in-progress development of a microcell-based optical frequency reference based on the two-photon transition of Rb atom at 778 nm. An encouraging short-term stability of 3 × 10−13 at 1 s and 3 × 10−14 at 100 s has been recently achieved [6]. Future studies will be briefly discussed.
Microfabricated (MEMS) alkali vapor cells are at the core of high-precision integrated atomic quantum sensors and devices [1], such as microwave and optical clocks, or magnetometers. The first chip-scale atomic device was a microwave atomic clock based on coherent population trapping [2]. It has offered in its industrial and commercialized version an ultra-low size-power -instability budget, impacting a plethora of industrial and scientific applications. Nevertheless, the short-term stability of these clocks is usually limited at about 10−10 at 1 s. Hot vapor MEMS-based optical frequency standards constitute a new generation of miniaturized clocks, with enhanced stability. These references keep the benefit of using wafer-scalable and mass-producible vapor cells while preventing ultra-high vacuum technologies and laser cooling. Among the transitions explored, the 6S1/2 → 7P1/2 near-UV transition of Cs atom was used to demonstrate an optical reference with a stability of 2.1 × 10−13 at 1 s and averaging down to a few 10−14 [3]. However, this reference was based on a 5 cm-long glass-blown cell, not compliant with the advent of a fully-miniaturized and low-power optical clock. In this work [4], we present the characterization of sub-Doppler resonances detected in a microfabricated cell by probing, in a simple saturated absorption configuration, the Cs atom 6S1/2 → 7P1/2 transition at 459 nm. The impact of the laser intensity and cell temperature on the sub-Doppler resonance is experimentally investigated. Optimal values are identified for the development of a near-UV microcell-stabilized frequency reference. Detection noise measurements are also reported, predicting a short-term stability in the 10−13 range at 1 s. Tests of cells with embedded getters are under progress for improved purity of the cell inner atmosphere and narrowing of the resonance.
We report on the development and short-term stability characterization of an optical frequency reference based on the spectroscopy of the rubidium two-photon transition at 778 nm in a microfabricated vapor cell. When compared against a 778 nm reference signal extracted from a frequency-doubled cavity-stabilized telecom laser, the short-term stability of the microcell frequency standard is 3.5 ×\times× 10−13^{-13}−13 τ−1/2τ^{-1/2}τ−1/2 until 200~s, in good agreement with a phase noise level of +++ 43 dBrad2^22/Hz at 1~Hz offset frequency. The two main contributions to the short-term stability of the microcell reference are currently the photon shot noise and the intermodulation effect induced by the laser frequency noise. With still a relevant margin of progress, these results show the interest of this spectroscopic approach for the demonstration of high-stability miniaturized optical vapor cell clocks. Such clocks are poised to be highly beneficial for applications in navigation, communications, and metrology.
We report on the development and short-term stability characterization of an optical frequency reference based on the spectroscopy of the rubidium two-photon transition at 778 nm in a microfabricated vapor cell. When compared against a 778 nm reference signal extracted from a frequency-doubled cavity-stabilized telecom laser, the short-term stability of the microcell frequency standard is 3.5×10−13τ−1/2 until 200 s, in good agreement with a phase noise level of +43dBrad2/Hz at 1 Hz offset frequency. The two main contributions to the short-term stability of the microcell reference are currently the photon shot noise and the intermodulation effect induced by the laser frequency noise. Retaining a relevant margin of progress, these results show the interest of this spectroscopic approach for the demonstration of high-stability miniaturized optical vapor cell clocks. Such clocks are poised to be highly beneficial for applications in navigation, communications, and metrology.
We provide an overview of our research on chip-scale atomic devices. By miniaturizing optical setups based on precision spectroscopy, we have developed small atomic sensors and atomic references such as atomic clocks, atomic magnetometers, and optical wavelength references. We have integrated microfabricated alkali vapor cells with small low-power lasers, micro-optics, and low-power microwave oscillators. As a result, we anticipate that atomic stability can be achieved with small size, low cost, battery-operated devices. Advances in fabrication methods and performance are presented.
Abstract We describe three independent research directions focussed on the development of next-generation chip-scale atomic clocks, which combine small size, low power consumption and manufacturability with high frequency stability. The use of optical transitions in microfabricated vapor cells improves both short- and long-term frequency stability to near 10−13 at the cost of the added complexity of a chip-scale optical frequency comb. Chip-scale atomic beam microwave clocks have been successfully demonstrated and offer the potential for microsecond-level timing accuracy over one week. And finally, Sr vapor cells have been developed with lifetimes exceeding 250 hours and residual gas pressures below 1 Torr.