Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Applied Physics Letters

Fast and efficient detection of a single photon with hole-patterned superconductor microstrips

Feiyan Li, Yuqing Guo, Kangjie Liu, Labao Zhang, Qi Henry Chen, Xiaohan Wang, Biao Zhang, Yue Dai, Jingrou Tan, Guanglong He, Yue Fei, Hao Wang, Xuecou Tu, Qingyuan Zhao, Xiaoqing Jia, Lin Kang, Jian Chen, Peiheng Wu

Published Sep 19, 2022• 6 citations
Publisher

Abstract

In this Letter, we report on pattern engineering in superconducting microstrips to achieve a fast and efficient detection of a single-photon over a large detection area. The proposed detector is composed of hole-patterned superconductor microstrips fabricated with a 5-nm-thick amorphous molybdenum silicide film. It exhibits a saturated internal detection efficiency at 1550 nm with a negligible dark count rate and a recovery time of 9 ns with a large detection area (50 × 50 μm2). The simulation reveals that the holes patterned in the superconductor microstrip stimulate the nucleation of the vortex, which constitutes a major key to achieving the efficient detection of photons. This work paves the way for the facile and prolonged regulation of vortex nucleation in superconductors, which shows promise for developing high-performance large-area superconductor single-photon detectors.

DOI
10.1063/5.0109206

Related papers

Characterization of a Hole-Patterned Microstrip Superconducting Single-Photon Detector

Feiyan Li, Xiang Pan, Qi Chen +3 more

Superconducting microstrip single-photon detectors (SMSPDs) with near-infrared sensitivity have significant advantages in terms of high quantum efficiency and low dark counts in a large active area. Hole-patterned superconductor microstrips have been reported for fast and efficient single-photon detection. In this work, we fabricated and characterized hole-patterned microstrips with different hole diameters on 5 nm thick MoSi films and an area of 500 × 500 μm2. We observed that the count rate curves of detectors 2 and 3 with holes tend to saturate slightly, whereas those of detector 1 without holes do not. Furthermore, the dark count is similar between detector 1 without holes and detector 2 with small holes and much lower than that of detector 3 with large holes. These experiments indicate that a proper hole is beneficial for efficiency without increasing the dark count rate.

IEEE Journal of Selected Topics in Quantum Electronics•Jan 14, 2025•2 citations

Superconducting NbN microstrip single-photon detectors

Alexander A. Korneev

Superconducting Single-Photon Detectors (SSPD) invented two decades ago have evolved to a mature technology and have become devices of choice in the advanced applications of quantum optics, such as quantum cryptography and optical quantum computing. In these applications SSPDs are coupled to single-mode fibers and feature almost unity detection efficiency, negligible dark counts, picosecond timing jitter and MHz photon count rate. Meanwhile, there are great many applications requiring coupling to multi-mode fibers or free space. `Classical’ SSPDs with 100-nm-wide superconducting strip and covering area of about 100 µm2 are not suitable for further scaling due to degradation of performance and low fabrication yield. Recently we have demonstrated single-photon counting in micron-wide superconducting bridges and strips. Here we present our approach to the realization of practical photon-counting detectors of large enough area to be efficiently coupled to multi-mode fibers or free space. The detector is either a meander or a spiral of 1-µm-wide strip covering an area of 50x50 µm2. Being operated at 1.7K temperature it demonstrates the saturated detection efficiency (i.e. limited by the absorption in the detector) up to 1550 nm wavelength, about 10 ns dead time and timing jitter in range 50-100 ps.

Quantum Optics and Photon Counting•Apr 19, 2021•0 citations

Large-Area Niobium Titanium Nitride Superconducting Microstrip Single-Photon Detector Fabricated Using a Photolithography Process

Masahiro Yabuno, Fumihiro China, Shigehito Miki +1 more

In this paper, we present a large-area niobium titanium nitride (NbTiN) superconducting microstrip single-photon detector (SMSPD) fabricated using a photolithography process. We fabricated a 1-μm-wide NbTiN-SMSPD covering 420 × 420 μm2active area with a filling factor of 20% using an i-line stepper. The detector is cooled down to approximately 2.2 K, and its performance is evaluated at the wavelengths from visible to near-infrared. The detector operates stably without a shunt resistor and shows single-photon sensitivity for photons with a wavelength of 1550 nm. The bias current dependence of the detection count rate is measured at the wavelengths from 406 to 1550 nm. The saturation of the detection count rate with increasing the bias current was successfully observed at wavelengths below 850 nm, suggesting an internal detection efficiency approaching 100%. Furthermore, we evaluated the timing jitter performance using the femtosecond pulse laser with a wavelength of 1550 nm. Consequently, we achieved a system timing jitter of 85 ps for a light spot diameter of 100 μm.

IEEE Transactions on Applied Superconductivity•Feb 24, 2023•9 citations

Research Progress of Superconducting Microstrips Single-Photon Detectors

Fei Li, Jinji Zheng, 邓志威

Superconducting microstrips single-photon detectors (SMSPDs) are a novel type of single-photon sensor based on superconducting thin films patterned into micrometer-scale strip widths. Compared with superconducting nanowire single-photon detectors (SNSPDs), SMSPDs not only substantially lower the fabrication dependence on high-precision electron-beam lithography, but also exhibit lower kinetic inductance, higher bias current, and weaker polarization sensitivity. These advantages pave a new route toward superconducting single-photon detection systems with large active areas and low dark-count rates. Because of their performance, SMSPDs exhibit tremendous application potential in cutting-edge fields such as quantum communication, LiDAR, dark-matter searches, and high-energy particle detection. Accordingly, this paper provides a systematic review of recent advances in SMSPD research, covering the underlying physical mechanisms, material systems, geometrical design, readout circuitry, and application domains. Firstly, this review elaborates on the photon response mechanism of SMSPDs and clarifies its correlation with vortex dynamics. Secondly, this review categorizes the superconducting materials used for SMSPD fabrication and analyzes the influences of characteristic thin-film parameters on device performance. Furthermore, this work concludes the evolution and optimization strategies of geometrical design and readout circuit schemes for SMSPDs, and presents the current application status. Finally, we offer perspectives on its future development trajectory. This review provides a foundation in physical mechanisms and design guidance for the development of large active area SMSPDs with high efficiency and low dark counts.

Sensors•Oct 27, 2026•0 citations

Amorphous superconducting nanowire single-photon detectors integrated with nanophotonic waveguides

M. Häußler, M. Yu. Mikhaı̆lov, Martin A. Wolff +1 more

Future applications in integrated quantum photonics will require large numbers of efficient, fast, and low-noise single-photon counters. Superconducting nanowire single-photon detectors made from amorphous material systems are best suited to meet these demands, but the integration with nanophotonic circuits has remained a challenge. Here, we show how amorphous molybdenum silicide (MoSi) nanowires are integrated with nanophotonic silicon nitride waveguides in traveling wave geometry. We found a saturated on-chip detection efficiency of (73 ± 10) % for telecom wavelength photons and the sub-10 Hz dark count rate at a temperature of 2.1 K, which allows for operation in robust, compact, and economic cryogenic systems. Applications requiring fast counting will benefit from the sub-5 ns recovery times of our devices that we combine with 135 ps timing accuracy. Achieving this performance with waveguide-integrated amorphous superconductors is an important step toward enabling high yield fabrication of competitive single-photon detectors on a large variety of nanophotonic material systems.

APL Photonics•Jul 1, 2020•24 citations

Investigation of Superconducting Molybdenum Silicide Nanostrips and Microstrips for Single Photon Detectors

L. Parlato, Daniela Salvoni, Mikkel Ejrnaes +11 more

Abstract Superconducting nanostrip single photon detectors have emerged as the highest performing single-photon detectors; however, the possibility to use superconducting microstrip as single photon detectors is very appealing both to use them as larger areas detectors and for an easier technology in the manufacturing. The aim of this work is to test the photoresponse in liquid helium dewar of 9 nm thick MoSi covered with a very thin (2 nm) layer of Al, in two different configurations: nanomeanders and microstrips. We demonstrate that MoSi/Al microstrips can work as photodetectors also at T = 4.2 K. We also compare the dark count rate of the microstrip and the nanowire, confirming the lower noise for the microstrips also at 4.2 K.

Journal of Low Temperature Physics•Sep 5, 2022•2 citations
In this Letter, we report on pattern engineering in superconducting microstrips to achieve a fast and efficient detection of a single-photon over a large detection area. The proposed detector is composed of hole-patterned superconductor microstrips fabricated with a 5-nm-thick amorphous molybdenum silicide film. It exhibits a saturated internal detection efficiency at 1550 nm with a negligible dark count rate and a recovery time of 9 ns with a large detection area (50 × 50 μm2). The simulation reveals that the holes patterned in the superconductor microstrip stimulate the nucleation of the vortex, which constitutes a major key to achieving the efficient detection of photons. This work paves the way for the facile and prolonged regulation of vortex nucleation in superconductors, which shows promise for developing high-performance large-area superconductor single-photon detectors.
Superconducting microstrip single-photon detectors (SMSPDs) with near-infrared sensitivity have significant advantages in terms of high quantum efficiency and low dark counts in a large active area. Hole-patterned superconductor microstrips have been reported for fast and efficient single-photon detection. In this work, we fabricated and characterized hole-patterned microstrips with different hole diameters on 5 nm thick MoSi films and an area of 500 × 500 μm2. We observed that the count rate curves of detectors 2 and 3 with holes tend to saturate slightly, whereas those of detector 1 without holes do not. Furthermore, the dark count is similar between detector 1 without holes and detector 2 with small holes and much lower than that of detector 3 with large holes. These experiments indicate that a proper hole is beneficial for efficiency without increasing the dark count rate.
Superconducting Single-Photon Detectors (SSPD) invented two decades ago have evolved to a mature technology and have become devices of choice in the advanced applications of quantum optics, such as quantum cryptography and optical quantum computing. In these applications SSPDs are coupled to single-mode fibers and feature almost unity detection efficiency, negligible dark counts, picosecond timing jitter and MHz photon count rate. Meanwhile, there are great many applications requiring coupling to multi-mode fibers or free space. `Classical’ SSPDs with 100-nm-wide superconducting strip and covering area of about 100 µm2 are not suitable for further scaling due to degradation of performance and low fabrication yield. Recently we have demonstrated single-photon counting in micron-wide superconducting bridges and strips. Here we present our approach to the realization of practical photon-counting detectors of large enough area to be efficiently coupled to multi-mode fibers or free space. The detector is either a meander or a spiral of 1-µm-wide strip covering an area of 50x50 µm2. Being operated at 1.7K temperature it demonstrates the saturated detection efficiency (i.e. limited by the absorption in the detector) up to 1550 nm wavelength, about 10 ns dead time and timing jitter in range 50-100 ps.
In this paper, we present a large-area niobium titanium nitride (NbTiN) superconducting microstrip single-photon detector (SMSPD) fabricated using a photolithography process. We fabricated a 1-μm-wide NbTiN-SMSPD covering 420 × 420 μm2active area with a filling factor of 20% using an i-line stepper. The detector is cooled down to approximately 2.2 K, and its performance is evaluated at the wavelengths from visible to near-infrared. The detector operates stably without a shunt resistor and shows single-photon sensitivity for photons with a wavelength of 1550 nm. The bias current dependence of the detection count rate is measured at the wavelengths from 406 to 1550 nm. The saturation of the detection count rate with increasing the bias current was successfully observed at wavelengths below 850 nm, suggesting an internal detection efficiency approaching 100%. Furthermore, we evaluated the timing jitter performance using the femtosecond pulse laser with a wavelength of 1550 nm. Consequently, we achieved a system timing jitter of 85 ps for a light spot diameter of 100 μm.
Superconducting microstrips single-photon detectors (SMSPDs) are a novel type of single-photon sensor based on superconducting thin films patterned into micrometer-scale strip widths. Compared with superconducting nanowire single-photon detectors (SNSPDs), SMSPDs not only substantially lower the fabrication dependence on high-precision electron-beam lithography, but also exhibit lower kinetic inductance, higher bias current, and weaker polarization sensitivity. These advantages pave a new route toward superconducting single-photon detection systems with large active areas and low dark-count rates. Because of their performance, SMSPDs exhibit tremendous application potential in cutting-edge fields such as quantum communication, LiDAR, dark-matter searches, and high-energy particle detection. Accordingly, this paper provides a systematic review of recent advances in SMSPD research, covering the underlying physical mechanisms, material systems, geometrical design, readout circuitry, and application domains. Firstly, this review elaborates on the photon response mechanism of SMSPDs and clarifies its correlation with vortex dynamics. Secondly, this review categorizes the superconducting materials used for SMSPD fabrication and analyzes the influences of characteristic thin-film parameters on device performance. Furthermore, this work concludes the evolution and optimization strategies of geometrical design and readout circuit schemes for SMSPDs, and presents the current application status. Finally, we offer perspectives on its future development trajectory. This review provides a foundation in physical mechanisms and design guidance for the development of large active area SMSPDs with high efficiency and low dark counts.
Future applications in integrated quantum photonics will require large numbers of efficient, fast, and low-noise single-photon counters. Superconducting nanowire single-photon detectors made from amorphous material systems are best suited to meet these demands, but the integration with nanophotonic circuits has remained a challenge. Here, we show how amorphous molybdenum silicide (MoSi) nanowires are integrated with nanophotonic silicon nitride waveguides in traveling wave geometry. We found a saturated on-chip detection efficiency of (73 ± 10) % for telecom wavelength photons and the sub-10 Hz dark count rate at a temperature of 2.1 K, which allows for operation in robust, compact, and economic cryogenic systems. Applications requiring fast counting will benefit from the sub-5 ns recovery times of our devices that we combine with 135 ps timing accuracy. Achieving this performance with waveguide-integrated amorphous superconductors is an important step toward enabling high yield fabrication of competitive single-photon detectors on a large variety of nanophotonic material systems.
Abstract Superconducting nanostrip single photon detectors have emerged as the highest performing single-photon detectors; however, the possibility to use superconducting microstrip as single photon detectors is very appealing both to use them as larger areas detectors and for an easier technology in the manufacturing. The aim of this work is to test the photoresponse in liquid helium dewar of 9 nm thick MoSi covered with a very thin (2 nm) layer of Al, in two different configurations: nanomeanders and microstrips. We demonstrate that MoSi/Al microstrips can work as photodetectors also at T = 4.2 K. We also compare the dark count rate of the microstrip and the nanowire, confirming the lower noise for the microstrips also at 4.2 K.