International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)

The Performance of Superconducting NbN Hot Electron Bolometer with Nb5N6 Buffer Layer

Hongkai Shi, Daogang Sun, Runfeng Su, Tao Xu, Xiaoqing Jia, Lin Kang, Xuecou Tu, Jian Chen, Peiheng Wu

Published Aug 29, 2021• 1 citation

Abstract

Superconducting hot electron bolometer (HEB) were fabricated with Nb5N6buffered NbN on Si substrate. We present the result that the Nb5N6buffer layer can significantly improve the superconductivity of NbN HEB. The 2.5–5 THz superconducting HEB device has been fabricated successfully. We also do some research on devices which work at varied temperature. It is shown that our buffered HEB device could work at relatively high temperature, which means more possibility of applications in the future.

DOI: 10.1109/irmmw-thz50926.2021.9567258

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