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International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)

Superconducting NbN Hot Electron Bolometer with an Nb5N6 Buffer Layer

Daogang Sun, Hongkai Shi, Runfeng Su, Tao Xu, Xuecou Tu, Xiaoqing Jia, Lin Kang, Jian Chen, Peiheng Wu

Published Nov 8, 2020• 1 citation
Publisher

Abstract

In this paper, the superconducting NbN hot electron bolometer terahertz detector with an Nb5N6buffer layer was fabricated on the Si substrate. The Nb5N6buffer layer can significantly improve the superconductivity of ultra-thin NbN films. Preliminary results show that with a 30-nm-thick buffer, the zero resistance superconducting transition temperature of a 6-nm-thick NbN film device is 12.6 K, and the superconducting critical current of the device is increased by four times. The noise temperature, IF bandwidth and direct detection sensitivity of the device will be further characterized in following experiments.

DOI
10.1109/irmmw-thz46771.2020.9370776

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In this paper, the superconducting NbN hot electron bolometer terahertz detector with an Nb5N6buffer layer was fabricated on the Si substrate. The Nb5N6buffer layer can significantly improve the superconductivity of ultra-thin NbN films. Preliminary results show that with a 30-nm-thick buffer, the zero resistance superconducting transition temperature of a 6-nm-thick NbN film device is 12.6 K, and the superconducting critical current of the device is increased by four times. The noise temperature, IF bandwidth and direct detection sensitivity of the device will be further characterized in following experiments.
Hot-electron bolometer (HEB) mixers are a complex multi-layer thin film structure containing an ultra-thin superconducting film of NbN as a detecting element and a thick normal metal layer as an antenna structure. We have optimized the fabrication process starting with ultra-thin NbN films, Au films for antenna structures and their patterning using e-beam lithography and lift-off. The coupling between normal conducting antenna and NbN detector has been improved by introducing an intermediate NbN film to reduce proximity suppression of superconductivity in the detecting element. A critical temperature of about 9.5 K is reached for NbN films with a thickness between 5 nm and 6 nm. A twofold increase of the film thickness increases the critical temperature to 12 K. We have shown that a 20 nm thick buffer layer of NbN under a much thicker Au layer is sufficient to ensure a critical temperature of the bi-layer of 9 K. This value is close to the critical temperature of 5.5 nm thick HEB devices. The noise temperature of HEB mixer made using improved technology is about 800 K and was measured in a liquid cryogen free system with a quantum cascade laser as 2.5 THz local oscillator.
Superconducting nanowire single photon detectors (SNSPDs) based on Si substrates have demonstrated excellent performance, such as high efficiency, low dark count rate, short reset time and low timing jitter. But due to the lattice mismatch between NbN and Si substrate, the performance of film is limited. To this end, Nb5N6layer is fabricated as the buffer layer between the NbN film and Si substrate, and that will reduce the mismatch and optimize superconducting properties of NbN films. The 6nm-thick film with a 65 nm-thick buffer layer shows the zero resistance critical temperature (Tc0) of 13.27 K, which is 5 K higher than that without buffer. Based on the NbN film on the buffered substrate, we fabricated SNSPD devices demonstrate critical current (IC) of 65 μA which is 5 ~ 6 times higher to the detectors without buffer. Besides, the experiment results prove that the buffer layer reduces the kinetic inductance, which fasten the recovery of nanowire.
Hot electron bolometer mixers (HEBM) are expected to be used as low-noise heterodyne mixers in the terahertz frequency range. We are developing quasi-optical HEBMs for applications such as atmospheric remote sensing and radio astronomy in the terahertz frequency range. Therefore, we developed a fabrication method using niobium nitride (NbN) ultrathin films deposited on a silicone (Si) substrate for terahertz applications. First, a magnesium oxide buffer layer 50 nm thick was deposited on a Si substrate at approximately 525 °C. After deposition of this layer, NbN ultrathin films were deposited at ambient temperature. Using the buffer layers, we found the transition temperature of the 3.5-nm-thick NbN thin films to be approximately 10 K. The same method was applied to fabricate NbN-HEBMs on a Si substrate. The fabricated quasi-optical mixers were designed to operate at 3.1 THz. The receiver noise temperature was found to be approximately 1930 K (DSB) at 3.1 THz.
Abstract As part of an effort to develop heterodyne rf receivers operating in the terahertz band, we have fabricated hot‐electron bolometers (HEB) using NbN thin films, and investigated their intermediate frequency (IF) bandwidths. The NbN thin films we studied were grown on single‐crystal MgO substrates by dc reactive sputtering. Our 2.8‐nm‐thick films exhibited superior superconducting properties, including transition temperatures TC of 9.7 K and 20 K resistivities ρ20 of 185 µΩ·cm. Using electron beam diffraction, high‐resolution TEM images, and other techniques to study the crystallinity of these films, we determined that the NbN grows epitaxially on the MgO substrate as single‐crystal material. The HEB elements we made consisted of a NbN microstrip, a Au electrode section, and an Al antenna section. In the course of studying the IF bandwidths of these devices in the millimeter‐wave range, we found one device with an IF bandwidth of 2.5 GHz, the highest of any device we made. © 2002 Wiley Periodicals, Inc. Electron Comm Jpn Pt 2, 85(7): 77–83, 2002; Published online in Wiley InterScience ( www.interscience.wiley.com ). DOI 10.1002/ecjb.1111