Microwave Kinetic Inductance Detectors (MKIDs), just like a planar resonance cavity resonating at a microwave frequency, are emerging as a kind of high-sensitivity detector suitable for large format arrays at terahertz (THz) wavelengths. There are two types of MKIDs, namely distributed (or antenna-coupled) MKIDs and lumped-element MKIDs (aka LeKIDs). Various superconducting thin films (such as Al, TiN, NbTiN, NbN, and Nb) have been investigated for MKIDs. They do work so long as the detected photon energy exceeds their energy gap, but their response and noise behaviors are yet to be fully understood. Here we report on the design, fabrication, and characterization of distributed and lumped-element MKIDs made of NbTiN superconducting film. Detailed simulation and measurement results will be presented.Microwave Kinetic Inductance Detectors (MKIDs), just like a planar resonance cavity resonating at a microwave frequency, are emerging as a kind of high-sensitivity detector suitable for large format arrays at terahertz (THz) wavelengths. There are two types of MKIDs, namely distributed (or antenna-coupled) MKIDs and lumped-element MKIDs (aka LeKIDs). Various superconducting thin films (such as Al, TiN, NbTiN, NbN, and Nb) have been investigated for MKIDs. They do work so long as the detected photon energy exceeds their energy gap, but their response and noise behaviors are yet to be fully understood. Here we report on the design, fabrication, and characterization of distributed and lumped-element MKIDs made of NbTiN superconducting film. Detailed simulation and measurement results will be presented.

Nov 24, 20210 citations

High Kinetic Inductance NbN Nanowire Superinductance

David Niepce, Jonathan Burnett, Jonas Bylander

Bulletin of the American Physical SocietyMar 5, 20180 citations

Analysis and Performance of Lumped-Element Kinetic Inductance Detectors for W-Band

B. Aja, Marina C. de Ory, Luisa de la Fuente +5 more

Lumped-element superconducting resonators are a promising technology for their use in millimeter-wave observations and quantum computing applications that require large arrays of extremely sensitive detectors. Among them, lumped-element kinetic inductance detectors (LEKIDs) have shown good performance in the submillimeter band in several earth-based telescopes. In this work, LEKIDs for their use as millimeter-wave receivers of astronomical applications are presented. LEKID arrays using a thin bilayer of superconducting titanium/aluminum (Ti/Al), deposited on the silicon substrate, have been designed and fabricated. The design of a dual-polarization LEKID with the goal of detection at the W-band for two orthogonal polarizations is described and a fabricated array has demonstrated absorption at ambient temperature. Also, an approximate design methodology of the coupling parameter for LEKIDs' readout, essential for dynamic range optimization of the detector under millimeter-wave radiation, is proposed. In addition, the resonance characteristics and coupling factor of the fabricated superconducting resonators using high-quality internal factor Qiunder cryogenic temperatures have been analyzed. The design guidelines in this work are applicable to other LEKID arrays, and the presented superconducting Ti/Al thin-film LEKIDs can be used in future receiver arrays in the millimeter bands.Lumped-element superconducting resonators are a promising technology for their use in millimeter-wave observations and quantum computing applications that require large arrays of extremely sensitive detectors. Among them, lumped-element kinetic inductance detectors (LEKIDs) have shown good performance in the submillimeter band in several earth-based telescopes. In this work, LEKIDs for their use as millimeter-wave receivers of astronomical applications are presented. LEKID arrays using a thin bilayer of superconducting titanium/aluminum (Ti/Al), deposited on the silicon substrate, have been designed and fabricated. The design of a dual-polarization LEKID with the goal of detection at the W-band for two orthogonal polarizations is described and a fabricated array has demonstrated absorption at ambient temperature. Also, an approximate design methodology of the coupling parameter for LEKIDs' readout, essential for dynamic range optimization of the detector under millimeter-wave radiation, is proposed. In addition, the resonance characteristics and coupling factor of the fabricated superconducting resonators using high-quality internal factor Qiunder cryogenic temperatures have been analyzed. The design guidelines in this work are applicable to other LEKID arrays, and the presented superconducting Ti/Al thin-film LEKIDs can be used in future receiver arrays in the millimeter bands.

IEEE Transactions on Microwave Theory and TechniquesDec 3, 202010 citations

Investigation and Optimization of LEKID Coupling Structures and Multi-Pixel Arrays at 4.2 K

S. Wünsch, G. Hammer, Thomas Kappler +2 more

The development of large multi-pixel detector applications with lumped element kinetic inductance detectors (LEKID) requires a detailed knowledge about the mode of operation in respect of the microwave regime. In this paper the basic properties of LEKID structures for applications at liquid helium temperatures were investigated. In consideration of the operation temperature, the different microwave behavior of LEKID structures coupled to microstrip and coplanar strip readout transmission lines, e.g. loaded and unloaded quality factors, have been examined. For this purpose several test structures, which are suitable for large arrays, in multi-pixel applications, were designed and characterized with frequency around 6 GHz. Loaded quality factors $Q_{L}$ up to 10,000 at 4.2 K were achieved. The devices were fabricated in niobium thin film technology on silicon substrates. LEKID arrays with 3 resonators were designed, fabricated and measured with our self-developed FDM readout system. The results of the measurements will be presented and discussed.The development of large multi-pixel detector applications with lumped element kinetic inductance detectors (LEKID) requires a detailed knowledge about the mode of operation in respect of the microwave regime. In this paper the basic properties of LEKID structures for applications at liquid helium temperatures were investigated. In consideration of the operation temperature, the different microwave behavior of LEKID structures coupled to microstrip and coplanar strip readout transmission lines, e.g. loaded and unloaded quality factors, have been examined. For this purpose several test structures, which are suitable for large arrays, in multi-pixel applications, were designed and characterized with frequency around 6 GHz. Loaded quality factors$Q_{L}$up to 10,000 at 4.2 K were achieved. The devices were fabricated in niobium thin film technology on silicon substrates. LEKID arrays with 3 resonators were designed, fabricated and measured with our self-developed FDM readout system. The results of the measurements will be presented and discussed.

IEEE Transactions on Applied SuperconductivityDec 9, 20109 citations

Fabrication of Superconducting NbN Gate MOSFET for Hybrid Circuit Applications

Nobuhiro Suzuki, Keiji Yamamoto, Satoshi Matsumoto +3 more

International Conference on Solid State Devices and Materials (SSDM)Aug 24, 19944 citations

Q_{L}

up to 10,000 at 4.2 K were achieved. The devices were fabricated in niobium thin film technology on silicon substrates. LEKID arrays with 3 resonators were designed, fabricated and measured with our self-developed FDM readout system. The results of the measurements will be presented and discussed.