Abstract Superconducting nanowire single-photon detectors (SNSPDs) wherein ultrathin films are fabricated on Si substrates are greatly affected by lattice mismatch between the thin film and the substrate. A buffer layer can be used to reduce such lattice mismatch or optimize the strain in the film, thereby improving device performance. We prepared and optimized Nb 5 N 6 as a buffer layer and found that it considerably improved the properties of NbN films on Si substrates. The zero-resistance critical temperature ( T C0 ) of a 3 nm thick NbN film with a 20 nm thick buffer layer was 10.3 K. SNSPDs with Nb 5 N 6 -buffered NbN films were fabricated and compared with normal devices; the fabricated devices had high hysteresis current and low timing jitter. Furthermore, we investigated the thermal diffusion process of the device based on the hysteresis current and hotspot relaxation time and found that Nb 5 N 6 buffer layers enhance the thermal coupling between the superconducting film and substrates. The relaxation time of buffered SNSPD was 14.2 ps, which was shorter than that of nonbuffered SNSPD by 17.8 ps. These effects explain the performance improvement observed in the case of the buffered devices.
Abstract Superconducting nanowire single-photon detectors (SNSPDs) wherein ultrathin films are fabricated on Si substrates are greatly affected by lattice mismatch between the thin film and the substrate. A buffer layer can be used to reduce such lattice mismatch or optimize the strain in the film, thereby improving device performance. We prepared and optimized Nb 5 N 6 as a buffer layer and found that it considerably improved the properties of NbN films on Si substrates. The zero-resistance critical temperature ( T C0 ) of a 3 nm thick NbN film with a 20 nm thick buffer layer was 10.3 K. SNSPDs with Nb 5 N 6 -buffered NbN films were fabricated and compared with normal devices; the fabricated devices had high hysteresis current and low timing jitter. Furthermore, we investigated the thermal diffusion process of the device based on the hysteresis current and hotspot relaxation time and found that Nb 5 N 6 buffer layers enhance the thermal coupling between the superconducting film and substrates. The relaxation time of buffered SNSPD was 14.2 ps, which was shorter than that of nonbuffered SNSPD by 17.8 ps. These effects explain the performance improvement observed in the case of the buffered devices.
Superconducting nanowire single photon detectors (SNSPDs) based on Si substrates have demonstrated excellent performance, such as high efficiency, low dark count rate, short reset time and low timing jitter. But due to the lattice mismatch between NbN and Si substrate, the performance of film is limited. To this end, Nb5N6layer is fabricated as the buffer layer between the NbN film and Si substrate, and that will reduce the mismatch and optimize superconducting properties of NbN films. The 6nm-thick film with a 65 nm-thick buffer layer shows the zero resistance critical temperature (Tc0) of 13.27 K, which is 5 K higher than that without buffer. Based on the NbN film on the buffered substrate, we fabricated SNSPD devices demonstrate critical current (IC) of 65 μA which is 5 ~ 6 times higher to the detectors without buffer. Besides, the experiment results prove that the buffer layer reduces the kinetic inductance, which fasten the recovery of nanowire.
We investigated the suitability of AlN as a buffer layer for NbN superconducting nanowire single-photon detectors (SNSPDs) on GaAs. The NbN films with a thickness of 3.3-20 nm deposited onto GaAs substrates with an AlN buffer layer demonstrate a higher critical temperature, critical current density, and lower residual resistivity in comparison to films deposited onto bare substrates. Unfortunately, the thermal coupling of the NbN film to the substrate weakens. SNSPDs made of 4.9-nm-thick NbN films on buffered substrates (in comparison to detectors made from NbN films on bare GaAs) demonstrate three orders of magnitude lower dark count rates and about ten times higher detection efficiency at 900 nm being measured at 90% of the critical current. The system timing jitter of SNSPDs on buffered substrates is 72 ps, which is 36 ps lower than those on bare substrate. However, a weaker thermal coupling of NbN nanowire to the buffered substrate leads to a latching effect at bias currents > 0.97 IC.
The hotspot dynamics is one of the key process involved in the detection mechanism in superconducting nanowires single photon detectors (SNSPDs). The energy delivered by the photon absorption creates a non-equilibrium region where Cooper pairs break into quasi-particles, which undergo a thermalization process involving hot-electron–phonon interactions within the superconducting film. Eventually, phonons dissipate the excess energy into the substrate and relax to the base temperature. Hence, intrinsic reset time, count rate and possibly other parameters are conceivably affected by thermal coupling between the substrates and the superconducting film. Thus, a detailed understanding of the thermal boundary conductance is crucial for achieving the best possible performances. Even though recent studies have demonstrated that the substrate plays an important role in defining the hotspot relaxation time, no systematic study on the influence on detector performance metrics has been carried out yet. In this work, we investigated the effect of different substrates on SNSPDs performance. Meandered detectors and single nanowires with various dimensions have been successfully fabricated on ultrathin NbN film sputtered on six substrates: SiO2, Al2O3, SiC, SiN, AlN and GaN. We characterized the deposited films measuring Tc, ρ, ΔTc and RRR. Lattice mismatch is known to play an important role in determining the resulting film quality. SiO2 and SiN samples, in which the mismatch is pronounced, showed lower Tc and higher ρ compared to the other substrates. We extracted the critical and retrapping current densities (Jc, Jr respectively) for all the nanowire widths, observing a peculiar behavior in SiO2 and SiN samples which needs further investigation. Optical response was characterized in terms of reset time (τ), dark count rate (DCR) and photon count rate (PCR) with a 1550 nm wavelength laser at 3K. Single photon regime was verified in all the measured detectors. Reset time has been confirmed to be limited by kinetic inductance Lk for all the substrates. DCR behavior appeared to be correlated to the difference in film properties. Only detector fabricated on SiN and SiO2 substrates showed saturation in the photon count rate, while the highest count rate was achieved by Al2O3 sample. The different behavior of photon counts response on the substrates suggests a correlation with the measured thermal conductance β and needs further study. Nevertheless, the comparison between the extracted thermal boundary conductances and the theoretical ones highlighted relevant discrepancies between theory and experimental data. In conclusion, devices fabricated on NbN deposited on different substrates showed a peculiar detector photo-response behavior. A deeper evaluation of NbN disorder grade and a better thermal characterization of the substrate-thin film interface are needed as future work.
Superconducting nanowire single photon detectors stand today as the best technology, due to their near-unity detection efficiency, low dark count rates, and low timing jitter. In this work, we demonstrate the improvement of the superconducting properties of NbN thin films on 8” silicon-on-insulator wafers by using an ultra-thin (10-15 nm) sputtered AlN buffer layer. The higher crystalline quality of NbN, leads to an increase of the superconducting critical temperature up to 10 K for 9-nm-thick NbN films. The material was validated for single photon detection using a fiber-coupled vertical SNSPD with half-cavity architecture. This results opens the way for the development of CMOS compatible waveguide-integrated detectors. The implementation of such guided devices is a keystone for the development of a fully integrated quantum photonics platform able to generate, manipulate and detect a large number of photonic qubits for secure communications and quantum computing applications.
Abstract Hotspot relaxation time (τ th ) is one of the essential parameter which defines the maximum count rate of superconducting nanowire single-photon detectors (SNSPDs). We studied the τ th for NbN-based SNSPDs on various substrates using the two-photon detection method based on the pump-probe spectroscopy technique. We observed that τ th strongly increased with increasing bias current in the two-photon detection regime. In addition, the minimum hotspot relaxation time (τ th )min was not significantly affected by the bath temperature; this is different from the previous observations reported for WSi SNSPDs. In addition, a strong dependency of (τ th )min on the substrate was found. The minimum (τ th )min was 11.6 ps for SNSPDs made of 5.5-nm-thick NbN on MgO (100), whereas the maximum (τ th )min was 34.5 ps for SNSPDs made of 7.5-nm-thick NbN on Si (100). We presented a direct correlation between the values of τ th and degrees of disorder of NbN films grown on different substrates.
Superconducting nanowire single photon detectors (SNSPDs) promise to combine near-unity quantum efficiency with >100 megacounts per second rates, picosecond timing jitter, and sensitivity ranging from x-ray to mid-infrared wavelengths. However, this promise is not yet fulfilled, as superior performance in all metrics is yet to be combined into one device. The highest single-pixel detection efficiency and the widest bias windows for saturated quantum efficiency have been achieved in SNSPDs based on amorphous materials, while the lowest timing jitter and highest counting rates were demonstrated in devices made from polycrystalline materials. Broadly speaking, the amorphous superconductors that have been used to make SNSPDs have higher resistivities and lower critical temperature (Tc) values than typical polycrystalline materials. Here, we demonstrate a method of preparing niobium nitride (NbN) that has lower-than-typical superconducting transition temperature and higher-than-typical resistivity. As we will show, NbN deposited onto unheated SiO2 has a low Tc and high resistivity but is too rough for fabricating unconstricted nanowires, and Tc is too low to yield SNSPDs that can operate well at liquid helium temperatures. By adding a 50 W RF bias to the substrate holder during sputtering, the Tc of the unheated NbN films was increased by up to 73%, and the roughness was substantially reduced. After optimizing the deposition for nitrogen flow rates, we obtained 5 nm thick NbN films with a Tc of 7.8 K and a resistivity of 253 μΩ cm. We used this bias sputtered room temperature NbN to fabricate SNSPDs. Measurements were performed at 2.5 K using 1550 nm light. Photon count rates appeared to saturate at bias currents approaching the critical current, indicating that the device's quantum efficiency was approaching unity. We measured a single-ended timing jitter of 38 ps. The optical coupling to these devices was not optimized; however, integration with front-side optical structures to improve absorption should be straightforward. This material preparation was further used to fabricate nanocryotrons and a large-area imager device, reported elsewhere. The simplicity of the preparation and promising device performance should enable future high-performance devices.