ACTA PHOTONICA SINICA
Electromagnetically Induced Transparency-like Effect in the Optimized Silicon Micro Ring Resonators
Wang Yong-hu
Abstract
To realize the electromagnetically induced transparency-like effect on the silicon waveguide,a double ring resonators structure based on silicon-on-insulator was designed and fabricated.By post processing of thermal oxidation annealing under the temperature from 300℃to 1 200℃,wet chemical etching with buffered oxide etch and N2 annealing under the temperature of 1 000 ℃,the electromagnetically induced transparency-like curve via the vertical grating coupling method was observed.The effect of different distance between the two resonators to the electromagnetically induced transparency-like curve was analyzed.The Qfactor of a single ring in this fabrication was 5.1×104.The measured spectral width of the transparency window was as narrow as 500MHz.