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Fabrication of submicron La2 xSrxCuO4 intrinsic Josephson junction stacks

Yuimaru Kubo, Takahide, Y., Tanaka, T., Ueda, S., Ishii, S., Tsuda, S., Islam, A.T.M.N, Tanaka, I., Takano, Y.

Published Jan 1, 2011• 5 citations
OpenAlex

Abstract

Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors have potential to be implemented as intrinsic phase qubits working at relatively high temperatures. We report success in fabricating submicron La$_{2-x}$Sr$_{x}$CuO$_{4}$ (LSCO) IJJ stacks carved out of single crystals. We also show a new fabrication method in which argon ion etching is performed after focused ion beam etching. As a result, we obtained an LSCO IJJ stack in which resistive multi-branches appeared. It may be possible to control the number of stacked IJJs with an accuracy of a single IJJ by developing this method.

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Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors have potential to be implemented as intrinsic phase qubits working at relatively high temperatures. We report success in fabricating submicron La2−xSrxCuO4 (LSCO) IJJ stacks carved out of single crystals. We also show a new fabrication method in which argon ion etching is performed after focused ion beam etching. As a result, we obtained an LSCO IJJ stack in which resistive multibranches appeared. It may be possible to control the number of stacked IJJs with an accuracy of a single IJJ by developing this method.

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We fabricated submicron-sized intrinsic Josephson junctions by the focused-ion-beam (FIB) etching method. The principal result was a reduction of the in-plane junction area to 0.3 μm2 by direct FIB etching with no degradation in the critical transition temperature (Tc). In the current (I)–voltage (V) characteristics of these stacks, the gap structure and the normal state resistance are clearly observed together with a reduction of the Joule heating and disappearance of the branch structure. The Coulomb staircase structure was found in the I–V curves of submicron junctions as a result of their small effective capacitance of fF order.

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Fabrication of Ultrasmall High-Quality Bi2Sr2CaCu2O8+δIntrinsic Josephson Junctions

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The fabrication of ultrasmall high-quality intrinsic Josephson junctions (IJJs) using a cuprate superconductor is critical for the realization of a qubit. We investigated the mechanism of damage induced by a Ga + beam in a Bi 2 Sr 2 CaCu 2 O 8+δ IJJ during focused ion beam (FIB) processing. On the basis of the results, we developed a process that allowed the successful fabrication of an ultrasmall and high-quality IJJ. The damage induced by the FIB is reduced by restricting the direction of the Ga + beam so that the junction area is not directly irradiated by the ion beam. The fabricated ultrasmall IJJ device has a junction area of 0.3 µm 2 and shows excellent current–voltage characteristics.

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Huabing Wang, Peiheng Wu, Tsutomu Yamashita

Using a newly developed double-side fabrication method, an IJJ stack plus a bow-tie antenna and chokes were integrated in a slice 200 nm thick and singled out from inside a bulk Bi2Sr2CaCu2O8+x (BSCCO) single crystal. The junctions in the fabricated stack were very uniform, and the number of junctions involved was rather controllable. In addition to this method, which can be used to fabricate integrated circuits based on intrinsic Josephson junctions in high temperature (Tc) superconductors, also reported will be terahertz responses of IJJs, and the possible applications in quantum voltage standard, spectroscopy, and so on.

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Possibilities and Challenges of Superconducting Qubits in the Intrinsic Josephson Junctions

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Intrinsic Josephson junctions (IJJs) in the high-Tc cuprate superconductors have several fascinating properties, which are superior to the usual Josephson junctions obtained from conventional superconductors with low Tc, as follows; (1) a very thin thickness of the superconducting layers, (2) a strong interaction between junctions since neighboring junctions are closely connected in an atomic scale, (3) a clean interface between the superconducting and insulating layers, realized in a single crystal with few disorders. These unique properties of IJJs can enlarge the applicable areas of the superconducting qubits, not only the increase of qubit-operation temperature but the novel application of qubits including the macroscopic quantum states with internal degree of freedom. I present a comprehensive review of the phase dynamics in current-biased IJJs and argue the challenges of superconducting qubits utilizing IJJs.

IEICE Transactions on Electronics•Dec 11, 2022•1 citation
Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors have potential to be implemented as intrinsic phase qubits working at relatively high temperatures. We report success in fabricating submicron La2−x_{2-x}2−x​Srx_{x}x​CuO4_{4}4​ (LSCO) IJJ stacks carved out of single crystals. We also show a new fabrication method in which argon ion etching is performed after focused ion beam etching. As a result, we obtained an LSCO IJJ stack in which resistive multi-branches appeared. It may be possible to control the number of stacked IJJs with an accuracy of a single IJJ by developing this method.
Intrinsic Josephson junction (IJJ) stacks of cuprate superconductors have potential to be implemented as intrinsic phase qubits working at relatively high temperatures. We report success in fabricating submicron La2−xSrxCuO4 (LSCO) IJJ stacks carved out of single crystals. We also show a new fabrication method in which argon ion etching is performed after focused ion beam etching. As a result, we obtained an LSCO IJJ stack in which resistive multibranches appeared. It may be possible to control the number of stacked IJJs with an accuracy of a single IJJ by developing this method.
We fabricated submicron-sized intrinsic Josephson junctions by the focused-ion-beam (FIB) etching method. The principal result was a reduction of the in-plane junction area to 0.3 μm2 by direct FIB etching with no degradation in the critical transition temperature (Tc). In the current (I)–voltage (V) characteristics of these stacks, the gap structure and the normal state resistance are clearly observed together with a reduction of the Joule heating and disappearance of the branch structure. The Coulomb staircase structure was found in the I–V curves of submicron junctions as a result of their small effective capacitance of fF order.
The fabrication of ultrasmall high-quality intrinsic Josephson junctions (IJJs) using a cuprate superconductor is critical for the realization of a qubit. We investigated the mechanism of damage induced by a Ga + beam in a Bi 2 Sr 2 CaCu 2 O 8+δ IJJ during focused ion beam (FIB) processing. On the basis of the results, we developed a process that allowed the successful fabrication of an ultrasmall and high-quality IJJ. The damage induced by the FIB is reduced by restricting the direction of the Ga + beam so that the junction area is not directly irradiated by the ion beam. The fabricated ultrasmall IJJ device has a junction area of 0.3 µm 2 and shows excellent current–voltage characteristics.
Using a newly developed double-side fabrication method, an IJJ stack plus a bow-tie antenna and chokes were integrated in a slice 200 nm thick and singled out from inside a bulk Bi2Sr2CaCu2O8+x (BSCCO) single crystal. The junctions in the fabricated stack were very uniform, and the number of junctions involved was rather controllable. In addition to this method, which can be used to fabricate integrated circuits based on intrinsic Josephson junctions in high temperature (Tc) superconductors, also reported will be terahertz responses of IJJs, and the possible applications in quantum voltage standard, spectroscopy, and so on.
We fabricated submicron-sized intrinsic Josephson junctions of Bi-2212 by the focused-ion-beam (FIB) etching method. The main result was a reduction of the in-plane junction area to 0.3 µm 2 by direct FIB etching with no degradation in the critical transition temperature ( T c ). At the current ( I )-voltage ( V ) characteristic of these stacks, the gap structure and the normal-state resistance are clearly observed by a reduction of the Joule heating. The critical current density is considerably suppressed, the hysteresis and multibranch structure are eliminated and a periodic structure of current peaks appears reproducibly on the I - V curves. The period V of the structure is consistent with the Coulomb charging energy of a single pair, V = e / C , where C is the effective capacitance of the stack. It is considered that this behaviour originates from the Coulomb blockade of intrinsic Josephson tunnelling in submicron Bi-2212 stacks. We demonstrated the junction operating up to 10 K for the stack with an in-plane size of 0.3 µm 2 and an elementary junction number of 50.
Intrinsic Josephson junctions (IJJs) in the high-Tc cuprate superconductors have several fascinating properties, which are superior to the usual Josephson junctions obtained from conventional superconductors with low Tc, as follows; (1) a very thin thickness of the superconducting layers, (2) a strong interaction between junctions since neighboring junctions are closely connected in an atomic scale, (3) a clean interface between the superconducting and insulating layers, realized in a single crystal with few disorders. These unique properties of IJJs can enlarge the applicable areas of the superconducting qubits, not only the increase of qubit-operation temperature but the novel application of qubits including the macroscopic quantum states with internal degree of freedom. I present a comprehensive review of the phase dynamics in current-biased IJJs and argue the challenges of superconducting qubits utilizing IJJs.