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Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

Atomic spectroscopy and laser frequency stabilization with scalable micrometer and sub-micrometer vapor cells

Eliran Talker, Roy Zektzer, Yefim Barash, Noa Mazurski, Uriel Levy

Published Aug 26, 2020• 15 citations
Publisher

Abstract

We report on the atomic spectroscopy and laser frequency stabilization using a new type of a miniaturized glass vapor cell with a scalable thickness varying from 500 nm up to 8 μm. The cell is fabricated by lithography and etching techniques in a Pyrex glass substrate, followed by anodic bonding. It is filled with rubidium vapor using a distillation procedure. This simple and cost-effective fabrication method provides an attractive and compact solution for atomic cells, with applications in quantum metrology, sensing, communication, and light-vapor manipulations at the subwavelength scale. Using the fabricated cell, we have performed fluorescence and transmission spectroscopy of the Rubidium D2 line and observed sub-Doppler broadened lines. As an example, for a potential application, we have used the fabricated cell to demonstrate the stabilization of a 780 nm diode laser to the level about 10−10 in fractional frequency.

DOI
10.1116/6.0000416

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We report on the atomic spectroscopy and laser frequency stabilization using a new type of a miniaturized glass vapor cell with a scalable thickness varying from 500 nm up to 8 μm. The cell is fabricated by lithography and etching techniques in a Pyrex glass substrate, followed by anodic bonding. It is filled with rubidium vapor using a distillation procedure. This simple and cost-effective fabrication method provides an attractive and compact solution for atomic cells, with applications in quantum metrology, sensing, communication, and light-vapor manipulations at the subwavelength scale. Using the fabricated cell, we have performed fluorescence and transmission spectroscopy of the Rubidium D2 line and observed sub-Doppler broadened lines. As an example, for a potential application, we have used the fabricated cell to demonstrate the stabilization of a 780 nm diode laser to the level about 10−10 in fractional frequency.
We report on the fabrication of millimeter-sized vapor cells and their performance in atomic clocks based on coherent population trapping (CPT). We discuss two fabrication techniques. The first one is based on hollow-core pyrex fibers, fused with a CO/sub 2/ laser or micro-torch, and the second one involves anodic bonding of micro-machined silicon wafers to pyrex. Key aspects of the discussion are the performance of the cell in frequency references, the potential for further miniaturization of the cells and the ability to manufacture them on a large scale with reproducible performance.
We demonstrate strontium (Sr) atomic vapor cells having a total external volume of 0.63 cm 3 that can operate above 300 °C for times exceeding 380 h. The cells are fabricated using micromachined silicon frames anodically bonded to glass windows that have a 20-nm thick protective layer of Al 2 O 3 deposited on the interior surfaces. The presence of Sr vapor in the cell is confirmed through laser absorption spectroscopy for the 1 S 0 → 1 P 1 transition in Sr at 461 nm. Measurements of sub-Doppler linewidths indicated negligible (<3 MHz) broadening of this transition from residual background gas collisions. This compact and manufacturable, high-temperature atomic vapor cell can enable narrow-line optical frequency references based on strontium and other alkaline earth species.
Atomic spectroscopy serves as the basis for quantum precision measurements, where frequency-stabilized lasers are crucial for obtaining accurate atomic spectra.This work introduces a compact laser frequency stabilization system that employs a multifunctional metasurface to adjust the polarization, amplitude, and propagation direction of incident light.By combining with a Rb atomic vapor cell, the system achieves a tunable sub-Doppler spectrum for laser frequency stabilization.The experimental result demonstrates that a laser frequency stability of 3 × 10 -11 is attained from 1 to 200 s at 780 nm with the input power at 20 μW.The devices hold significant potential for compactness, integration, and mass production, making them highly suitable for quantum measurement applications.
Microfabricated (MEMS) alkali vapor cells are at the core of high-precision integrated atomic quantum sensors and devices [1], such as microwave and optical clocks, or magnetometers. The first chip-scale atomic device was a microwave atomic clock based on coherent population trapping [2]. It has offered in its industrial and commercialized version an ultra-low size-power -instability budget, impacting a plethora of industrial and scientific applications. Nevertheless, the short-term stability of these clocks is usually limited at about 10−10 at 1 s. Hot vapor MEMS-based optical frequency standards constitute a new generation of miniaturized clocks, with enhanced stability. These references keep the benefit of using wafer-scalable and mass-producible vapor cells while preventing ultra-high vacuum technologies and laser cooling. Among the transitions explored, the 6S1/2 → 7P1/2 near-UV transition of Cs atom was used to demonstrate an optical reference with a stability of 2.1 × 10−13 at 1 s and averaging down to a few 10−14 [3]. However, this reference was based on a 5 cm-long glass-blown cell, not compliant with the advent of a fully-miniaturized and low-power optical clock. In this work [4], we present the characterization of sub-Doppler resonances detected in a microfabricated cell by probing, in a simple saturated absorption configuration, the Cs atom 6S1/2 → 7P1/2 transition at 459 nm. The impact of the laser intensity and cell temperature on the sub-Doppler resonance is experimentally investigated. Optimal values are identified for the development of a near-UV microcell-stabilized frequency reference. Detection noise measurements are also reported, predicting a short-term stability in the 10−13 range at 1 s. Tests of cells with embedded getters are under progress for improved purity of the cell inner atmosphere and narrowing of the resonance.
Atomic clocks represent the most advanced instruments for providing time-frequency standards, with increasing demand for designs that offer high frequency stability while minimizing size. Central to an atomic clock’s function is the atomic vapor cell, which serves as the quantum reference. Compared to traditional cells, wafer-level micro-electro-mechanical systems (MEMS) vapor cells enable cost-effective, scalable production and facilitate integration with silicon-based chips. In this work, we present a wafer-level MEMS vapor cell featuring an innovative silicon-glass-silicon transverse optical path structure. A single wafer is used to fabricate 24 identical atomic vapor cells, each with precise dimensions of 14 mm×14 mm×4.3 mm, ensuring scalability. We demonstrate an optical frequency standard that combines modulation transfer spectroscopy (MTS) with a MEMS vapor cell, featuring a compact design with excellent performance. This frequency standard achieves stability over averaging times of 1–400 s, with short-term stability of 2.6×10 −13 at 1 s and 5.1×10 −14 at 200 s. The laser linewidth is only 3.9 kHz, marking a substantial improvement over existing thermal standards, and opening potential applications in navigation, radar, and precision measurement. This work provides a crucial step toward the development of chip-scale optical clocks.