Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Superconducting single electron transistor for charge sensing in Si/SiGe-based quantum dots

Zhen Yang

Published Jan 1, 2015• 0 citations
Publisher
DOI
10.1349/ddlp.2386

Related papers

Optimising single electron transistors as electrometers for high-precision electrometry of charge on quantum dots

Vincent I. Conrad, Andrew D. Greentree, David N. Jamieson +1 more

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE•Jan 1, 2005•0 citations

Back-action-induced excitation of electrons in a silicon quantum dot with a single-electron transistor charge sensor

浩介 堀部, Kosuke Horibe, 哲夫 小寺 +3 more

•Feb 1, 2015•0 citations

Si/SiGe quantum dot with superconducting single-electron transistor charge sensor

Mingyun Yuan, Feng Pan, Zhen Yang +6 more

We report a robust process for fabrication of surface-gated Si/SiGe quantum dots (QDs) with an integrated superconducting single-electron transistor (SSET) charge sensor. A combination of a deep mesa etch and AlOx backfill is used to reduce gate leakage. After the leakage current is suppressed, Coulomb oscillations of the QD and the current-voltage characteristics of the SSET are observed at a temperature of 0.3 K. Coupling of the SSET to the QD is confirmed by using the SSET to perform sensing of the QD charge state.

arXiv:1102.4544•Applied Physics Letters•Apr 4, 2011•15 citations

Charge sensitivity of single-electron transistor with superconducting electrodes

Alexander N. Korotkov

Superlattices and Microstructures•Dec 1, 1996•0 citations

Charge sensing in a Si/SiGe quantum dot with a radio frequency superconducting single-electron transistor

Mingyun Yuan, Zhen Yang, D. E. Savage +3 more

We report the operation of a radio frequency superconducting single-electron transistor (rf-SSET) as a charge sensor for single and double Si/SiGe quantum dots (QDs). Real-time electron tunneling events are observed from the reflected signal of the rf-SSET with a charge sensitivity of 4×10−6 e/Hz, which demonstrates a fast charge detection time of a few tens of microseconds. Measurements of the reflected power are used to map out the stability diagram of the double quantum dot.

Applied Physics Letters•Oct 1, 2012•12 citations

13.4: Xiling: Cryo-CMOS 18-bit Dual-DAC Manipulator with $4.6\mu\mathrm{V}$ Precision and $4.1 \text{nV}/\text{Hz}^{0.5}$ Noise Co-Integrated with the Single Electron Transistor at 60mK

Yingjie Li, Yifei Zhang, Haichuan Lin +1 more

Millions of physical quantum-bits (Qubits) are envisioned for a fault-tolerant quantum computer [1]. Compared with the superconducting Qubit or trapped-ions, the silicon spin Qubits are scaling friendly due to the compatibility with the advanced silicon process. Intel recently reveals the fabrication and 1.6K verification of hundreds of Si/SiGe quantum dots on a 300mm Si wafer [2]. In addition, through the Coulomb blockade, the single electron transistor (SET) controls the flow of the electron between the source and drain to a quantum dot built either by a single phosphorus atom on Silicon [3] or a Si/SiGe heterostructure [4] (Fig. 13.4.1). It plays an important role in the Elzerman readout of Si Qubit states [5]. In both of the Si Qubit and SET, the gate voltage sets the energy barrier for the manipulation of the electron spin. For the single electron device with multiple gates, a high precision voltage bias at the source and drain is required to counteract the undesired source-drain offset, which is around$10\mu \mathrm{V}$. Therefore, high precision and low noise gate control is crucial for the high-fidelity quantum logic gate. Furthermore, since the Qubits are hosted on the sub-100mK stage of dilution refrigerator, the cabling from room-temp. (300K) control electronics to Qubits is a significant challenge. To this end, the ultra-low power Cryo-CMOS circuitry emerges as a promising solution [6].

Digest of technical papers/Digest of technical papers - IEEE International Solid-State Circuits Conference•Feb 16, 2025•7 citations
We report a robust process for fabrication of surface-gated Si/SiGe quantum dots (QDs) with an integrated superconducting single-electron transistor (SSET) charge sensor. A combination of a deep mesa etch and AlOx backfill is used to reduce gate leakage. After the leakage current is suppressed, Coulomb oscillations of the QD and the current-voltage characteristics of the SSET are observed at a temperature of 0.3 K. Coupling of the SSET to the QD is confirmed by using the SSET to perform sensing of the QD charge state.
13.4: Xiling: Cryo-CMOS 18-bit Dual-DAC Manipulator with 4.6μV4.6\mu\mathrm{V}4.6μV Precision and 4.1nV/Hz0.54.1 \text{nV}/\text{Hz}^{0.5}4.1nV/Hz0.5 Noise Co-Integrated with the Single Electron Transistor at 60mK
Millions of physical quantum-bits (Qubits) are envisioned for a fault-tolerant quantum computer [1]. Compared with the superconducting Qubit or trapped-ions, the silicon spin Qubits are scaling friendly due to the compatibility with the advanced silicon process. Intel recently reveals the fabrication and 1.6K verification of hundreds of Si/SiGe quantum dots on a 300mm Si wafer [2]. In addition, through the Coulomb blockade, the single electron transistor (SET) controls the flow of the electron between the source and drain to a quantum dot built either by a single phosphorus atom on Silicon [3] or a Si/SiGe heterostructure [4] (Fig. 13.4.1). It plays an important role in the Elzerman readout of Si Qubit states [5]. In both of the Si Qubit and SET, the gate voltage sets the energy barrier for the manipulation of the electron spin. For the single electron device with multiple gates, a high precision voltage bias at the source and drain is required to counteract the undesired source-drain offset, which is around10μV10\mu \mathrm{V}10μV. Therefore, high precision and low noise gate control is crucial for the high-fidelity quantum logic gate. Furthermore, since the Qubits are hosted on the sub-100mK stage of dilution refrigerator, the cabling from room-temp. (300K) control electronics to Qubits is a significant challenge. To this end, the ultra-low power Cryo-CMOS circuitry emerges as a promising solution [6].