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Chinese Physics Letters

A Silicon Shallow-Ridge Waveguide Integrated Superconducting Nanowire Single Photon Detector Towards Quantum Photonic Circuits*

Lingjie Yu, Heqing Wang, Hao Li, Zhen Wang, Yidong Huang, Lixing You, Wei Zhang

Published Aug 1, 2019• 8 citations
Publisher

Abstract

A silicon shallow-ridge waveguide integrated superconducting nanowire single photon detector is designed and fabricated. At the bias current of 11.6 μA, 4% on-chip detection efficiency near 1550 nm wavelength is achieved with the dark count rate of 3 Hz and a timing jitter of 75 ps. This device shows the potential application in the integration of superconducting nanowire single photon detectors with a complex quantum photonic circuit.

DOI
10.1088/0256-307x/36/8/084202

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A silicon shallow-ridge waveguide integrated superconducting nanowire single photon detector is designed and fabricated. At the bias current of 11.6 μA, 4% on-chip detection efficiency near 1550 nm wavelength is achieved with the dark count rate of 3 Hz and a timing jitter of 75 ps. This device shows the potential application in the integration of superconducting nanowire single photon detectors with a complex quantum photonic circuit.
Superconducting nanowire single-photon detectors (SNSPDs) provide high efficiency for detecting individual photons while keeping dark counts and timing jitter minimal. Besides superior detection performance over a broad optical bandwidth, compatibility with an integrated optical platform is a crucial requirement for applications in emerging quantum photonic technologies. Here we present SNSPDs embedded in nanophotonic integrated circuits which achieve internal quantum efficiencies close to unity at 1550 nm wavelength. This allows for the SNSPDs to be operated at bias currents far below the critical current where unwanted dark count events reach milli-Hz levels while on-chip detection efficiencies above 70% are maintained. The measured dark count rates correspond to noise-equivalent powers in the 10(-19) W/Hz(-1/2) range and the timing jitter is as low as 35 ps. Our detectors are fully scalable and interface directly with waveguide-based optical platforms.
Nanophotonic integrated circuits are emerging as a promising platform for quantum photonics. A key building block are waveguide integrated detectors with superior performance. Detectors based on superconductor nanowires (SNSPDs) attached to optical waveguides have been shown to provide high efficiency and good timing performance, as well as broad bandwidth. To move towards applications in high bandwidth quantum communication and processing, ultrafast single-photon detectors with high efficiency are needed. The speed of meander type SNSPDs is limited because the required high absorption efficiency necessitates long nanowires deposited on top of the waveguide. This enhances the kinetic inductance and makes the detectors slow. We overcome this problem by aligning the nanowire perpendicular to the waveguide to realize devices with a length below 1 µm. By integrating the nanowire into a photonic crystal cavity, we recover high absorption efficiency, thus enhancing the detection efficiency by more than an order of magnitude. Our cavity enhanced superconducting nanowire detectors are fully embedded in silicon nanophotonic circuits and efficiently detect single photons at telecom wavelengths. The detectors possess sub-nanosecond decay (~ 120 ps) and recovery times (~ 510 ps), and thus show potential for GHz count rates at low timing jitter (~ 32 ps).
Future applications in integrated quantum photonics will require large numbers of efficient, fast, and low-noise single-photon counters. Superconducting nanowire single-photon detectors made from amorphous material systems are best suited to meet these demands, but the integration with nanophotonic circuits has remained a challenge. Here, we show how amorphous molybdenum silicide (MoSi) nanowires are integrated with nanophotonic silicon nitride waveguides in traveling wave geometry. We found a saturated on-chip detection efficiency of (73 ± 10) % for telecom wavelength photons and the sub-10 Hz dark count rate at a temperature of 2.1 K, which allows for operation in robust, compact, and economic cryogenic systems. Applications requiring fast counting will benefit from the sub-5 ns recovery times of our devices that we combine with 135 ps timing accuracy. Achieving this performance with waveguide-integrated amorphous superconductors is an important step toward enabling high yield fabrication of competitive single-photon detectors on a large variety of nanophotonic material systems.
Superconducting nanowire single-photon detectors are an ideal match for integrated quantum photonic circuits due to their high detection efficiency for telecom wavelength photons. Quantum optical technology also requires single-photon detection with low dark count rate and high timing accuracy. Here we present very low noise superconducting nanowire single-photon detectors based on NbTiN thin films patterned directly on top of Si3N4 waveguides. We systematically investigate a large variety of detector designs and characterize their detection noise performance. Milli-Hz dark count rates are demonstrated over the entire operating range of the nanowire detectors which also feature low timing jitter. The ultra-low dark count rate, in combination with the high detection efficiency inherent to our travelling wave detector geometry, gives rise to a measured noise equivalent power at the 10(-20) W/Hz(1/2) level.
Ultrafast single-photon detectors with high efficiency are of utmost importance for many applications in the context of integrated quantum photonic circuits. Detectors based on superconductor nanowires attached to optical waveguides are particularly appealing for this purpose. However, their speed is limited because the required high absorption efficiency necessitates long nanowires deposited on top of the waveguide. This enhances the kinetic inductance and makes the detectors slow. Here, we solve this problem by aligning the nanowire, contrary to usual choice, perpendicular to the waveguide to realize devices with a length below 1 μm. By integrating the nanowire into a photonic crystal cavity, we recover high absorption efficiency, thus enhancing the detection efficiency by more than an order of magnitude. Our cavity enhanced superconducting nanowire detectors are fully embedded in silicon nanophotonic circuits and efficiently detect single photons at telecom wavelengths. The detectors possess subnanosecond decay (∼120 ps) and recovery times (∼510 ps) and thus show potential for GHz count rates at low timing jitter (∼32 ps). The small absorption volume allows efficient threshold multiphoton detection.
Fast and efficient detection of single photons with high timing accuracy is a crucial requirement in most quantum optics experiments and enables novel sensing and imaging solutions. Superconducting nanowire single-photon detectors (SNSPD) achieve technology-leading performance in terms of detection efficiency, dark count rate, timing jitter, and detector dead times. However, conventional SNSPDs with high system detection efficiency typically rely on resonant enhancement of the absorption efficiency, thus only achieving attractive detector benchmarks over narrow spectral windows. Waveguide-integrated SNSPDs allow for leveraging the wideband material absorption in superconducting nanowires by absorbing light in a traveling-wave geometry but have been limited to low system detection efficiencies due to interface losses when coupling to optical fibers. Here, we show how high system detection efficiencies of 22%–73% are realized over a broad wavelength range from 532 nm to 1640 nm in a single waveguide-integrated SNSPD device. We accomplish efficient coupling between optical fibers and waveguide-integrated nanowire detectors by employing a 3D interface, produced in direct laser writing, that relies on total internal reflection for achieving a broad transmission bandwidth. We further find low timing jitter of 25.7 ps and detector decay times of 9.8 ns, allowing for single-photon counting with high repetition rates up to 100 MHz. Our work paves the way for an efficient single-photon detector solution that combines the spectral requirements of an extremely wide range of quantum optics experiments in a single device. The coupling approach and SNSPD-integration with nanophotonic circuits are further well-suited for realizing large-scale detector arrays.