The NIST on a Chip (NOAC) program's central idea is the idea that measurement technology can be developed to enable metrology to be performed "outside the National Metrology Institute" by the creation of deployed and often miniaturized standards. These standards, when based on fundamental properties of nature, are directly tracible to the international system of units known as the SI. NIST is also developing quantum-based standards for SI traceability known as QSI, or Quantum based International System of units. Specifically, this paper will cover NIST efforts in the area of thermodynamic metrology to develop NOAC standards for pressure, vacuum and temperature measurements.
We describe how laser-cooled and trapped alkali-metal atoms have been used as pressure sensors in the high- and ultra-high-vacuum regimes operating with relative uncertainties of just over a percent at pressures from a few nPa and up to a few tens of
μPa. These sensors can serve as primary standards of pressure as the determination of pressure requires only knowledge of collision cross sections between atoms and molecules, eliminating the need for calibration with other devices. The collision cross sections can be measured independently or computed with rigorous quantum methods at percent relative accuracies. We argue that this technology has advanced sufficiently to provide an alternative to the existing, expensive pressure standard in the ultra-high vacuum regime, the orifice flow standard. Experiments with trapped atoms can be used to calibrate cheaper pressure sensors (such as devices based on ionization gauges). However, the technology has not yet matured enough to be of use in other research fields because of the complexity and cost of the experiments. We propose a roadmap for this new pressure standard for vacuum metrology.