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Optica

Quantum-correlated photon pairs generated in a commercial 45 nm complementary metal-oxide semiconductor microelectronic chip

Cale M. Gentry, Jeffrey M. Shainline, Mark T. Wade, Martin J. Stevens, Shellee D. Dyer, Xiaoge Zeng, Fabio Pavanello, Thomas Gerrits, Sae Woo Nam, Richard P. Mirin, Miloš A. Popović

Published Dec 14, 2015• 67 citations
Publisher

Abstract

Correlated photon pairs are a fundamental building block of quantum photonic systems. While pair sources have previously been integrated on silicon chips built using customized photonics manufacturing processes, these often take advantage of only a small fraction of the established techniques for microelectronics fabrication and have yet to be integrated in a process that also supports electronics. Here we report the first demonstration of quantum-correlated photon pair generation in a device fabricated in an unmodified advanced (sub-100-nm) complementary metal-oxide semiconductor (CMOS) process, alongside millions of working transistors. The microring resonator photon pair source is formed in the transistor layer structure, with the resonator core formed by the silicon layer typically used for the transistor body. With ultralow CW on-chip pump powers ranging from 4.8 to 400 μW, we demonstrate pair generation rates between 165 Hz and 332 kHz using >80% efficient WSi superconducting nanowire single-photon detectors. Coincidences-to-accidentals ratios consistently exceeding 40 were measured, with a maximum of 55. In the process of characterizing this source, we also accurately predict pair generation rates from the results of classical stimulated four-wave mixing measurements. This proof-of-principle device demonstrates the potential of commercial CMOS microelectronics as an advanced quantum photonics platform with the capability of large volumes and pristine process control, where state-of-the-art high-speed digital circuits could interact with quantum photonic circuits.

DOI
10.1364/optica.2.001065

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Quantum-correlated photon pairs generated in a commercial 45nm complementary metal-oxide semiconductor microelectronics chip

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Correlated photon pairs are a fundamental building block of quantum photonic systems. While pair sources have previously been integrated on silicon chips built using customized photonics manufacturing processes, these often take advantage of only a small fraction of the established techniques for microelectronics fabrication and have yet to be integrated in a process which also supports electronics. Here we report the first demonstration of quantum-correlated photon pair generation in a device fabricated in an unmodified advanced (sub-100nm) complementary metal-oxide-semiconductor (CMOS) process, alongside millions of working transistors. The microring resonator photon pair source is formed in the transistor layer structure, with the resonator core formed by the silicon layer typically used for the transistor body. With ultra-low continuous-wave on-chip pump powers ranging from 5 $μ$W to 400 $μ$W, we demonstrate pair generation rates between 165 Hz and 332 kHz using >80% efficient WSi superconducting nanowire single photon detectors. Coincidences-to-accidentals ratios consistently exceeding 40 were measured with a maximum of 55. In the process of characterizing this source we also accurately predict pair generation rates from the results of classical four-wave mixing measurements. This proof-of-principle device demonstrates the potential of commercial CMOS microelectronics as an advanced quantum photonics platform with capability of large volume, pristine process control, and where state-of-the-art high-speed digital circuits could interact with quantum photonic circuits.

arXiv:1507.01121•Jul 4, 2015•3 citations

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Correlated photon pair generation based on spontaneous four-wave-mixing in ultra-silicon-rich nitride waveguides (Conference Presentation)

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Correlated single photons provide a means to drive applications such as quantum computing and quantum communications. Correlated single photons can be generated via parametric down conversion in second–order nonlinear media or spontaneous four–wave mixing in third–order nonlinear media. In particular, complementary metal–oxide–semiconductor (CMOS) technology allows for seamless integration with electronics, providing the potential for a completely on-chip solution for quantum information processing. Ultra–silicon–rich nitride platform is a backend CMOS compatible platform, that has already been used to obtain high gain optical parametric amplification, wideband supercontinuum and enhanced nonlinearity in photonic crystal waveguides due to its large nonlinearity. In this work, we demonstrate correlated photon pair generation based on spontaneous four–wave mixing using ultra-silicon-rich nitride waveguides for the application in CMOS–based optical quantum technologies. A CW pump at a wavelength of 1555.747nm amplified using an EDFA is filtered through five wavelength division multiplexers (WDM) with a bandwidth of 1.2nm, providing 175dB suppression of EDFA induced pump sideband noise. The filtered quasi–TE pump, adjusted using a fiber polarization controller, is coupled into an ultra–silicon–rich nitride waveguide using a lensed fiber. A SiO2 cladded waveguide with a width of 550nm and height of 300nm possesses a high nonlinear parameter of 530W^-1/m with anomalous dispersion necessary for spontaneous four-wave mixing. The waveguide output is coupled into a lensed fiber and 7 cascaded WDMs are used to provide 245dB of residual pump filtration. The pump–suppressed output is spectrally separated into signal/idler part using WDMs. We refer to lower (higher) frequency photon as the signal (idler). The spontaneously generated signal and idler photons are filtered using cascaded tunable band pass filters (OTF) centered at 1571.24nm and cascaded WDMs centered at 1540.56nm, respectively. The bandwidth of the tunable OTF and WDM is 0.5nm and 1.2nm, therefore the correlated signal/idler photons are observed within the bandwidth window of 0.5nm induced by the OTF. The signal and idler photons are measured using InGaAs/InP avalanche photodetectors. The time correlation between signal and idler photons is obtained using a time interval analyzer with a detection efficiency of 20% and dead time of 15μs.The time bin is set to 81ps and the photon collection time is 240s. The coincidence peak is located ~11ns in the time–bin histogram due to the optical-path difference between the tunable OTF and WDM at respective signal and idler sides. The experimental raw coincidence counts (Hz), calculated by subtracting the accidental rate from the coincidence peak, show a quadratic increase with respect to coupled pump power. At the maximum coupled power of 5mW, the raw coincidence count is ~1Hz. We achieve a raw coincidence–to–accidental ratio (CAR) of up to 3. Therefore, we succeeded to observe correlated photon pair generation based on spontaneous four–wave mixing using the ultra–silicon–rich-nitride waveguide as a CMOS compatible platform, for future applications in quantum technologies.

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Correlated photon pairs are a fundamental building block of quantum photonic systems. While pair sources have previously been integrated on silicon chips built using customized photonics manufacturing processes, these often take advantage of only a small fraction of the established techniques for microelectronics fabrication and have yet to be integrated in a process that also supports electronics. Here we report the first demonstration of quantum-correlated photon pair generation in a device fabricated in an unmodified advanced (sub-100-nm) complementary metal-oxide semiconductor (CMOS) process, alongside millions of working transistors. The microring resonator photon pair source is formed in the transistor layer structure, with the resonator core formed by the silicon layer typically used for the transistor body. With ultralow CW on-chip pump powers ranging from 4.8 to 400 μW, we demonstrate pair generation rates between 165 Hz and 332 kHz using >80% efficient WSi superconducting nanowire single-photon detectors. Coincidences-to-accidentals ratios consistently exceeding 40 were measured, with a maximum of 55. In the process of characterizing this source, we also accurately predict pair generation rates from the results of classical stimulated four-wave mixing measurements. This proof-of-principle device demonstrates the potential of commercial CMOS microelectronics as an advanced quantum photonics platform with the capability of large volumes and pristine process control, where state-of-the-art high-speed digital circuits could interact with quantum photonic circuits.
Correlated photon pairs are a fundamental building block of quantum photonic systems. While pair sources have previously been integrated on silicon chips built using customized photonics manufacturing processes, these often take advantage of only a small fraction of the established techniques for microelectronics fabrication and have yet to be integrated in a process which also supports electronics. Here we report the first demonstration of quantum-correlated photon pair generation in a device fabricated in an unmodified advanced (sub-100nm) complementary metal-oxide-semiconductor (CMOS) process, alongside millions of working transistors. The microring resonator photon pair source is formed in the transistor layer structure, with the resonator core formed by the silicon layer typically used for the transistor body. With ultra-low continuous-wave on-chip pump powers ranging from 5 μμμW to 400 μμμW, we demonstrate pair generation rates between 165 Hz and 332 kHz using >80% efficient WSi superconducting nanowire single photon detectors. Coincidences-to-accidentals ratios consistently exceeding 40 were measured with a maximum of 55. In the process of characterizing this source we also accurately predict pair generation rates from the results of classical four-wave mixing measurements. This proof-of-principle device demonstrates the potential of commercial CMOS microelectronics as an advanced quantum photonics platform with capability of large volume, pristine process control, and where state-of-the-art high-speed digital circuits could interact with quantum photonic circuits.
Integrated photonics provides scalability needed for useful photonic quantum information processing. Many optical resonators must be aligned to the same pump wavelength to produce sources of quantum-correlated photon pairs that drive such systems, but existing solutions rely on manual alignment or offline tuning based on external photodiodes and bulky off-chip electronics, limiting scalability. Here we demonstrate feedback control of four-wave mixing (stimulated and spontaneous) in a silicon microring using circuits integrated alongside photonics in a standard 45 nm CMOS foundry process. The carrier-sweepout-generated feedback signal enables in-situ operation in the photon-pair generation regime, which is a key building block enabling large-scale CMOS quantum-photonic systems-on-chip.
Chip-scale integrated photonic circuits provide an attractive platform for the implementation of many quantum photonic technologies ranging from precise metrology to secure communication and quantum computation. In particular, silicon photonic platforms support micron-scale nonlinear optical sources of non-classical light which can be mass manufactured using the robust fabrication processes pioneered by the CMOS microelectronics industry. Integration of these quantum photonic sources with high-performance classical photonic devices on the same chip is required for truly scalable quantum information technologies. Integrated nonlinear resonators are investigated as sources of quantum mechanically correlated photon pair sources. An all-order dispersion engineering method is presented as a robust design synthesis for micoring sources. In addition, a novel concept of coupled mode dispersion compensation is proposed and demonstrated, providing significantly improved performance characteristics of resonant four-wave mixing sources. Next a photon pair source is demonstrated in a commercial CMOS microelectronics process opening the door to future integration of quantum photonics with electronic logic and control circuits. Classical nonlinear optical measurements of stimulated four-wave mixing are used for the first time to accurately predict the quantum correlations from the same device operating in the photon pair regime. Next the first demonstration of fully on-chip pump rejection is demonstrated with over 95 dB pump extinction improving the figures of merit from previous demonstrations by multiple orders of magnitude, including losses, detected pair rates and size. Finally, proposals for introducing novel degrees of freedom provided by an integrated platform are presented for further improving the performance of both photon pair and classical nonlinear optical sources.
We demonstrate on-chip generation of correlated pairs of photons in the near-visible spectrum using a CMOS compatible plasma-enhanced chemical vapor deposition silicon nitride photonic device. Photons are generated via spontaneous four wave mixing enhanced by a ring resonator with high intrinsic quality Q-factor of 3,20,000, resulting in a generation rate of 950,000 pairsmW. The high brightness of this source offers the opportunity to expand photonic quantum technologies over a broad wavelength range and provides a path to develop fully integrated quantum chips working at room temperature.
Correlated single photons provide a means to drive applications such as quantum computing and quantum communications. Correlated single photons can be generated via parametric down conversion in second–order nonlinear media or spontaneous four–wave mixing in third–order nonlinear media. In particular, complementary metal–oxide–semiconductor (CMOS) technology allows for seamless integration with electronics, providing the potential for a completely on-chip solution for quantum information processing. Ultra–silicon–rich nitride platform is a backend CMOS compatible platform, that has already been used to obtain high gain optical parametric amplification, wideband supercontinuum and enhanced nonlinearity in photonic crystal waveguides due to its large nonlinearity. In this work, we demonstrate correlated photon pair generation based on spontaneous four–wave mixing using ultra-silicon-rich nitride waveguides for the application in CMOS–based optical quantum technologies. A CW pump at a wavelength of 1555.747nm amplified using an EDFA is filtered through five wavelength division multiplexers (WDM) with a bandwidth of 1.2nm, providing 175dB suppression of EDFA induced pump sideband noise. The filtered quasi–TE pump, adjusted using a fiber polarization controller, is coupled into an ultra–silicon–rich nitride waveguide using a lensed fiber. A SiO2 cladded waveguide with a width of 550nm and height of 300nm possesses a high nonlinear parameter of 530W^-1/m with anomalous dispersion necessary for spontaneous four-wave mixing. The waveguide output is coupled into a lensed fiber and 7 cascaded WDMs are used to provide 245dB of residual pump filtration. The pump–suppressed output is spectrally separated into signal/idler part using WDMs. We refer to lower (higher) frequency photon as the signal (idler). The spontaneously generated signal and idler photons are filtered using cascaded tunable band pass filters (OTF) centered at 1571.24nm and cascaded WDMs centered at 1540.56nm, respectively. The bandwidth of the tunable OTF and WDM is 0.5nm and 1.2nm, therefore the correlated signal/idler photons are observed within the bandwidth window of 0.5nm induced by the OTF. The signal and idler photons are measured using InGaAs/InP avalanche photodetectors. The time correlation between signal and idler photons is obtained using a time interval analyzer with a detection efficiency of 20% and dead time of 15μs.The time bin is set to 81ps and the photon collection time is 240s. The coincidence peak is located ~11ns in the time–bin histogram due to the optical-path difference between the tunable OTF and WDM at respective signal and idler sides. The experimental raw coincidence counts (Hz), calculated by subtracting the accidental rate from the coincidence peak, show a quadratic increase with respect to coupled pump power. At the maximum coupled power of 5mW, the raw coincidence count is ~1Hz. We achieve a raw coincidence–to–accidental ratio (CAR) of up to 3. Therefore, we succeeded to observe correlated photon pair generation based on spontaneous four–wave mixing using the ultra–silicon–rich-nitride waveguide as a CMOS compatible platform, for future applications in quantum technologies.
Entangled photon-pair sources are essential components for emerging quantum information-processing technologies. Among various platforms, on-chip microresonators offer strong potential due to their resonant enhancement and suitability for wafer-scale integration. In this study, we demonstrate ultrabright entangled photon-pair generation from high- Q silicon microring resonators. By optimizing the device geometry and coupling configuration to suppress sidewall scattering and selectively excite the fundamental mode, we achieve single-mode resonance with an intrinsic Q -factor of 1.26 × 10 6 using only standard fabrication processes available in CMOS foundries. The resulting high- Q resonator yields a record-high brightness coefficient of 3.9 × 10 9 Hz/GHz/mW 2 . At an on-chip pump power of 240 μW, we obtain a maximum brightness of 22.0 MHz/GHz and a maximum photon-pair generation rate of 9.19 MHz. At a low-pump power of 10 μW, Franson-type two-photon interference exhibits a visibility of 98.0 ± 0.2%, confirming high-quality time–energy entanglement. These results show that narrow bandwidth and high generation rate can be achieved simultaneously in CMOS-compatible silicon photonic sources, thereby advancing their use in quantum repeaters and scalable quantum networks.