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The Japan Society of Applied Physics

Coherence Properties of Shallow NV Centers in Diamond by Surface Oxidation

Sora Kawai, Hayate Yamano, Miki Kajiya, Kanami Kato, Taisuke Kageura, Masafumi Inaba, Takuma Okada, Itaru Higashimata, Moriyoshi Haruyama, Takashi Tanii, K. Yamada, Shinobu Onoda, Tokuyuki Teraji, Wataru Kada, Osamu Hanaizumi, Junichi Isoya, Hiroshi Kawarada

Published Jul 22, 2016• 0 citations
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We present an enhancement of spin properties of the shallow (<5nm) NV centers by using ALD to deposit titanium oxide layer on the diamond surface. With the oxide layer of an appropriate thickness, increases about 2 up to 3.5 times of both relaxation time and evolution time were achieved and the shallow NV center charge states stabilized as well. Moreover, the coherence time kept almost unchanged. This surface coating technique could produce a protective coating layer of controllable thickness without any damages to the solid quantum system surface, making it possible to prolong T1 time and T2* time, which would be a possible approach to the further packaging technique for the applicating solid quantum devices.
Abstract The nitrogen-vacancy (NV) center in diamond is the most promising candidate for quantum sensing because of its beneficial properties. For quantum-sensing applications, a shallow NV center is critical for approximating the sensing target on a diamond surface. Such shallow NV centers are strongly affected by the diamond surface termination. The properties of shallow NV centers in hydrogen-, oxygen-, and fluorine-terminated diamond have been well studied. In recent years, silicon-terminated diamond has also been investigated; however, the effect of silicon-terminated diamond on the properties of shallow NV centers remains unclear. Recently, the suitability of nitrogen-terminated diamond for shallow NV centers has been theoretically and experimentally examined; however, quantum sensing has not yet been performed. In this work, we evaluated the effect of silicon and nitrogen termination on shallow NV centers. The negatively charged state of shallow NV centers was unstable below silicon termination. In contrast, the properties of shallow NV centers in nitrogen-terminated diamond were satisfactory for quantum sensing and enabled 1H NMR detection. Our results are in good agreement with previous reports on silicon and nitrogen terminations and provide the perspective that the stability of shallow NV centers highly depends on the polarity of electron affinity of the diamond surface.
We investigated the depth dependence of coherence times of nitrogen-vacancy (NV) centers through precise depth control using oxidative etching at 580 °C in air. By successive nanoscale etching, NV centers could be brought close to the diamond surface step by step, which enabled us to track the evolution of the number of NV centers remaining in the chip and to study the depth dependence of coherence times of NV centers with diamond etching. Our results showed that the coherence times of NV centers declined rapidly with the depth reduction in the last about 22 nm before they finally disappeared, which revealed a critical depth for the influence of a rapid fluctuating surface spin bath. Moreover, by using the slow etching method combined with low-energy nitrogen implantation, NV centers with depths shallower than the initially implanted depths can be generated, which are preferred for detecting external spins with higher sensitivity.