Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

arXiv:1507.06207 · Nanoscale

Coherence times of precise depth controlled NV centers in diamond

Junfeng Wang, Wenlong Zhang, Jian Zhang, Jie You, Yan Li, Guoping Guo, Fupan Feng, Xuerui Song, Liren Lou, Wei Zhu, Guanzhong Wang

Published Jan 1, 2016• 50 citations
arXivHTMLPDF

Abstract

We investigated the depth dependence of coherence times of nitrogen-vacancy (NV) centers through precise depth control using oxidative etching at 580 °C in air. By successive nanoscale etching, NV centers could be brought close to the diamond surface step by step, which enabled us to track the evolution of the number of NV centers remaining in the chip and to study the depth dependence of coherence times of NV centers with diamond etching. Our results showed that the coherence times of NV centers declined rapidly with the depth reduction in the last about 22 nm before they finally disappeared, which revealed a critical depth for the influence of a rapid fluctuating surface spin bath. Moreover, by using the slow etching method combined with low-energy nitrogen implantation, NV centers with depths shallower than the initially implanted depths can be generated, which are preferred for detecting external spins with higher sensitivity.

DOI
10.1039/c5nr08690f

Related papers

Depth-dependent decoherence caused by surface and external spins for NV centers in diamond

Wenlong Zhang, Jian Zhang, Junfeng Wang +5 more

By efficient nanoscale plasma etching, the nitrogen-vacancy (NV) centers in diamond were brought to the sample surface step by step successfully. At each depth, we measured the ratios of spin coherence times before and after applying external spins on the surface, which reflected the contribution of external spins to the decoherence, and then investigated the relationships between depth and ratios. The values of ratios declined and then rose with the decreasing depth, which was attributed to the decoherence influenced by external spins, surface spins, discrete surface spin effects, and electric field noise. Moreover, our work experimentally and theoretically revealed a characteristic depth at which the NV center would experience relatively the strongest decoherence caused by external spins in consideration of inevitable surface spins. And the characteristic depth was found depending on the local environments of NV centers and the density of surface spins.

arXiv:1709.09070•Physical review. B./Physical review. B•Dec 29, 2017•24 citations

Engineering shallow spins in diamond with nitrogen delta-doping

Kenichi Ohno, F. Joseph Heremans, Lee C. Bassett +5 more

We demonstrate nanometer-precision depth control of nitrogen-vacancy (NV) center creation near the surface of synthetic diamond using an in situ nitrogen delta-doping technique during plasma-enhanced chemical vapor deposition. Despite their proximity to the surface, doped NV centers with depths (d) ranging from 5 to 100 nm display long spin coherence times, T2 > 100 μs at d = 5 nm and T2 > 600 μs at d ≥ 50 nm. The consistently long spin coherence observed in such shallow NV centers enables applications such as atomic-scale external spin sensing and hybrid quantum architectures.

arXiv:1207.2784•Applied Physics Letters•Aug 20, 2012•324 citations

A coherence-protection scheme for quantum sensors based on ultra-shallow single nitrogen-vacancy centers in diamond

Anton Pershin, András Tárkányi, Vladimir Verkhovlyuk +2 more

High spatial resolution quantum sensing of near-surface nitrogen vacancy (NV) centers in diamond has enabled detection of magnetic, electrical, and thermal signals at the nanoscale. At depths of just a few nanometers, NV centers serve as localized quantum probes for external spins or low-dimensional materials, but their proximity to the surface also enhances decoherence caused by fluctuating nuclear spins. While advances in surface engineering have stabilized the charge state of NV centers at depths of tens of nanometers, achieving both ultra-shallow implantation (0.5-2 nm) and long-term spin coherence remains a central challenge. In this work, we show using first-principles modeling that, by exploiting the interaction of surface-induced strain and weak dc magnetic fields, the spin coherence times of 1-nm-deep NV centers can be greatly improved near the spin-phonon-confined regime at room temperature in 12C-rich diamonds. We also demonstrate that this protocol benefits ~ 10-nm-deep NV centers in natural diamond, enabling vector magnetometry at the nanoscale. Shallow NV centers in diamond are advantageous for quantum sensing but suffer from surface magnetic noise. Using first-principles simulations supported by experiments, the authors show that a combination of small magnetic fields and surface strain can significantly enhance spin coherence of 1 nm-deep NV centers.

arXiv:2501.00180•Nature Communications•Nov 6, 2025•9 citations

Spin coherence and depths of single nitrogen-vacancy centers created by ion implantation into diamond via screening masks

Shuntaro Ishizu, Kento Sasaki, Daiki Misonou +3 more

We characterize single nitrogen-vacancy (NV) centers created by 10-keVN+ ion implantation into diamond via thin SiO2 layers working as screening masks. Despite the relatively high acceleration energy compared with standard ones (<5keV) used to create near-surface NV centers, the screening masks modify the distribution of N+ ions to be peaked at the diamond surface [Ito et al., Appl. Phys. Lett. 110, 213105 (2017)]. We examine the relation between coherence times of the NV electronic spins and their depths, demonstrating that a large portion of NV centers are located within 10 nm from the surface, consistent with Monte Carlo simulations. The effect of the surface on the NV spin coherence time is evaluated through noise spectroscopy, surface topography, and x-ray photoelectron spectroscopy.

arXiv:2006.07763•Journal of Applied Physics•Jun 24, 2020•8 citations

Creation of Depth-Confined, Shallow Nitrogen-Vacancy Centers in Diamond With Tunable Density

Lillian B. Hughes Wyatt, Shreyas Parthasarathy, Isaac Kantor +6 more

Engineering shallow nitrogen-vacancy (NV) centers in diamond holds the key to unlocking new advances in nanoscale quantum sensing. We find that the creation of near-surface NVs through delta doping during diamond growth allows for tunable control over both NV depth confinement (with a twofold improvement relative to low-energy ion implantation) and NV density, ultimately resulting in highly-sensitive single defects and ensembles with coherence limited by NV-NV interactions. Additionally, we demonstrate the utility of our shallow delta-doped NVs by imaging magnetism in few-layer CrSBr, a two-dimensional magnet. We anticipate that the control afforded by near-surface delta doping will enable new developments in NV quantum sensing from nanoscale NMR to entanglement-enhanced metrology.

quant-pharXiv:2512.11242•Applied Physics Letters•Dec 15, 2025•0 citations

Perfectly aligned shallow ensemble nitrogen-vacancy centers in (111) diamond

Hitoshi Ishiwata, Makoto Nakajima, Kosuke Tahara +3 more

We report the formation of perfectly aligned, high-density, shallow nitrogen vacancy (NV) centers on the (111) surface of a diamond. The study involved step-flow growth with a high flux of nitrogen during chemical vapor deposition (CVD) growth, which resulted in the formation of a highly concentrated (>1019 cm−3) nitrogen layer approximately 10 nm away from the substrate surface. Photon counts obtained from the NV centers indicated the presence of 6.1 × 1015–3.1 × 1016 cm−3 NV centers, which suggested the formation of an ensemble of NV centers. The optically detected magnetic resonance (ODMR) spectrum confirmed perfect alignment (more than 99%) for all the samples fabricated by step-flow growth via CVD. Perfectly aligned shallow ensemble NV centers indicated a high Rabi contrast of approximately 30% which is comparable to the values reported for a single NV center. Nanoscale nuclear magnetic resonance demonstrated surface-sensitive nuclear spin detection and provided a confirmation of the NV centers' depth. Single NV center approximation indicated that the depth of the NV centers was approximately 9–10.7 nm from the surface with error of less than ±0.8 nm. Thus, a route for material control of shallow NV centers has been developed by step-flow growth using a CVD system. Our finding pioneers on the atomic level control of NV center alignment for large area quantum magnetometry.

arXiv:1704.03642•Applied Physics Letters•Jul 24, 2017•60 citations
We investigated the depth dependence of coherence times of nitrogen-vacancy (NV) centers through precise depth control using oxidative etching at 580 °C in air. By successive nanoscale etching, NV centers could be brought close to the diamond surface step by step, which enabled us to track the evolution of the number of NV centers remaining in the chip and to study the depth dependence of coherence times of NV centers with diamond etching. Our results showed that the coherence times of NV centers declined rapidly with the depth reduction in the last about 22 nm before they finally disappeared, which revealed a critical depth for the influence of a rapid fluctuating surface spin bath. Moreover, by using the slow etching method combined with low-energy nitrogen implantation, NV centers with depths shallower than the initially implanted depths can be generated, which are preferred for detecting external spins with higher sensitivity.
By efficient nanoscale plasma etching, the nitrogen-vacancy (NV) centers in diamond were brought to the sample surface step by step successfully. At each depth, we measured the ratios of spin coherence times before and after applying external spins on the surface, which reflected the contribution of external spins to the decoherence, and then investigated the relationships between depth and ratios. The values of ratios declined and then rose with the decreasing depth, which was attributed to the decoherence influenced by external spins, surface spins, discrete surface spin effects, and electric field noise. Moreover, our work experimentally and theoretically revealed a characteristic depth at which the NV center would experience relatively the strongest decoherence caused by external spins in consideration of inevitable surface spins. And the characteristic depth was found depending on the local environments of NV centers and the density of surface spins.
We demonstrate nanometer-precision depth control of nitrogen-vacancy (NV) center creation near the surface of synthetic diamond using an in situ nitrogen delta-doping technique during plasma-enhanced chemical vapor deposition. Despite their proximity to the surface, doped NV centers with depths (d) ranging from 5 to 100 nm display long spin coherence times, T2 > 100 μs at d = 5 nm and T2 > 600 μs at d ≥ 50 nm. The consistently long spin coherence observed in such shallow NV centers enables applications such as atomic-scale external spin sensing and hybrid quantum architectures.
High spatial resolution quantum sensing of near-surface nitrogen vacancy (NV) centers in diamond has enabled detection of magnetic, electrical, and thermal signals at the nanoscale. At depths of just a few nanometers, NV centers serve as localized quantum probes for external spins or low-dimensional materials, but their proximity to the surface also enhances decoherence caused by fluctuating nuclear spins. While advances in surface engineering have stabilized the charge state of NV centers at depths of tens of nanometers, achieving both ultra-shallow implantation (0.5-2 nm) and long-term spin coherence remains a central challenge. In this work, we show using first-principles modeling that, by exploiting the interaction of surface-induced strain and weak dc magnetic fields, the spin coherence times of 1-nm-deep NV centers can be greatly improved near the spin-phonon-confined regime at room temperature in 12C-rich diamonds. We also demonstrate that this protocol benefits ~ 10-nm-deep NV centers in natural diamond, enabling vector magnetometry at the nanoscale. Shallow NV centers in diamond are advantageous for quantum sensing but suffer from surface magnetic noise. Using first-principles simulations supported by experiments, the authors show that a combination of small magnetic fields and surface strain can significantly enhance spin coherence of 1 nm-deep NV centers.
We characterize single nitrogen-vacancy (NV) centers created by 10-keVN+ ion implantation into diamond via thin SiO2 layers working as screening masks. Despite the relatively high acceleration energy compared with standard ones (<5keV) used to create near-surface NV centers, the screening masks modify the distribution of N+ ions to be peaked at the diamond surface [Ito et al., Appl. Phys. Lett. 110, 213105 (2017)]. We examine the relation between coherence times of the NV electronic spins and their depths, demonstrating that a large portion of NV centers are located within 10 nm from the surface, consistent with Monte Carlo simulations. The effect of the surface on the NV spin coherence time is evaluated through noise spectroscopy, surface topography, and x-ray photoelectron spectroscopy.
Engineering shallow nitrogen-vacancy (NV) centers in diamond holds the key to unlocking new advances in nanoscale quantum sensing. We find that the creation of near-surface NVs through delta doping during diamond growth allows for tunable control over both NV depth confinement (with a twofold improvement relative to low-energy ion implantation) and NV density, ultimately resulting in highly-sensitive single defects and ensembles with coherence limited by NV-NV interactions. Additionally, we demonstrate the utility of our shallow delta-doped NVs by imaging magnetism in few-layer CrSBr, a two-dimensional magnet. We anticipate that the control afforded by near-surface delta doping will enable new developments in NV quantum sensing from nanoscale NMR to entanglement-enhanced metrology.
We report the formation of perfectly aligned, high-density, shallow nitrogen vacancy (NV) centers on the (111) surface of a diamond. The study involved step-flow growth with a high flux of nitrogen during chemical vapor deposition (CVD) growth, which resulted in the formation of a highly concentrated (>1019 cm−3) nitrogen layer approximately 10 nm away from the substrate surface. Photon counts obtained from the NV centers indicated the presence of 6.1 × 1015–3.1 × 1016 cm−3 NV centers, which suggested the formation of an ensemble of NV centers. The optically detected magnetic resonance (ODMR) spectrum confirmed perfect alignment (more than 99%) for all the samples fabricated by step-flow growth via CVD. Perfectly aligned shallow ensemble NV centers indicated a high Rabi contrast of approximately 30% which is comparable to the values reported for a single NV center. Nanoscale nuclear magnetic resonance demonstrated surface-sensitive nuclear spin detection and provided a confirmation of the NV centers' depth. Single NV center approximation indicated that the depth of the NV centers was approximately 9–10.7 nm from the surface with error of less than ±0.8 nm. Thus, a route for material control of shallow NV centers has been developed by step-flow growth using a CVD system. Our finding pioneers on the atomic level control of NV center alignment for large area quantum magnetometry.