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Bulletin of the American Physical Society

Superconducting high kinetic inductance resonators made from granular aluminum

Lukas Grünhaupt, Sebastian T. Skacel, Nataliya Maleeva, Z. Wang, Alexey Vladimirovich Ustinov, Hannes Rotzinger, Ioan M. Pop

Published Mar 17, 2017• 0 citations
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We design superinductors made of strongly disordered superconductors for implementation in ``hybrid'' superconducting quantum circuits. The superinductors are fabricated as meandered nanowires made from granular aluminum films. Optimization of the device geometry enables the realization of superinductors with an inductance of approximately 1 $\ensuremath{\mu}\mathrm{H}$ and a self-resonance frequency of over 3 GHz. These compact superinductors are attractive for a wide range of applications, from superconducting circuits for quantum computing to microwave elements of cryogenic parametric amplifiers and kinetic inductance photon detectors.
Superconducting high kinetic inductance elements constitute a valuable resource for quantum circuit design and millimeter-wave detection. Granular aluminum (grAl) in the superconducting regime is a particularly interesting material since it has already shown a kinetic inductance in the range of nH/□ and its deposition is compatible with conventional Al/AlOx/Al Josephson junction fabrication. We characterize microwave resonators fabricated from grAl with a room temperature resistivity of 4×10^{3} μΩ cm, which is a factor of 3 below the superconductor to insulator transition, showing a kinetic inductance fraction close to unity. The measured internal quality factors are on the order of Q_{i}=10^{5} in the single photon regime, and we demonstrate that nonequilibrium quasiparticles (QPs) constitute the dominant loss mechanism. We extract QP relaxation times in the range of 1 s and we observe QP bursts every ∼20 s. The current level of coherence of grAl resonators makes them attractive for integration in quantum devices, while it also evidences the need to reduce the density of nonequilibrium QPs.
Recently, a new kind of distributed element superconducting resonators with granular aluminum (grAl) has been developed for circuit quantum electrodynamics. Given that lumped element resonators possess certain advantages over the distributed element ones, in this paper, we use a relatively simple micro-nanotechnology, without the etching process, to fabricate the designed lumped element superconducting grAl resonators. They are deposited on silicon substrates by DC magnetron sputtering of pure Al in an atmosphere of Ar and O2. By cryogenic microwave transmission measurements, at a temperature of 50 mK, we find that, compared with a usual Al resonator of the same size, such a device shows significantly strong nonlinearity and thus higher kinetic inductance. The noise features, quality factors, and temperature-dependence of the resonant frequencies have been investigated experimentally. It is believed that the lumped element superconducting resonators with high kinetic inductance demonstrated here could also be applied to superconducting quantum computation and photon counting in the future.