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arXiv:1910.00996 · Physical Review Applied

Granular Aluminum Meandered Superinductors for Quantum Circuits

Plamen Kamenov, Wen-Sen Lu, K. V. Kalashnikov, Thomas J. DiNapoli, M. T. Bell, M. E. Gershenson

Published May 20, 2020• 37 citations
arXivHTMLPDF

Abstract

We design superinductors made of strongly disordered superconductors for implementation in ``hybrid'' superconducting quantum circuits. The superinductors are fabricated as meandered nanowires made from granular aluminum films. Optimization of the device geometry enables the realization of superinductors with an inductance of approximately 1 $\ensuremath{\mu}\mathrm{H}$ and a self-resonance frequency of over 3 GHz. These compact superinductors are attractive for a wide range of applications, from superconducting circuits for quantum computing to microwave elements of cryogenic parametric amplifiers and kinetic inductance photon detectors.

DOI
10.1103/physrevapplied.13.054051

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AIP Advances•Jun 1, 2021•4 citations
We design superinductors made of strongly disordered superconductors for implementation in ``hybrid'' superconducting quantum circuits. The superinductors are fabricated as meandered nanowires made from granular aluminum films. Optimization of the device geometry enables the realization of superinductors with an inductance of approximately 1 \ensuremathμH\ensuremath{\mu}\mathrm{H}\ensuremathμH and a self-resonance frequency of over 3 GHz. These compact superinductors are attractive for a wide range of applications, from superconducting circuits for quantum computing to microwave elements of cryogenic parametric amplifiers and kinetic inductance photon detectors.
Superconducting circuits based on high kinetic inductance materials are promising candidates for future quantum technologies, owing to their magnetic field resilience, low microwave losses, and lithographic scalability. In this thesis, we explore the properties of granular aluminum (grAl) resonators in two distinct geometries, using the nonlinear kinetic inductance of grAl for applications in superconducting quantum circuits. In the first part, we present compact meandered ring resonators fabricated using a single-step electron-beam lithography and lift-off process. By optimizing film resistivity and geometry, we achieve superinductors with characteristic impedances exceeding 100 kΩ100~\mathrm{k}\Omega100 kΩ, corresponding to total inductances of several microhenries, while maintaining internal quality factors on the order of 10510^{5}105 in the single-photon regime. In the second part, we investigate DC-tunable resonators based on a 3λ/43\lambda/43λ/4 fractal geometry that allows direct current injection for in-situ tuning of the resonance frequency. We achieve frequency tunability up to 4.5%4.5\%4.5% and analyze the nonlinear kinetic inductance using models based on Ginzburg-Landau, Mattis-Bardeen-BCS, and an effective Josephson-junction-array model. This work establishes granular aluminum as a material for realizing high-impedance and frequency-tunable superconducting circuits, offering new opportunities for advanced applications in protected qubits, hybrid quantum systems, broadband phase shifters, and three-wave mixing parametric amplifiers.
Superinductors are inductors whose microwave characteristic impedances are greater than the resistance quantum, RQ=h/(2e)2approx6.5kOmegaR_{Q}=h/(2e)^{2}approx6.5kOmegaRQ​=h/(2e)2approx6.5kOmega. They can be implemented using Josephson junction chains and high kinetic inductance nanowires. In this dissertation, we explore applications of superinductors in both implementations in superconducting quantum circuits. The dissertation consists of three parts. In the first part, we discuss the fluxon-parity-protected qubit consisting of a Cooper-pair box (CPB) shunted by a superinductor made of a chain of coupled asymmetric Superconducting Quantum Interference Devices (CASQUIDs). The spectroscopic measurement of a prototype of the fluxon-parity-protected qubit was performed. We observed almost complete suppression of the single fluxon tunneling across the CPB due to the destructive Aharonov-Casher interference when the offset charge on the CPB island was set to eee mod(2eee). A fluxon-parity-protected qubit with a higher superinductance can potentially be used to perform fault-tolerant Clifford gates. In the second part, we studied the microwave losses in high-kinetic-inductance granular Aluminum films using superconducting coplanar-waveguide (CPW) resonators made of the films. We observed that the intrinsic losses in these resonators at low temperatures were limited by resonator coupling to the two-level systems (TLS) in the environment. The demonstrated internal quality factors are comparable with those for CPW resonators made of conventional superconductors. The characterized granular Aluminum films can be used to fabricate superinductors for a wide range of applications in quantum metrology and quantum information processing. In the third part, we discuss the one-dimensional Josephson metamaterial made of a similar structure as the superinductor used in the fluxon-parity-protected qubit. The metamaterial demonstrated strong Kerr nonlinearity with the Kerr constant tunable over a wide range from positive to negative values by the magnetic field. The metamaterial is promising for use as an active medium for quantum-limited Josephson traveling-wave parametric amplifiers.
Superconducting inductors with impedance surpassing the resistance quantum, i.e., superinductors, are important for quantum technologies because they enable the development of protected qubits, enhance coupling to systems with small electric dipole moments, and facilitate the study of phase-slip physics. We demonstrate superinductors with densely packed meandered traces of granular aluminum ( grAl ) with inductances up to 4 µH, achieving impedances exceeding 100 k in the 4–8 GHz range. Ring resonators made with grAl meandered superinductors exhibit quality factors on the order of 10 5 in the single-photon regime, and low nonlinearity on the order of tens of hertz. Depending on the grAl resistivity, at 10 Hz, we measure frequency-noise spectral densities in the range of 10 2 – 10 3 Hz / Hz . In some devices, in the single-photon regime, we observe a positive Kerr coefficient of unknown origin. Using more complex fabrication, the devices could be released from the substrate, either freestanding or suspended on a membrane, thereby further improving their impedance by a factor of 3.
Superconducting high kinetic inductance elements constitute a valuable resource for quantum circuit design and millimeter-wave detection. Granular aluminum (grAl) in the superconducting regime is a particularly interesting material since it has already shown a kinetic inductance in the range of nH/□ and its deposition is compatible with conventional Al/AlOx/Al Josephson junction fabrication. We characterize microwave resonators fabricated from grAl with a room temperature resistivity of 4×10^{3} μΩ cm, which is a factor of 3 below the superconductor to insulator transition, showing a kinetic inductance fraction close to unity. The measured internal quality factors are on the order of Q_{i}=10^{5} in the single photon regime, and we demonstrate that nonequilibrium quasiparticles (QPs) constitute the dominant loss mechanism. We extract QP relaxation times in the range of 1 s and we observe QP bursts every ∼20 s. The current level of coherence of grAl resonators makes them attractive for integration in quantum devices, while it also evidences the need to reduce the density of nonequilibrium QPs.
Recently, a new kind of distributed element superconducting resonators with granular aluminum (grAl) has been developed for circuit quantum electrodynamics. Given that lumped element resonators possess certain advantages over the distributed element ones, in this paper, we use a relatively simple micro-nanotechnology, without the etching process, to fabricate the designed lumped element superconducting grAl resonators. They are deposited on silicon substrates by DC magnetron sputtering of pure Al in an atmosphere of Ar and O2. By cryogenic microwave transmission measurements, at a temperature of 50 mK, we find that, compared with a usual Al resonator of the same size, such a device shows significantly strong nonlinearity and thus higher kinetic inductance. The noise features, quality factors, and temperature-dependence of the resonant frequencies have been investigated experimentally. It is believed that the lumped element superconducting resonators with high kinetic inductance demonstrated here could also be applied to superconducting quantum computation and photon counting in the future.