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Pushing the Boundaries of Impedance and Nonlinearity in Superconducting Quantum Circuits Based on Granular Aluminum

Mahya Khorramshahi

Published Jan 1, 2026• 0 citations
Publisher

Abstract

Superconducting circuits based on high kinetic inductance materials are promising candidates for future quantum technologies, owing to their magnetic field resilience, low microwave losses, and lithographic scalability. In this thesis, we explore the properties of granular aluminum (grAl) resonators in two distinct geometries, using the nonlinear kinetic inductance of grAl for applications in superconducting quantum circuits. In the first part, we present compact meandered ring resonators fabricated using a single-step electron-beam lithography and lift-off process. By optimizing film resistivity and geometry, we achieve superinductors with characteristic impedances exceeding \(100~\mathrm{k}\Omega\), corresponding to total inductances of several microhenries, while maintaining internal quality factors on the order of \(10^{5}\) in the single-photon regime. In the second part, we investigate DC-tunable resonators based on a \(3\lambda/4\) fractal geometry that allows direct current injection for in-situ tuning of the resonance frequency. We achieve frequency tunability up to \(4.5\%\) and analyze the nonlinear kinetic inductance using models based on Ginzburg-Landau, Mattis-Bardeen-BCS, and an effective Josephson-junction-array model. This work establishes granular aluminum as a material for realizing high-impedance and frequency-tunable superconducting circuits, offering new opportunities for advanced applications in protected qubits, hybrid quantum systems, broadband phase shifters, and three-wave mixing parametric amplifiers.

DOI
10.5445/ir/1000193390

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•Jan 1, 2019•1 citation
Superconducting circuits based on high kinetic inductance materials are promising candidates for future quantum technologies, owing to their magnetic field resilience, low microwave losses, and lithographic scalability. In this thesis, we explore the properties of granular aluminum (grAl) resonators in two distinct geometries, using the nonlinear kinetic inductance of grAl for applications in superconducting quantum circuits. In the first part, we present compact meandered ring resonators fabricated using a single-step electron-beam lithography and lift-off process. By optimizing film resistivity and geometry, we achieve superinductors with characteristic impedances exceeding (100~\mathrm{k}\Omega), corresponding to total inductances of several microhenries, while maintaining internal quality factors on the order of (10^{5}) in the single-photon regime. In the second part, we investigate DC-tunable resonators based on a (3\lambda/4) fractal geometry that allows direct current injection for in-situ tuning of the resonance frequency. We achieve frequency tunability up to (4.5%) and analyze the nonlinear kinetic inductance using models based on Ginzburg-Landau, Mattis-Bardeen-BCS, and an effective Josephson-junction-array model. This work establishes granular aluminum as a material for realizing high-impedance and frequency-tunable superconducting circuits, offering new opportunities for advanced applications in protected qubits, hybrid quantum systems, broadband phase shifters, and three-wave mixing parametric amplifiers.
Superconducting inductors with impedance surpassing the resistance quantum, i.e., superinductors, are important for quantum technologies because they enable the development of protected qubits, enhance coupling to systems with small electric dipole moments, and facilitate the study of phase-slip physics. We demonstrate superinductors with densely packed meandered traces of granular aluminum ( grAl ) with inductances up to 4 µH, achieving impedances exceeding 100 k in the 4–8 GHz range. Ring resonators made with grAl meandered superinductors exhibit quality factors on the order of 10 5 in the single-photon regime, and low nonlinearity on the order of tens of hertz. Depending on the grAl resistivity, at 10 Hz, we measure frequency-noise spectral densities in the range of 10 2 – 10 3 Hz / Hz . In some devices, in the single-photon regime, we observe a positive Kerr coefficient of unknown origin. Using more complex fabrication, the devices could be released from the substrate, either freestanding or suspended on a membrane, thereby further improving their impedance by a factor of 3.
High kinetic inductance materials constitute a valuable resource for superconducting quantum circuits and hybrid architectures. Superconducting granular aluminum (grAl) reaches kinetic sheet inductances in the nH/□ range, with proven applicability in superconducting quantum bits and microwave detectors. Here, we show that the single photon internal quality factor Qi of grAl microwave resonators exceeds 105 in magnetic fields up to 1 T, aligned in-plane to the grAl films. Small perpendicular magnetic fields, in the range of 0.5 mT, enhance Qi by approximately 15%, possibly due to the introduction of quasiparticle traps in the form of fluxons. Further increasing the perpendicular field deteriorates the resonators' quality factor. These results open the door for the use of high kinetic inductance grAl structures in circuit quantum electrodynamics and hybrid architectures with magnetic field requirements.
We design superinductors made of strongly disordered superconductors for implementation in ``hybrid'' superconducting quantum circuits. The superinductors are fabricated as meandered nanowires made from granular aluminum films. Optimization of the device geometry enables the realization of superinductors with an inductance of approximately 1 $\ensuremath{\mu}\mathrm{H}$ and a self-resonance frequency of over 3 GHz. These compact superinductors are attractive for a wide range of applications, from superconducting circuits for quantum computing to microwave elements of cryogenic parametric amplifiers and kinetic inductance photon detectors.
Superconducting resonators with high-kinetic inductance play a central role in hybrid quantum circuits, enabling strong coupling with quantum systems with small electric dipole moment and improved parametric amplification. However, optimizing these resonators simultaneously for high internal quality factors (QiQ_iQi​) and resilience to strong magnetic fields remains challenging. In this study, we systematically compare superconducting resonators fabricated from niobium nitride (NbN) and granular aluminum (grAl) thin films, each having similar kinetic inductance values (Lk∼100L_k \sim 100Lk​∼100 pH/sq). At zero magnetic field, resonators made from grAl exhibit higher QiQ_iQi​ compared to their NbN counterparts. However, under applied magnetic fields, NbN resonators demonstrate significantly better resilience. Moreover, NbN resonators exhibit an unexpected increase in QiQ_iQi​ at intermediate in-plane magnetic fields (B∥∼1B_{\parallel} \sim 1B∥​∼1 T), which we attribute to an enhanced frequency detuning that reduce coupling to two-level system defects. In contrast, grAl resonators show a distinct critical field above which QiQ_iQi​ rapidly decreases, strongly depending on resonator cross-section respect to the applied field direction. Characterization of the nonlinear properties at zero magnetic field reveals that the self-Kerr coefficient in grAl resonators is more than an order of magnitude higher than in NbN resonators, making grAl particularly attractive for applications requiring pronounced nonlinear interactions. Our findings illustrate a clear trade-off between the two materials: NbN offers superior magnetic-field resilience beneficial for hybrid circuit quantum electrodynamics applications, while grAl is more advantageous in low-field regimes demanding high impedance and strong nonlinearity.
Lumped-element inductors are an integral component in the circuit QED toolbox. However, it is challenging to build inductors that are simultaneously compact, linear, and low-loss with standard approaches that either rely on the geometric inductance of superconducting thin films or on the kinetic inductance of Josephson-junction arrays. In this work, we overcome this challenge by utilizing the high kinetic inductance offered by superconducting granular aluminum (grAl). We demonstrate lumped-element inductors with a few nH of inductance that are up to 100 times shorter than inductors built from pure aluminum (Al). To characterize the properties of these linear inductors, we first report on the performance of lumped-element resonators built entirely out of grAl with sheet inductances varying from 30 – 320 pH/sq and self-Kerr nonlinearities of 0.2 – 20 Hz / photon . Further, we demonstrate integration of these grAl inductors into hybrid resonators with Al or tantalum ( Ta ) capacitor electrodes without increasing total internal losses. Interestingly, the measured internal quality factors systematically decrease with increasing room-temperature resistivity of the grAl film for all devices, indicating a trade-off between compactness and internal loss. For our lowest resistivity grAl films, we measure quality factors reaching 3.5 × 10 6 for the all-grAl devices and 4.5 × 10 6 for the hybrid grAl/ Ta devices, similar to state-of-the-art quantum circuits. Our loss analysis suggests that the surface-loss factor of grAl is similar to that of pure Al for our lowest resistivity films, while the increasing losses with resistivity could be explained by increasing inductor loss in the grAl film.
Superinductors are inductors whose microwave characteristic impedances are greater than the resistance quantum, RQ=h/(2e)2approx6.5kOmegaR_{Q}=h/(2e)^{2}approx6.5kOmegaRQ​=h/(2e)2approx6.5kOmega. They can be implemented using Josephson junction chains and high kinetic inductance nanowires. In this dissertation, we explore applications of superinductors in both implementations in superconducting quantum circuits. The dissertation consists of three parts. In the first part, we discuss the fluxon-parity-protected qubit consisting of a Cooper-pair box (CPB) shunted by a superinductor made of a chain of coupled asymmetric Superconducting Quantum Interference Devices (CASQUIDs). The spectroscopic measurement of a prototype of the fluxon-parity-protected qubit was performed. We observed almost complete suppression of the single fluxon tunneling across the CPB due to the destructive Aharonov-Casher interference when the offset charge on the CPB island was set to eee mod(2eee). A fluxon-parity-protected qubit with a higher superinductance can potentially be used to perform fault-tolerant Clifford gates. In the second part, we studied the microwave losses in high-kinetic-inductance granular Aluminum films using superconducting coplanar-waveguide (CPW) resonators made of the films. We observed that the intrinsic losses in these resonators at low temperatures were limited by resonator coupling to the two-level systems (TLS) in the environment. The demonstrated internal quality factors are comparable with those for CPW resonators made of conventional superconductors. The characterized granular Aluminum films can be used to fabricate superinductors for a wide range of applications in quantum metrology and quantum information processing. In the third part, we discuss the one-dimensional Josephson metamaterial made of a similar structure as the superinductor used in the fluxon-parity-protected qubit. The metamaterial demonstrated strong Kerr nonlinearity with the Kerr constant tunable over a wide range from positive to negative values by the magnetic field. The metamaterial is promising for use as an active medium for quantum-limited Josephson traveling-wave parametric amplifiers.