High kinetic inductance materials constitute a valuable resource for superconducting quantum circuits and hybrid architectures. Superconducting granular aluminum (grAl) reaches kinetic sheet inductances in the nH/□ range, with proven applicability in superconducting quantum bits and microwave detectors. Here, we show that the single photon internal quality factor Qi of grAl microwave resonators exceeds 105 in magnetic fields up to 1 T, aligned in-plane to the grAl films. Small perpendicular magnetic fields, in the range of 0.5 mT, enhance Qi by approximately 15%, possibly due to the introduction of quasiparticle traps in the form of fluxons. Further increasing the perpendicular field deteriorates the resonators' quality factor. These results open the door for the use of high kinetic inductance grAl structures in circuit quantum electrodynamics and hybrid architectures with magnetic field requirements.
Lumped-element inductors are an integral component in the circuit QED toolbox. However, it is challenging to build inductors that are simultaneously compact, linear, and low-loss with standard approaches that either rely on the geometric inductance of superconducting thin films or on the kinetic inductance of Josephson-junction arrays. In this work, we overcome this challenge by utilizing the high kinetic inductance offered by superconducting granular aluminum (grAl). We demonstrate lumped-element inductors with a few nH of inductance that are up to 100 times shorter than inductors built from pure aluminum (Al). To characterize the properties of these linear inductors, we first report on the performance of lumped-element resonators built entirely out of grAl with sheet inductances varying from 30 – 320 pH/sq and self-Kerr nonlinearities of 0.2 – 20 Hz / photon . Further, we demonstrate integration of these grAl inductors into hybrid resonators with Al or tantalum ( Ta ) capacitor electrodes without increasing total internal losses. Interestingly, the measured internal quality factors systematically decrease with increasing room-temperature resistivity of the grAl film for all devices, indicating a trade-off between compactness and internal loss. For our lowest resistivity grAl films, we measure quality factors reaching 3.5 × 10 6 for the all-grAl devices and 4.5 × 10 6 for the hybrid grAl/ Ta devices, similar to state-of-the-art quantum circuits. Our loss analysis suggests that the surface-loss factor of grAl is similar to that of pure Al for our lowest resistivity films, while the increasing losses with resistivity could be explained by increasing inductor loss in the grAl film.
Superconducting circuits based on high kinetic inductance materials are promising candidates for future quantum technologies, owing to their magnetic field resilience, low microwave losses, and lithographic scalability. In this thesis, we explore the properties of granular aluminum (grAl) resonators in two distinct geometries, using the nonlinear kinetic inductance of grAl for applications in superconducting quantum circuits. In the first part, we present compact meandered ring resonators fabricated using a single-step electron-beam lithography and lift-off process. By optimizing film resistivity and geometry, we achieve superinductors with characteristic impedances exceeding
100 kΩ, corresponding to total inductances of several microhenries, while maintaining internal quality factors on the order of
105 in the single-photon regime. In the second part, we investigate DC-tunable resonators based on a
3λ/4 fractal geometry that allows direct current injection for in-situ tuning of the resonance frequency. We achieve frequency tunability up to
4.5% and analyze the nonlinear kinetic inductance using models based on Ginzburg-Landau, Mattis-Bardeen-BCS, and an effective Josephson-junction-array model. This work establishes granular aluminum as a material for realizing high-impedance and frequency-tunable superconducting circuits, offering new opportunities for advanced applications in protected qubits, hybrid quantum systems, broadband phase shifters, and three-wave mixing parametric amplifiers.
Out of equilibrium quasiparticles (QPs) are one of the main sources of decoherence in superconducting quantum circuits and one that is particularly detrimental in devices with high kinetic inductance, such as high impedance resonators, qubits, and detectors. Despite significant progress in the understanding of QP dynamics, pinpointing their origin and decreasing their density remain outstanding tasks. The cyclic process of recombination and generation of QPs implies the exchange of phonons between the superconducting thin film and the underlying substrate. Reducing the number of substrate phonons with frequencies exceeding the spectral gap of the superconductor should result in a reduction of QPs. Indeed, we demonstrate that surrounding high impedance resonators made of granular aluminum (grAl) with lower gapped thin film aluminum islands increases the internal quality factors of the resonators in the single photon regime, suppresses the noise, and reduces the rate of observed QP bursts. The aluminum islands are positioned far enough from the resonators to be electromagnetically decoupled, thus not changing the resonator frequency nor the loading. We therefore attribute the improvements observed in grAl resonators to phonon trapping at frequencies close to the spectral gap of aluminum, well below the grAl gap.
Recently, a new kind of distributed element superconducting resonators with granular aluminum (grAl) has been developed for circuit quantum electrodynamics. Given that lumped element resonators possess certain advantages over the distributed element ones, in this paper, we use a relatively simple micro-nanotechnology, without the etching process, to fabricate the designed lumped element superconducting grAl resonators. They are deposited on silicon substrates by DC magnetron sputtering of pure Al in an atmosphere of Ar and O2. By cryogenic microwave transmission measurements, at a temperature of 50 mK, we find that, compared with a usual Al resonator of the same size, such a device shows significantly strong nonlinearity and thus higher kinetic inductance. The noise features, quality factors, and temperature-dependence of the resonant frequencies have been investigated experimentally. It is believed that the lumped element superconducting resonators with high kinetic inductance demonstrated here could also be applied to superconducting quantum computation and photon counting in the future.