The Performance of Superconducting NbN Hot Electron Bolometer with Nb5N6 Buffer Layer
Hongkai Shi, Daogang Sun, Runfeng Su +6 more
Superconducting hot electron bolometer (HEB) were fabricated with Nb5N6buffered NbN on Si substrate. We present the result that the Nb5N6buffer layer can significantly improve the superconductivity of NbN HEB. The 2.5–5 THz superconducting HEB device has been fabricated successfully. We also do some research on devices which work at varied temperature. It is shown that our buffered HEB device could work at relatively high temperature, which means more possibility of applications in the future.
International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz)•Aug 29, 2021•1 citation