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Novel fabrication of diamond nanophotonics coupled to single-photon detectors

Haig A. Atikian, Srujan Meesala, Michael J. Burek, Young-Ik Sohn, Johan Israelian, Adarsh S. Patri, Nigel Clarke, Alp Sipahigil, Ruffin E. Evans, Денис Дмитриевич Сукачев, Robert M. Westervelt, Mikhail D. Lukin, Marko Lončar

Published Mar 23, 2017• 4 citations
Publisher

Abstract

Freestanding diamond nanostructures are etched from a bulk diamond substrate and integrated with evanescently coupled superconduncting nanowire single-photon detectors.
DOI
10.1117/2.1201611.006765

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Superconducting nanowire single photon detectors are fabricated directly on diamond substrates and their optical and electrical properties are characterized. Dark count performance and photon count rates are measured at varying temperatures for 1310 nm and 632 nm photons. A multi-step diamond surface polishing procedure is reported, involving iterative reactive ion etching and mechanical polishing to create a suitable diamond surface for the deposition and patterning of thin film superconducting layers. Using this approach, diamond substrates with less than 300 pm Root Mean Square surface roughness are obtained.