Fabrication of MgB2 nanowire superconducting single-photon detector using Br2-N2 dry etching

Miao Ma, M H Zhao, Huimin Zhang +14 more

Hiroyuki Shibata, Hiroki Takesue, Toshimori Honjo +2 more

We fabricated 10 nm thick MgB2 nanowires with a width down to 100 nm using the liftoff process. The I-V characteristics of the nanowire show hysteresis and a sharp voltage jump at Ic. Though a 150 nm wide nanowire exhibits the capacity for detecting a single photon at 405 nm wavelength, the nanowire is too wide to detect a single photon at 1560 nm. A 100 nm wide nanowire exhibits the capacity for detecting single photons in the 405–1560 nm wavelength range. This indicates a possible application of MgB2 as a high-performance superconducting nanowire single-photon detector.

Shigehito Miki, Taro Yamashita, Masahiro Yabuno +2 more

Francesco Marsili, David Bitauld, Alessandro Gaggero +6 more

High sensitivity ultrafast nanowire superconducting single photon detectors (SSPD) in the near infrared wavelength range have been fabricated with ultrathin (3.5nm) NbN films grown on R-plane sapphire substrates by dc reactive magnetron sputtering in Ar+N2mixture. These results show for the first time that high performance NbN SSPDs can be realized on different substrates and at lower deposition temperature than previously reported, and opens the way to integration with advanced solid state optical structures. SSPDs have been fabricated by a two mask process using electron beam lithography and reactive ion etching on 3.5nm thick NbN films deposited under optimal conditions on MgO.

Edward Schroeder

Dong Zhu

Superconducting nanowires have been used to detect single photons for more than 20 years. The basic principle is that photons can perturb superconducting Cooper pairs and thereby create a resistive hotspot, which produces a current-crowding effect. This current-crowding effect reduces the superconducting energy gap near the hotspot, which results in the nanowire changing from a superconducting to a normal state near the hotspot. The resulting high impedance causes the current to be squeezed into a high frequency coaxial wire connected in parallel with it, which finally produces a measurable voltage pulse. Thanks to the maturity of current micro- and nano- fabrication techniques, high quality superconducting thin films and nano-wires have been realized in a variety of materials such as NbN, WSi, MoSi and others. These techniques include magnetron sputtering, physical vapor deposition, electron beam lithography, optical lithography, reactive ion etching, wafer cutting, etc. Measurements of superconducting single-photon detectors require cryogenic refrigeration systems, ranging from the initial liquid helium cold tank, to modern dry dilution refrigerators. On one hand, a superconducting device needs to be cooled down below its critical temperature to work. On the other hand, photon-detection events generate hot spots, which release heat to the device substrate, which the refrigerator needs to efficiently take away. Research on superconducting nanowire single-photon detectors (SNSPDs) has made significant advancements over the past two decades, including high detection efficiency, low dark counts, and broad wavelength range capabilities. Beyond improvements in traditional NbN, WSi and MoSi superconducting nanowires, there have been numerous efforts to develop high-temperature superconducting nanowires, such as MgB2 and Bi2Sr2CaCu2O8 (BSCCO), due to the operational limitations imposed by low-temperature superconducting materials. Typically, single-photon detectors require operation temperatures below the critical temperature. High-temperature superconducting nanowire single-photon detectors have currently reported to exhibit the highest operating temperature around 20 K in BSCCO, which is much lower than its critical temperature of 80 K, showing that large-gap superconductors have a comparably low sensitivity to low-energy photons. In recent years since 2018, several groups have reported that micrometer-wide superconducting wires can also be used for single-photon detection, unlike the conventional nanometer-wide superconducting wires. In general, as long as the bias current is uniformly distributed in superconducting wires and approaches the critical Cooper pair-breaking current, the hot spots generated by photon absorption can induce vortices and anti-vortices, and their motion under the action of the Lorentz force generates resistance and voltage, which ultimately produces a normal state region. An increase of the wire width to the micron scale offers more freedom to design new detectors based on current nano- and microfabrication techniques. In this doctoral dissertation, I will first introduce the basic Ginzburg-Landau theory of superconductivity and the measurement theory of superconducting circuits related to single-photon detection. I will then provide a detailed description of the equipment construction and sample fabrication techniques used in the experiment. Finally, I will present my two main studies: in one project I examined the photon-detection performance of superconducting micro-wires with a multi-pinhole structure, the correlation between dark counts and magnetic vortices, as well as the properties of critical current in magnetic fields. In a subsequent study I conducted numerical simulations using the time dependent Ginzburg-Landau equation, to analyze the dynamics of vortices in superconducting micro-strips with regular large-area perforations by pinholes as a function of magnetic field and bias current. The thus obtained predictions were then successfully confirmed in a detailed experimental study on a series of microwires.