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IEICE Technical Report; IEICE Tech. Rep.

Fabrication and characterization of waveguide-coupled superconducting nanowire single-photon detectors

Kentaro Waki, Taro Yamashita, Shin‐ichiro Inoue, Shigehito Miki, Hirotaka Terai, Rikizo Ikuta, Takashi Yamamoto, Nobuyuki Imoto

Published Oct 8, 2014• 0 citations
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We have fabricated and characterized a niobium titanium nitride (NbTiN)-based superconducting nanowire single- photon detector (SSPD or SNSPD) on the silicon (Si) waveguide toward the realization of waveguide-coupled SSPD. The superconducting critical temperature and critical current were 7.85 K and 34.4 μA at 0.3 K, respectively. We investigated the optical response of the fabricated device and found that the device exhibited a single-photon response. Furthermore, the fabricated device showed a clear bias current dependence of the output counts similar to conventional SSPDs.
We report the fabrication and characterization of a niobium titanium nitride (NbTiN)-based superconducting nanowire single-photon detector (SSPD or SNSPD) on the Si waveguide toward the realization of waveguide-coupled SSPD. The device consists of a silicon optical waveguide fabricated using a silicon-on-insulator (SOI) substrate and a 100-nm-wide NbTiN nanowire constructed on the waveguide, with an inductor to prevent latch operation. For the fabricated device, the observed superconducting critical temperature and critical current were 7.85 K and 34.4 μA at 0.3 K, respectively. We investigated the optical response of the fabricated device and found that the device exhibited a single-photon response by measuring of the input power dependence of the output count rate. Furthermore, the fabricated device showed a clear bias current dependence of the output counts similar to conventional SSPDs, and the pulse-generation probability is estimated to be 90.1% based on two assumptions: a sigmoidal model to the detection efficiency and the device has a 100% pulse-generation probability at the saturated region.
In this work we report on a single photon detector system which offers near-unity detection efficiency using waveguide-coupled superconducting nanowires with lengths on the order of 1 μm. This is achieved by embedding the nanowires in a racetrack resonator where the interaction time with the photons trapped in the cavity is increased, thereby allowing for shorter nanowires. We expect this to lead to a higher fabrication yield as the amount of inhomogeneities decreases for shorter nanowires. Our simulations show a system with a 1 μm long superconducting nanowire single photon detector (SNSPD) operating at near-unity detection efficiency using design parameters that can be realistically achieved with conventional fabrication processes. The resonant cavity introduces spectral selectivity to the otherwise broad-band SNSPDs and the cavity induced timing jitter is shown to be insignificant for SNSPDs longer than 1 μm.