10 kA/cm^2 Nb Processを用いたSFQバタフライ演算回路の要素回路の動作評価

史滋 宮岡, 泰浩 島村, 世樹 貝沼 +2 more

泰浩 島村, 世樹 貝沼, 史滋 宮岡 +5 more

泰一 加藤, 信行 吉川, 朗 藤巻 +3 more

Mutsuo Hidaka, Shuichi Nagasawa, T. Satoh +2 more

The Superconductivity Research Laboratory has successfully fabricated large quantities of single flux quantum (SFQ) large scale integrated circuits, including several thousands of Josephson junctions (JJs). Using a Jc = 2.5 kA cm−2 process in which the number of Nb layers was four and the minimum JJ size was 2 µm square. We developed a new advanced fabrication process that produced a Jc = 10 kA cm−2, nine Nb layers and a minimum JJ size of 1 µm square. The increase in the number of Nb layers was achieved by using a planarization technique. The target of our next generation process is a Jc = 40 kA cm−2 with a 0.5 µm square for the minimum junction size. This specification will be achieved by using advanced semiconductor technologies. This process will enable SFQ circuits to be produced with one million JJs on a chip and achieve a clock frequency greater than 100 GHz.

Tsunehiro Hato, Masahiro Horibe, H. Wakana +2 more

We propose an output interface with a latching driver for single-flux-quantum (SFQ) circuits operating at 4.2 K. An optimum critical current density J/sub c/ of the latching driver was discussed, and a multichip module (MCM) structure with SFQ circuits and latching drivers was proposed for 40-Gb/s operation. To optimize J/sub c/ of the latching driver, we calculated the punchthrough probability of Nb-Al-AlO/sub x/-Nb junctions and high-temperature superconductor (HTS) junctions. The Nb junction with a J/sub c/ of 45 kA/cm/sup 2/, which has a hysteresis of 44% for the latching operation, leads to a punchthrough probability lower than 10/sup -15/ for an ideal ac-bias of 40 GHz. On the other hand, ramp-edge-type interface-modified junctions based on YBa/sub 2/Cu/sub 3/O/sub 7-x/ have an optimum J/sub c/ of 60 kA/cm/sup 2/ that gives the smallest punchthrough probability lower than 10/sup -15/ for an ideal ac-bias of 40 GHz without any shunt capacitance. Because the optimum J/sub c/ of 45 kA/cm/sup 2/ for the latching driver is too large to fabricate large-scale integrated SFQ circuits with the Nb junction, the MCM structure consisting of SFQ circuits and latching drivers with the optimum J/sub c/ is important to prepare 40-Gb/s SFQ systems. The J/sub c/ of 60 kA/cm/sup 2/ is a practical value for the HTS junctions, and use of the low-temperature superconductor (LTS)-HTS MCM structure is also one way to realize the high-speed SFQ systems.

泰浩 島村, 世樹 貝沼, 史滋 宮岡 +5 more