Application and fabrication aspects of sub-micrometer-sized Josephson junctions
G. Oelsner, Uwe Hübner, Solveig Anders +1 more
We present two possible methods for the fabrication of sub-micron sized Josephson junctions, namely the shadow-evaporation technique and the cross-type technology. Their importance for the field of modern super-conducting technology is discussed. As examples we present measurement results of a two-qubit sample and a prototype of a microwave detector fabricated each by one of the described methods. We review potential applications of superconducting quantum circuits based on the developed methods.
Low Temperature Physics•Jul 1, 2017•6 citations