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IEEE Transactions on Applied Superconductivity

Design of Terahertz SIS Mixers Using Nb/AlN/Nb Junctions Integrated With All-NbTiN Tuning Circuits

Yoshinori Uzawa, M. Kroug, Takafumi Kojima, Kazumasa Makise, Álvaro González, Shingo Saito, Yasunori Fujii, Keiko Kaneko, Hirotaka Terai, Zhen Wang

Published Nov 28, 2016• 12 citations
Publisher

Abstract

We have designed superconductor-insulator-superconductor (SIS) mixers using Nb/AlN/Nb tunnel junctions integrated with NbTiN/SiO2/NbTiN microstrip tuning circuits for the Atacama Large Millimeter/submillimeter Array (ALMA) Band 10 (0.78-0.95 THz). In order to design the tuning circuits, we used terahertz time domain spectroscopy to experimentally derive the complex conductivity of relatively thick NbTiN films deposited on quartz substrate directly as a ground plane and on RF-sputtered SiO2as a microstrip. Results showed that the conductivities of both films can be described by a modified Mattis-Bardeen theory. We also investigated the junction heating effects originating from quasi-particle trapping in the Nb electrodes embedded in NbTiN circuits by varying the volume of the electrodes. It was confirmed that current-voltage curves of Nb/AlN/Nb tunnel junctions with thick (~200 nm) counter electrodes contacting NbTiN wirings showed higher gap voltages as well as reduced back-bending than those with thin (~50 nm) electrodes. Making use of these findings, our designed SIS mixers employing Nb/AlN/Nb junctions with a current density of 15 kA/cm2and all-NbTiN tuning circuits may cover the Band 10 with good sensitivity.

DOI
10.1109/tasc.2016.2632628

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We have designed superconductor-insulator-superconductor (SIS) mixers using Nb/AlN/Nb tunnel junctions integrated with NbTiN/SiO2/NbTiN microstrip tuning circuits for the Atacama Large Millimeter/submillimeter Array (ALMA) Band 10 (0.78-0.95 THz). In order to design the tuning circuits, we used terahertz time domain spectroscopy to experimentally derive the complex conductivity of relatively thick NbTiN films deposited on quartz substrate directly as a ground plane and on RF-sputtered SiO2as a microstrip. Results showed that the conductivities of both films can be described by a modified Mattis-Bardeen theory. We also investigated the junction heating effects originating from quasi-particle trapping in the Nb electrodes embedded in NbTiN circuits by varying the volume of the electrodes. It was confirmed that current-voltage curves of Nb/AlN/Nb tunnel junctions with thick (~200 nm) counter electrodes contacting NbTiN wirings showed higher gap voltages as well as reduced back-bending than those with thin (~50 nm) electrodes. Making use of these findings, our designed SIS mixers employing Nb/AlN/Nb junctions with a current density of 15 kA/cm2and all-NbTiN tuning circuits may cover the Band 10 with good sensitivity.
We present the design and preliminary experimental results of superconductor-insulator-superconductor (SIS) mixers for Atacama large millimeter array (ALMA) band 10 (780-950GHz) receivers. To achieve wide frequency coverage as well as low noise temperature, we integrated high current density (10 kA/cm2) and small-sized (one micrometer in diameter) Nb/AlOx/Nb SIS junctions with a tuning microstrip line using NbTiN ground plane and Al wiring layers. High quality NbTiN films with Tc reaching 14.5 K and Al films with residual resistivity ratio as large as 15 have been achieved. To minimize the waveguide transmission loss and facilitate the fabrication of mixer block, a full height waveguide was adopted. The waveguide probe was optimized to achieve low input impedance in the frequency range of 780-950 GHz while adopting a backshort cavity of zero depth. Preliminary RF testing with a Nb/Al microstrip tuning circuit demonstrated a DSB receiver noise temperature about 400 K at 832.5 GHz, which promises the accommodation of receiver performance in ALMA specification with low loss NbTiN/Al microstrip lines.
Heterodyne mixers based on superconducting SIS (superconductor-insulator-superconductor) tunnel junctions have been demonstrated to be the most sensitive coherent detectors at millimeter and submillimeter wavelengths. In fact, conventional superconducting SIS mixers with Nb/AlOx/Nb junction and Nb/SiO2/Nb tuning circuit have shown good performances with the noise temperature reaching as low as three times the quantum limit below 0.7THz, which is the gap frequency of Nb-based SIS junctions. However, due to the large loss in Nb thin-film superconducting microstrip lines, the noise performance of Nb SIS mixers deteriorates significantly above 0.7THz. With a gap frequency double that of Nb-based SIS junctions, NbN-based SIS junctions are of particular interest for the development of heterodyne mixers in the terahertz region. Considering the bandwidth and output power of local-oscillator (LO) signal sources are quite limited around 1THz, we firstly develop a waveguide NbN-based SIS mixer at 0.5THz. Three types of SIS junctions, i.e., long junction, parallel-connected tunnel junction (PCTJ) and distributed junction array (DJ) are investigated. They are all comprised of NbN-AlN-NbN tri-layer fabricated on an MgO substrate and have the same current density (Jc) of 10kA/cm2. In this paper, we describe their design, fabrication and preliminary experimental results.
Heterodyne mixers based on superconducting SIS (superconductor-insulator-superconductor) tunnel junctions have been demonstrated to be the most sensitive coherent detectors at millimeter and submillimeter wavelengths. In fact, conventional superconducting SIS mixers with Nb/AIO(x)/Nb junction and Nb/SiO2/Nb tuning circuit have shown good performances with the noise temperature reaching as low as three times the quantum limit below 0.7THz, which is the gap frequency of Nb-based SIS junctions. However, due to the large loss in Nb thin-film superconducting microstrip lines, the noise performance of Nb SIS mixers deteriorates significantly above 0.7THz. With a gap frequency double that of Nb-based SIS junctions, NbN-based SIS junctions are of particular interest for the development of heterodyne mixers in the terahertz region.
This thesis describes the development, modeling, and optimization of Nb superconducting microstrip tuning circuits for Superconductor-Insulator-Superconductor mixers. The ultimate goal is to extend the quantum limited noise performance of Nb/AlOx/Nb SIS mixers to above the Nb gap frequency (680 GHz). The mixers are intended to be used in the Atacama Large Millimeter Array (ALMA) band 9 frequency range (600-720 GHz). The behavior of Nb microstrip tuning circuits especially above the gap frequency is modeled using the complex conductivity given by the Mattis-Bardeen theory of the anomalous skin effect [72]. A computer code utilizing two-port network theory is utilized to predict and optimize the RF coupling efficiency and bandwidth of the tuning circuits and embedding impedances. The effect of material and geometrical variations on the coupling has been evaluated. The installment of the devices in the waveguide has been found to be a crucial factor explaining the observed scattering in measurement results for nominally identical devices. Despite parameter variations, modeling of the RF coupling efficiency proved to be successful within the limitations set by scattering of the measured results. Using this model, the tuning circuit geometry has been optimized for bandwidth and maximum coupling efficiency. During the work several SIS devices have been fabricated and Fourier transform spectroscopy measurements have been made for RF coupling evaluation. Finally, using simulations, it has been found that application of Nb/AlN/Nb junctions would increase the bandwidth to an extent which should dramatically decrease the sensitivity to parameter variations.
Integrating NbTiN-based microstrip tuning circuits with traditional Nb superconductor-insulator-superconductor (SIS) junctions enables the low-noise operation regime of SIS mixers to be extended from below 0.7to1.15THz. In particular, mixers incorporating a NbTiN∕SiO2∕NbTiN microstrip tuning circuit offer low-noise performance below 0.8–0.85THz, although their sensitivities drop significantly at higher frequencies. Furthermore, a microstrip geometry in which NbTiN is used as the ground plane material only (NbTiN∕SiO2∕Al) yields significant improvements in the sensitivities of SIS mixers operating up to 1.15THz, with an upper operating frequency that depends upon the quality of the NbTiN layer, and thus its deposition process. Films deposited at room temperature have Tc=14.4K and ρn,20K∼60μΩcm, and offer low-noise performance up to 1THz, whereas films deposited at 400°C have Tc=16K and ρn,20K∼110μΩcm, and offer low-noise performance up to 1.15THz. Taken together, these results demonstrate that the high-frequency surface resistance of a NbTiN layer depends upon the film’s structural properties. Most significantly, the drop in performance that is seen at F>1THz in mixers incorporating NbTiN ground planes deposited at room temperature is attributed to nonhomogeneities in the structural and electrical properties of these films, as is the poor performance of mixers that incorporate NbTiN wiring layers at F>0.85THz. The development of these NbTiN-based microstrip tuning circuits will enable the production of low-noise SIS mixers for the 0.8–0.96- and 0.96–1.12-THz frequency bands of the Heterodyne Instrument for the Far Infrared on board the European Space Agency’s Herschel Space Observatory.
We have developed a low-noise 850 GHz superconductor–insulator–superconductor quasiparticle mixer with NbTiN thin-film microstrip tuning circuits and hybrid Nb/AlN/NbTiN tunnel junctions. The mixer uses a quasioptical configuration with a planar twin-slot antenna feeding a two-junction tuning circuit. At 798 GHz, we measured an uncorrected double-sideband receiver noise temperature of TRX=260 K at 4.2 K bath temperature. This mixer outperforms current Nb SIS mixers by a factor of nearly 2 near 800 GHz. The high-gap frequency and low loss at 800 GHz make NbTiN an attractive material with which to fabricate tuning circuits for SIS mixers. NbTiN mixers can potentially operate up to the gap frequency, 2Δ/h∼1.2 THz.