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Packaging and Characterization of a NbTiN Superconducting Nanowire for the Design of an Optimal Nanowire Meander Structure

Antonio Scotland

Published Apr 23, 2013• 0 citations
OpenAlex

Abstract

The Superconducting Nanowire single-photon detector (SNSPD) made with niobium-titanium nitride (NbTiN) thin films fabricated on oxidized silicon substrates are highly promising nanodevices. The SNSPD is an immensely capable infrared single photon detector. When cooled down with liquid helium the device exhibits high detection efficiency, low dark-counts in spite of fast response times, and low timing jitter. For good single-photon sensitivity at telecom wavelengths, picosecod timing resolutions (<100 ps), and high counting frequencies, the SNSPD is first choice compared to the alternatives like indium gallium arsenide avalanche diode detectors, silicon single photon avalanche diode detectors, and other superconducting single photon technology like, transition edge detectors. These SNSPD characteristics make it ideal for long distance quantum key distribution (QKD). \nAlthough the exploitation of the constructive interference that occurs at the SiO2/Si interface can boost detector efficiency, efficient packaging and fiber coupling is often a limiting factor in the overall system quantum efficiency (SQE). In an attempt to maximize SQE, we use a controlled expansion alloy for optimal performance at cryogenic temperatures. This nickel-iron alloy has a high relative permeability and, therefore, attenuates electromagnetic interference. Our report focuses on the theoretical and experimental methods used in the characterization of an un-patterned NbTiN superconducting nanowire. We use simulations based on the gathered experimental data to design an optimal SNSPD meander and calculate its expected SQE. We also use simulations to analyze the speed and value added to secure key rates in long distance QKD schemes up to 400 km with down-conversion sources with positively spectrally correlated and decorrelated photon pairs at 1550 nm wavelength.

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IEEE International Superconductive Electronics Conference (ISEC)•Jul 1, 2013•1 citation
The Superconducting Nanowire single-photon detector (SNSPD) made with niobium-titanium nitride (NbTiN) thin films fabricated on oxidized silicon substrates are highly promising nanodevices. The SNSPD is an immensely capable infrared single photon detector. When cooled down with liquid helium the device exhibits high detection efficiency, low dark-counts in spite of fast response times, and low timing jitter. For good single-photon sensitivity at telecom wavelengths, picosecod timing resolutions (<100 ps), and high counting frequencies, the SNSPD is first choice compared to the alternatives like indium gallium arsenide avalanche diode detectors, silicon single photon avalanche diode detectors, and other superconducting single photon technology like, transition edge detectors. These SNSPD characteristics make it ideal for long distance quantum key distribution (QKD). \nAlthough the exploitation of the constructive interference that occurs at the SiO2/Si interface can boost detector efficiency, efficient packaging and fiber coupling is often a limiting factor in the overall system quantum efficiency (SQE). In an attempt to maximize SQE, we use a controlled expansion alloy for optimal performance at cryogenic temperatures. This nickel-iron alloy has a high relative permeability and, therefore, attenuates electromagnetic interference. Our report focuses on the theoretical and experimental methods used in the characterization of an un-patterned NbTiN superconducting nanowire. We use simulations based on the gathered experimental data to design an optimal SNSPD meander and calculate its expected SQE. We also use simulations to analyze the speed and value added to secure key rates in long distance QKD schemes up to 400 km with down-conversion sources with positively spectrally correlated and decorrelated photon pairs at 1550 nm wavelength.
Superconducting nanowire single-photon detectors (SNSPDs) are nanodevices usually made from thin niobium nitride (NbN) films. Operated at liquid helium temperature, they can exhibit high detection efficiency with low dark-counts associated with a fast response time and a low timing jitter. Covering a broad detection range from ultraviolet to mid-infrared, SNSPDs are a very attractive alternative to silicon or gallium arsenide based semiconductor detectors for fiber based telecommunication when single-photon sensitivity and high counting rates are necessary. \nEfficient packaging and fiber coupling of a SNSPD is in itself a real challenge and is often a limiting factor in reaching high system quantum efficiency. Our approach makes use of a controlled expansion alloy which has been adequately heat treated to enhance its characteristics for cryogenic operation. This insures the integrity of the optical coupling at cryogenic temperatures while done at room temperature. It also provides a good attenuation for electromagnetic interference due to the high relative permeability of the nickel-iron alloy. The small form factor of this pigtailed optical fiber package makes it versatile and could be easily integrated with a commercial cryogen-free system or simply dipped into a standard helium transport Dewar. We report on our theoretical and experimental methodology to evaluate the optical coupling quality and present the optoelectronic characterization of two devices packaged in this way. Electrical simulation is studied to understand the speed limitation factor inherent to these devices and preliminary speed and jitter measurements are reported.
Superconducting nanowire single photon detectors (SNSPD) offer excellent performance for infrared single photon detection, combining high efficiency, low timing jitter, low dark count rates and high photon counting rates. Promising application areas for SNSPDs include quantum key distribution, space-to-ground communications and single photon remote sensing [1]. SNSPDs are typically made with ultrathin niobium nitride (NbN) films with thickness 4 nm and a superconducting transition temperature above 9 K. NbN offers high performance in the near infrared but their sensitivity drops at wavelengths beyond 2 um. There is growing interest in potential photon counting applications in the mid infrared domain (for example remote sensing of greenhouse gases in the atmosphere [2]). One way to overcome the wavelength limit in NbN SNSPDs is to use films with a lower superconducting energy gap [3]. Here we report on the study of SNSPDs fabricated with thin films of titanium nitride (TiN). We compare TiN films deposited by atomic layer deposition (ALD) and by magnetron sputtering. The TiN films range in thickness from 5 to 60 nm, with superconducting transition temperatures from ~1 K to 3.5 K. We have analyzed the films via transmission electron microscopy and variable angle spectroscopic ellipsometry. We characterize TiN SNSPDs performance from near to mid-infrared at wavelengths (1-4 um) with fast optical parametric oscillator (OPO) source. We compare the performance of TiN SNSPDs to devices based on other lower gap materials: MoSi, NbTiN, WSi. [1] Natarajan et al Superconductor Science and Technology 25 063001 (2012) [2] Abshire et al Laser Applications to Chemical, Security and Environmental Analysis, (Optical Society of America, 2008) paper LMA4 [3] Verma et al Applied Physics Letters 105 022602 (2014)
Single photon detection advanced rapidly in the last decade. The superconducting nanowire single-photon detector (SNSPD) is an emerging technology, which offers low dark count rates, broadband sensitivity from visible to mid-infrared wavelengths and very high quantum efficiency. All these features are appealing for future emerging applications in remote gas sensing, quantum key distribution and quantum information processing. By enclosing the detector in an optical cavity, tuned to the operating wavelength, the total system detection of the SNSPD is improved. Based on the cavity design, the detector absorption is boosted at the desired experimental wavelength. Devices have been fabricated and tested, in this thesis, with enhanced detection efficiency at near-infrared, infrared and mid-infrared wavelengths. NbTiN detectors fabricated on Ta2O5 / SiO2 distributed Bragg reflectors (DBR) for front-side coupling exhibit a system detection efficiency of ≈ 90% at λ = 940 nm for the best device measured. SNSPDs were also fabricated in NbTiN on metallic mirrors for back-side coupling for 1550 and 2333 nm experimental wavelengths. The first design exhibited a system detection efficiency of ≈ 84.5%, at λ = 1550 nm for the best device measured. The second exhibited low system detection efficiency since the device suffered from unexpectedly high dark count rate mainly due to blackbody radiation at 2.2 K. However, it was possible to measure the timing jitter of this device at 350 mK indicating a FWHM of 84 ps. Another technique to improve the total system detection efficiency of the SNSPD, is by fabricating a hairpin-shaped nanowire atop a single mode waveguide. In this design, photons travel through the waveguide and via evanescent coupling are absorbed in the nanowire. These SNSPD devices have been designed to thread along single mode Si ridge waveguides using a hairpin-shaped nanowire structure, which offers enhanced coupling and absorption efficiency via evanescent coupling. These ultra-thin superconducting MoSi detectors are precisely patterned on top of a single mode Si waveguide (600 nm) with alignment error less than 40 nm. Low temperature electrical and nano-optical characterization was carried out using a two-stage pulse tube (PT) coldhead, using an additional 4He / 3He sorption pump, low vibration characterization of SNSPD devices at 350 mK was carried out. Characterised devices exhibit low dark count rate <5 counts per second and timing jitter of ≈ 83 ps full width half maximum (FWHM) at wavelength (λ) = 1550 nm and at critical current ≈ 30 µA.
We have developed a practical superconducting nanowire single photon detector (SNSPD) system with our superconducting thin films and devices fabrication, optical coupling packaging, and cryogenic technology. The SNSPD devices were fabricated from high-quality niobium nitride (NbN) ultra-thin films that were epitaxially grown on single-crystal MgO substrates, and optical cavity structure were applied for improvement of photo absorption efficiency. The SNSPD system was developed based on a compact Gifford-McMahon (GM) cryocooler, in which SNSPD can operate continuously at temperature of 2.9 K +/- 10 mK with low power consumption without any liquid cryogens. The system detection efficiencies at 1550 nm wavelength (at a 100 Hz dark count rate) were found to be 2.6% for device without optical cavity and 21% for device with optical cavity. The response speed of devices showed maximally 200 MHz with 5 × 5 mm square device, and timing jitter of 100 ps full width at a half maximum (FWHM) was observed.
Superconducting nanowire single-photon detectors (SNSPDs) have emerged as a highly promising infrared single-photon detector technology. Next-generation devices are being developed with enhanced detection efficiency (DE) at key technological wavelengths via the use of optical cavities. Furthermore, new materials and substrates are being explored for improved fabrication versatility, higher DE, and lower dark counts. We report on the practical performance of packaged NbTiN SNSPDs fabricated on oxidized silicon substrates in the wavelength range from 830 to 1700 nm. We exploit constructive interference from the SiO2/Si interface in order to achieve enhanced front-side fiber-coupled DE of 23.2 % at 1310 nm, at 1 kHz dark count rate, with 60 ps full width half maximum timing jitter.
We present high performance fiber-coupled niobium titanium nitride superconducting nanowire single photon detectors fabricated on thermally oxidized silicon substrates. By applying a double sided cavity structure, simulated absorptance in the nanowire meander reached 97% at 1550 nm wavelength. The fabricated device showed a system detection efficiency (DE) of 74% at 1550 nm, dark count rate of 100 c/s, and a full width at half maximum timing jitter of 68 ps under a bias current of 18.0 μA with a practical Gifford-McMahon cryocooler system.