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Optics Letters

Low helium permeation cells for atomic microsystems technology

Argyrios T. Dellis, Vishal Shah, Elizabeth A. Donley, Svenja A. Knappe, John E. Kitching

Published Jun 7, 2016• 60 citations

Abstract

Laser spectroscopy of atoms confined in vapor cells can be strongly affected by the presence of background gases. A significant source of vacuum contamination is the permeation of gases such as helium (He) through the walls of the cell. Aluminosilicate glass (ASG) is a material with a helium permeation rate that is many orders of magnitude lower than borosilicate glass, which is commonly used for cell fabrication. We have identified a suitable source of ASG that is fabricated in wafer form and can be anodically bonded to silicon. We have fabricated chip-scale alkali vapor cells using this glass for the windows and we have measured the helium permeation rate using the pressure shift of the hyperfine clock transition. We demonstrate micro fabricated cells with He permeation rates at least three orders of magnitude lower than that of cells made with borosilicate glass at room temperature. Such cells may be useful in compact vapor-cell atomic clocks and as a micro fabricated platform suitable for the generation of cold atom samples.

DOI: 10.1364/ol.41.002775

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Laser spectroscopy of atoms confined in vapor cells can be strongly affected by the presence of background gases. A significant source of vacuum contamination is the permeation of gases such as helium (He) through the walls of the cell. Aluminosilicate glass (ASG) is a material with a helium permeation rate that is many orders of magnitude lower than borosilicate glass, which is commonly used for cell fabrication. We have identified a suitable source of ASG that is fabricated in wafer form and can be anodically bonded to silicon. We have fabricated chip-scale alkali vapor cells using this glass for the windows and we have measured the helium permeation rate using the pressure shift of the hyperfine clock transition. We demonstrate micro fabricated cells with He permeation rates at least three orders of magnitude lower than that of cells made with borosilicate glass at room temperature. Such cells may be useful in compact vapor-cell atomic clocks and as a micro fabricated platform suitable for the generation of cold atom samples.

This letter reports on the generation of a tunable buffer gas mixture within microfabricated alkali vapor cells. We show that the combination of low-permeation windows with sequential openings of laser-actuated break-seals enables adjustment of a helium-neon (He-Ne) noble gas mixture, fully compatible with alkali metal dispensers. The gas reservoirs and the main cell cavities are initially sealed at the wafer level under distinct helium and neon atmospheres, respectively. Within each cell, after Cs vapor is released from the dispenser, the break-seals are successively actuated to incrementally increase the helium fraction in the buffer gas mixture. This process shifts the atomic clock frequency turnover temperature toward higher values. As an illustration, one of the fabricated cells was operated at 95

^{\circ}

C in a coherent population trapping clock, achieving a fractional frequency stability of 9$\times

10

^{-11}$ at one-day integration time. These results demonstrate the feasibility of precisely tuning buffer gas compositions in microfabricated vapor cells and support the suitability of He-Ne mixtures for miniature atomic clock applications.

This paper describes the progress made in developing wafer-scale fabrication process of alkali vapor cells for chip-scale atomic devices such as Coherent Population Trapping (CPT) clocks, optical frequency standards and Rydberg-atom-based sensors. The wafer level fabrication process uses anodic bonding and introduces alkali atoms by chemical reactions of Alkali Chloride with Barium Azide. This method is compatible to make cells with a wide range of buffer gas species and pressures, including evacuated cells. We improve the yield of the cells to above 50%. We will show the residual gas pressures for evacuated cells are mostly consistent with zero within the resolution of the saturation absorption spectroscopy measurement. The temperature coefficients for the CPT spectroscopy are improved with Ar-N2 mixture buffer gas compared with only N2 buffer gas.

Microfabricated alkali vapor cells are key to enable miniature devices such as atomic clocks and optically pumped magnetometers with reduced size, weight, and power. Yet, more versatile fabrication methods are still needed to further expand their use cases. Here, we demonstrate an approach to collectively fill and seal microfabricated cesium cells using locally sealed microchannels patterned within one of the glass substrates comprising the cells. Unlike current methods that rely on wafer-level anodic bonding as the last sealing step, an approach based on local sealing opens the path to features so far limited to traditional glass-blown cells, including the ability to deposit temperature-sensitive antirelaxation coatings, reaching lower background gas pressure without an additional gettering material or filling with diverse atomic or molecular species.

Abstract We demonstrate a new technique for filling mm-scale microfabricated silicon and glass cavities with alkali vapors at the wafer-scale. A single etched silicon wafer contains an array of cavities containing alkali precursor materials offset laterally from the cell array. The wafer is heated to create an array of alkali droplets on an upper glass wafer, which is then translated laterally under vacuum and bonded to create the cells. This technique can be implemented in a commercially available bonding tool, allows the fabrication of cells with arbitrary buffer gas contents and pressures and can potentially produce cells with dimensions below 100 µm.

We report on the realization and evaluation of micro-fabricated alkali vapor cells using a thin-film indium bonding technique. Optical and double-resonance spectroscopy performed on the cells demonstrates their suitability for atomic clock applications. Long-term measurements show a stable pressure inside the cells and therefore an excellent hermeticity of the bonding over several months. The low bonding process temperature of ≤ 140°C combined with good bond strength makes this method a promising candidate for realizing micro-fabricated alkali cells with anti-relaxation wall-coatings.