Micro-fabriced alkali vapor cells and applications in various fields as the heart of ultraprecise sensors, like chip scale atomic clocks, magnetometers or gyroscopes. Miniaturization asks for either new fabrication techniques or new physical concepts or both. We present here a new fabrication technique for the alkali cells which allows the integration of a anti-relaxation wall coating for alkali vapor cells in order to improve the signal for miniazurized cells.
Micro-fabriced alkali vapor cells and applications in various fields as the heart of ultraprecise sensors, like chip scale atomic clocks, magnetometers or gyroscopes. Miniaturization asks for either new fabrication techniques or new physical concepts or both. We present here a new fabrication technique for the alkali cells which allows the integration of a anti-relaxation wall coating for alkali vapor cells in order to improve the signal for miniazurized cells.
We report on the realization and evaluation of micro-fabricated alkali vapor cells using a thin-film indium bonding technique. Optical and double-resonance spectroscopy performed on the cells demonstrates their suitability for atomic clock applications. Long-term measurements show a stable pressure inside the cells and therefore an excellent hermeticity of the bonding over several months. The low bonding process temperature of ≤ 140°C combined with good bond strength makes this method a promising candidate for realizing micro-fabricated alkali cells with anti-relaxation wall-coatings.
We present a microfabricated alkali vapor cell equipped with an anti-relaxation wall coating. The anti-relaxation coating used is octadecyltrichlorosilane and the cell was sealed by thin-film indium-bonding at a low temperature of 140 °C. The cell body is made of silicon and Pyrex and features a double-chamber design. Depolarizing properties due to liquid Rb droplets are avoided by confining the Rb droplets to one chamber only. Optical and microwave spectroscopy performed on this wall-coated cell are used to evaluate the cell's relaxation properties and a potential gas contamination. Double-resonance signals obtained from the cell show an intrinsic linewidth that is significantly lower than the linewidth that would be expected in case the cell had no wall coating but only contained a buffer-gas contamination on the level measured by optical spectroscopy. Combined with further experimental evidence this proves the presence of a working anti-relaxation wall coating in the cell. Such cells are of interest for applications in miniature atomic clocks, magnetometers, and other quantum sensors.
Chip-scale atomic devices combine elements of precision atomic spectroscopy, silicon micromachining, and advanced diode laser technology to create compact, low-power, and manufacturable instruments with high precision and stability. Microfabricated alkali vapor cells are at the heart of most of these technologies, and the fabrication of these cells is discussed in detail. We review the design, fabrication, and performance of chip-scale atomic clocks, magnetometers, and gyroscopes and discuss many applications in which these novel instruments are being used. Finally, we present prospects for future generations of miniaturized devices, such as photonically integrated systems and manufacturable devices, which may enable embedded absolute measurement of a broad range of physical quantities.
High-sensitivity sensors play a critical role in fundamental physics research, space magnetic field detection, geological monitoring, and biomedical applications. Atomic sensors, based on quantum mechanics principles, such as atomic magnetometers, atomic clocks, and atomic gyroscopes, etc. have emerged as pivotal technical equipment for precision measurements due to their exceptional sensitivity, low power consumption, and long-term stability. The atomic vapor cell, serving as the core component, facilitates quantum state manipulation via the Zeeman effect. Miniaturization and integration of these cells have not only advanced the development of portable atomic magnetometers but also provided a foundation for breakthroughs in chip-scale atomic clocks and enhanced navigation accuracy of atomic gyroscopes. The research progresses of chip-scale atomic vapor cells in recent years are reviewed. The advancements in alkali metal introduction methods, anti-relaxation surface coatings, and micro-nano fabrication techniques have enabled the miniaturization of atomic vapor cells while preserving high performance, creating new opportunities for the deployment of quantum sensing technologies across diverse fields. Looking ahead, multifunctional integration and material innovations in atomic vapor cells are expected to further broaden their applications in time-frequency standards, inertial navigation systems, and weak magnetic field measurements.
The combination of MEMS technology with atomic spin devices could fabricate chip scale atomic sensors. In most of the atomic devices based on alkali metals, the key component is an alkali vapor cell. Here we describe an alkali vapor cell fabrication technic for atomic spin gyroscope study. In the alkali vapor cell, alkali metal is filled in an oxygen and water free glovebox and noble gas isotopes such as129Xe and131Xe are also filled. Compared to an atomic magnetometer, in an atomic spin gyroscope, the isotope enriched noble gases are typically very expensive. We need to do recycling of these expensive gases after filling in the anode bonding chamber or else the gases will be wasted. Due to the large volume of the anode bonding chamber utilized in the fabrication process, a recycling platform is built based on liquid nitrogen. The relaxation time is a very important parameter of an alkali vapor cell. We developed a platform with magnetic field shielding system, non-magnetic field heating and single beam atomic spin detection subsystem. The spin relaxation time of the noble gases is tested in this study.
Sensitive and accurate magnetic-field measurements are essential in many applications, including geophysical studies, biomagnetic signal detection, navigation, event monitoring, and magnetic anomaly detection. In this context, atomic magnetometers are a particularly promising approach, combining high sensitivity and accuracy, and able to rival superconducting quantum interference devices (SQUIDs) without requiring cryogenic cooling. While the best sensitivity levels are achieved in the zero-field regime within magnetic shielding, scalar magnetometers operating in ambient fields also demonstrated remarkable sensitivities. Initiated in the 2000s, the miniaturization of atomic devices, and in particular alkali-vapor cells, paves the way for magnetometers that are both sensitive and compact, well suited to embedded measurements and field applications.This thesis contributes to the development of microfabricated vapor cells for atomic magnetometry. We propose a new filling and sealing method that overcomes some limitations of conventional approaches and could enable the fabrication of purer cells compatible with a wider range of chemical species. This strategy could also facilitate the integration of anti-relaxation coatings, which reduce relaxation caused by collisions with the cell walls. To date, no long-lasting anti-relaxation effects have been demonstrated in microfabricated cells, as traditional methods rely on high temperatures that are incompatible with these coatings.A cell design suited to the deposition of anti-relaxation coatings is presented. We then describe the fabrication and characterization of a multi-axis microfabricated cell, designed for compact atomic devices using multiple optical beams. This multi-axis cell was experimentally validated in a dual-beam magnetometry configuration using an experimental setup developed as part of this thesis.