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中国科学通报：英文版

Design and fabrication of superconducting HEB mixer

Jinping Wang, YangBin Li, Lin Kang, Yu Wang, YangYin Zhong, Min Liang, Jian Chen, Chunhai Cao, Weiwei Xu, Peiheng Wu

Published Jun 1, 2009• 7 citations
Publisher
DOI
10.1007/s11434-009-0311-3

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IEEE Transactions on Applied Superconductivity•Jun 1, 2007•9 citations
Superconducting Hot Electron Bolometer mixers offer the highest sensitivity for heterodyne detections at frequencies above 1 THz. Important efforts have been made these recent years to further increase the HEB mixers' sensitivity and working frequency and also to design multi-pixel configuration. We present in this paper the developments of a non-standard quasi-optical membrane based HEB mixer where the commonly used focusing element, the silicon lens, is replaced by a micro-mirror and a membrane-based back-short. This configuration offers many advantages: easier processing for circuits at very high frequencies, better noise temperature brought by lower RF coupling loss and higher gain of the antenna. This design is also considered very attractive for multi-pixel receivers. The devices are made of phonon-cooled NbN HEB mixers processed on 1.4 μm thick stress-less Si3N4/Si02 membrane. Quasi-optical designs have been made for frequencies at 600 GHz and 2.5 THz. The design and the device fabrication process will be discussed and both DC and RF measurements at 600 GHz will be presented.
I n this p aper, we p resent res ults on th e n oise performance o f the waveguide Niobium Titanium Nitride (NbTiN) superconducting hot electron bolometer (HEB) mixers, cryogenically cooled b y a 4- K clos e-cycled ref rigerator. The NbTiN superconducting HE B mixer is fabricated on a crystalline qua rtz su bstrate, and is mou nted in a w aveguide mixer bloc k for RF and LO c oupling. At 0. 81 THz , the uncorrected DSB rec eiver noise temperature is measured to be 500 K and the noise bandw idth is 1.4 GHz . The same mixer shows the DSB receiver noise temperature of 640 K at 0.65 THz. We also investigate the DC performance o f superconduct ing NbTiN HEB mixer designed for 1.5 THz. I. INTRODUCTION
Prototype one-dimensional (1-D) superconducting hot-electron bolometer (HEB) imaging mixer arrays with four pixels, designed for operation at 585 GHz, and based on slot-ring antennas arranged in the "reverse-microscope" configuration have been fabricated and implemented. Electromagnetic simulations with Agilent's Momentum software package have been performed to study the self- and mutual-impedances of the slot-ring antenna (SRA) array corresponding to various element spacings. Moreover, the element SRA off-axis radiation patterns (with an extended silicon lens) have been calculated using ray-tracing techniques and the imaging angular resolution has been predicted. Fabrication of the arrays and HEB elements are discussed, and measurements for a single mixer element are presented, yielding a double sideband (DSB) receiver noise temperature of approximately 650 K at 585 GHz.