Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Journal of Low Temperature Physics

Superconducting Coplanar Waveguide Filters for Submillimeter Wave On-Chip Filterbank Spectrometers

Akira Endo, S. J. C. Yates, Juan Bueno, David Johannes Thoen, Vignesh Murugesan, Andrey M. Baryshev, T. M. Klapwijk, Paul P. van der Werf, J. J. A. Baselmans

Published Mar 24, 2016• 5 citations
Publisher

Abstract

We show the first experimental results which prove that superconducting NbTiN coplanar–waveguide resonators can achieve a loaded Q factor in excess of 800 in the 350 GHz band. These resonators can be used as narrow band pass filters for on-chip filter bank spectrometers for astronomy. Moreover, the low-loss coplanar waveguide technology provides an interesting alternative to microstrip lines for constructing large scale submillimeter wave electronics in general.

DOI
10.1007/s10909-016-1579-8

Related papers

On-chip filter bank spectroscopy at 600–700 GHz using NbTiN superconducting resonators

Akira Endo, Cristina Sfiligoj, S. J. C. Yates +6 more

We experimentally demonstrate the principle of an on-chip submillimeter wave filter bank spectrometer, using superconducting microresonators as narrow band-separation filters. The filters are made of NbTiN/SiNx/NbTiN microstrip line resonators, which have a resonance frequency in the range of 614-685 GHz, two orders of magnitude higher in frequency than what is currently studied for use in circuit quantum electrodynamics and photodetectors. The frequency resolution of the filters decreases from 350 to 140 with increasing frequency, most likely limited by dissipation of the resonators.

arXiv:1303.7151•Applied Physics Letters•Jul 15, 2013•41 citations

High efficiency superconducting filterbank with impedance-defined resolution for millimeter-wave spectroscopy

Oliver B. Jeong, M. Piat, Aritoki Suzuki

We present a high efficiency, moderate resolution on-chip superconducting filterbank spectrometer designed for line intensity mapping and broadband wave-like dark matter searches. Existing implementations used by the millimeter-wave community rely on resistive feedline termination for standing wave mitigation which caps the per-channel efficiency $η_\mathrm{ch}$ at 50\% and utilize microstrip resonators which highly couple the resolving power $\mathcal{R}=ν/δν$ and $η_\mathrm{ch}$ to thin-film dielectric loss. The architecture presented in this paper addresses these limitations by eliminating the termination resistor and employing niobium coplanar waveguide resonators patterned directly on single-crystal silicon, which fixes the resonator's internal quality factor by the silicon substrate property rather than by the loss tangent of a deposited film. The resolving power is set by the impedance ratio between the resonator and feedline. Electromagnetic and circuit simulations of a ten-channel filterbank near 90~GHz at unity oversampling show $\mathcal{R}=1170$ and $η_\mathrm{ch}> 78\%$, with no significant trend in efficiency across channels. A ten-channel prototype, designed for $\mathcal{R}=92\pm5$ and $η_\mathrm{ch}=(81\pm3)\%$ over 90--106~GHz with a 560~nm interlayer based on simulations, was fabricated and optically characterized, yielding $\mathcal{R}=208\pm74$ and $η_\mathrm{ch}=(77\pm6)\%$. Measured $η_\mathrm{ch}$ well above the 50\% termination limit, together with demonstrated impedance tuning of $\mathcal{R}$, validate the design principles of this filterbank spectrometer and establishes a route to high-efficiency, high-resolution on-chip spectrometer arrays.

arXiv:2603.19142•Mar 19, 2026•0 citations

Analysis of Normal and Superconducting Coplanar Waveguides in Radio Astronomy

Kim Ho Yeap

In terahertz radio astronomy, superconducting coplanar waveguide resonators have been commonly applied in Kinetic Inductance Detectors (KIDs) to measure the absorption of photon energy in the millimeter and submillimeter bands. Here, we present an analysis on the performance of superconducting niobium coplanar waveguides (CPWs). To compute the loss in a superconducting CPW, we have incorporated the complex conductivity developed by Matis and Bardeen based on the superconducting BCS theory, into the CPW loss equation. We have made a comparison between the loss in a CPW at room temperature with that below the critical temperature Tc of the superconductor. It can be observed that at frequencies below the gap frequency fg, the low in the superconducting CPW is significantly lower than that in a normal CPW. Above fg, however, the material loses its superconductivity and the loss in both temperatures becomes comparable. In our analysi, we have also shown that the loss decreases as the gap bewteen the strip and groundplane becomes wider. Hence, with careful design, the loss in a CPW can actually be minimized.

•Oct 19, 2011•5 citations

The Simulation and Design of an On-Chip Superconducting Millimetre Filter-Bank Spectrometer

G. Robson, Adam J. Anderson, Peter S. Barry +2 more

Abstract Superconducting on-chip filter banks provide a scalable, space saving solution to create imaging spectrometers at millimetre and submillimetre wavelengths. We present an easy to realise, lithographed superconducting filter design with a high tolerance to fabrication error. Using a capacitively coupled $$\lambda /2$$ λ / 2 microstrip resonator to define a narrow ( $$\lambda /\Delta \lambda = 300$$ λ / Δ λ = 300 ) spectral pass band, the filtered output of a given spectrometer channel directly connects to a lumped-element kinetic inductance detector. We show the tolerance analysis of our design, demonstrating $$<11\%$$ < 11 % change in filter quality factor to any one realistic fabrication error and a full filter-bank efficiency forecast to be 50% after accounting for fabrication errors and dielectric loss tangent.

arXiv:2111.04632•Journal of Low Temperature Physics•Jun 11, 2022•2 citations

A millimeter-wave on-chip superconducting filter bank spectrometer for atmospheric science

A. Orlando, Chris Thomas, D. J. Goldie +4 more

We present an on-chip superconducting filter bank spectrometer based on transition-edge sensors (TES) as a technology for realising a microwave atmospheric sounding instrument with several hundred channels and sky- noise limited performance. Each device consists of a wideband feed coupled to a transmission line filter bank, with a TES behind each filter. In the first instance we have targeted atmospheric temperature sounding using the oxygen (O2) absorption line at 60 GHz, however the device is being scaled to 180 GHz for humidity sounding. The technology developed is also generally applicable to astronomical instrumentation. We have fabricated a set of test devices to demonstrate key device technologies, such as channel placement, spectral resolution and sensitivity. We will describe device design, test configuration and results.

Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XI•Dec 12, 2020•1 citation

An Nb-based waveguide SIS distributed mixer employing coplanar inductor loaded microstrip transformer for the 800 GHz frequency band

Hiroyuki Maezawa, Edward Tong, Takashi Noguchi +3 more

We present a novel superconducting waveguide mixer for 800 GHz. In this mixer, a half-wave Nb/Al-AlO/sub x//Nb superconducting-insulator-superconductor (SIS) resonator is integrated with a microstrip superconducting transmission line loaded with coplanar inductors. This hybrid coplanar/microstrip transmission line acts as an impedance matching section between the distributed junction and the waveguide feed point of the mixer mount. We have designed mixers with a simple model which predicts that the insertion loss of the matching network is less than 10 percent up to 840 GHz. Preliminary experimental results show that the resonator can work up to 800 GHz but the parameters of the coplanar inductor loaded microstrip line need to be refined to improve power coupling to the resonator.

IEEE Transactions on Applied Superconductivity•Jun 1, 2003•0 citations
We show the first experimental results which prove that superconducting NbTiN coplanar–waveguide resonators can achieve a loaded Q factor in excess of 800 in the 350 GHz band. These resonators can be used as narrow band pass filters for on-chip filter bank spectrometers for astronomy. Moreover, the low-loss coplanar waveguide technology provides an interesting alternative to microstrip lines for constructing large scale submillimeter wave electronics in general.
We experimentally demonstrate the principle of an on-chip submillimeter wave filter bank spectrometer, using superconducting microresonators as narrow band-separation filters. The filters are made of NbTiN/SiNx/NbTiN microstrip line resonators, which have a resonance frequency in the range of 614-685 GHz, two orders of magnitude higher in frequency than what is currently studied for use in circuit quantum electrodynamics and photodetectors. The frequency resolution of the filters decreases from 350 to 140 with increasing frequency, most likely limited by dissipation of the resonators.
We present a high efficiency, moderate resolution on-chip superconducting filterbank spectrometer designed for line intensity mapping and broadband wave-like dark matter searches. Existing implementations used by the millimeter-wave community rely on resistive feedline termination for standing wave mitigation which caps the per-channel efficiency ηchη_\mathrm{ch}ηch​ at 50\% and utilize microstrip resonators which highly couple the resolving power R=ν/δν\mathcal{R}=ν/δνR=ν/δν and ηchη_\mathrm{ch}ηch​ to thin-film dielectric loss. The architecture presented in this paper addresses these limitations by eliminating the termination resistor and employing niobium coplanar waveguide resonators patterned directly on single-crystal silicon, which fixes the resonator's internal quality factor by the silicon substrate property rather than by the loss tangent of a deposited film. The resolving power is set by the impedance ratio between the resonator and feedline. Electromagnetic and circuit simulations of a ten-channel filterbank near 90~GHz at unity oversampling show R=1170\mathcal{R}=1170R=1170 and ηch>78%η_\mathrm{ch}> 78\%ηch​>78%, with no significant trend in efficiency across channels. A ten-channel prototype, designed for R=92±5\mathcal{R}=92\pm5R=92±5 and ηch=(81±3)%η_\mathrm{ch}=(81\pm3)\%ηch​=(81±3)% over 90--106~GHz with a 560~nm interlayer based on simulations, was fabricated and optically characterized, yielding R=208±74\mathcal{R}=208\pm74R=208±74 and ηch=(77±6)%η_\mathrm{ch}=(77\pm6)\%ηch​=(77±6)%. Measured ηchη_\mathrm{ch}ηch​ well above the 50\% termination limit, together with demonstrated impedance tuning of R\mathcal{R}R, validate the design principles of this filterbank spectrometer and establishes a route to high-efficiency, high-resolution on-chip spectrometer arrays.
In terahertz radio astronomy, superconducting coplanar waveguide resonators have been commonly applied in Kinetic Inductance Detectors (KIDs) to measure the absorption of photon energy in the millimeter and submillimeter bands. Here, we present an analysis on the performance of superconducting niobium coplanar waveguides (CPWs). To compute the loss in a superconducting CPW, we have incorporated the complex conductivity developed by Matis and Bardeen based on the superconducting BCS theory, into the CPW loss equation. We have made a comparison between the loss in a CPW at room temperature with that below the critical temperature Tc of the superconductor. It can be observed that at frequencies below the gap frequency fg, the low in the superconducting CPW is significantly lower than that in a normal CPW. Above fg, however, the material loses its superconductivity and the loss in both temperatures becomes comparable. In our analysi, we have also shown that the loss decreases as the gap bewteen the strip and groundplane becomes wider. Hence, with careful design, the loss in a CPW can actually be minimized.
Abstract Superconducting on-chip filter banks provide a scalable, space saving solution to create imaging spectrometers at millimetre and submillimetre wavelengths. We present an easy to realise, lithographed superconducting filter design with a high tolerance to fabrication error. Using a capacitively coupled λ/2\lambda /2λ/2 λ / 2 microstrip resonator to define a narrow ( λ/Δλ=300\lambda /\Delta \lambda = 300λ/Δλ=300 λ / Δ λ = 300 ) spectral pass band, the filtered output of a given spectrometer channel directly connects to a lumped-element kinetic inductance detector. We show the tolerance analysis of our design, demonstrating <11%<11\%<11% < 11 % change in filter quality factor to any one realistic fabrication error and a full filter-bank efficiency forecast to be 50% after accounting for fabrication errors and dielectric loss tangent.
We present an on-chip superconducting filter bank spectrometer based on transition-edge sensors (TES) as a technology for realising a microwave atmospheric sounding instrument with several hundred channels and sky- noise limited performance. Each device consists of a wideband feed coupled to a transmission line filter bank, with a TES behind each filter. In the first instance we have targeted atmospheric temperature sounding using the oxygen (O2) absorption line at 60 GHz, however the device is being scaled to 180 GHz for humidity sounding. The technology developed is also generally applicable to astronomical instrumentation. We have fabricated a set of test devices to demonstrate key device technologies, such as channel placement, spectral resolution and sensitivity. We will describe device design, test configuration and results.
We present a novel superconducting waveguide mixer for 800 GHz. In this mixer, a half-wave Nb/Al-AlO/sub x//Nb superconducting-insulator-superconductor (SIS) resonator is integrated with a microstrip superconducting transmission line loaded with coplanar inductors. This hybrid coplanar/microstrip transmission line acts as an impedance matching section between the distributed junction and the waveguide feed point of the mixer mount. We have designed mixers with a simple model which predicts that the insertion loss of the matching network is less than 10 percent up to 840 GHz. Preliminary experimental results show that the resonator can work up to 800 GHz but the parameters of the coplanar inductor loaded microstrip line need to be refined to improve power coupling to the resonator.