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arXiv:1303.7151 · Applied Physics Letters

On-chip filter bank spectroscopy at 600–700 GHz using NbTiN superconducting resonators

Akira Endo, Cristina Sfiligoj, S. J. C. Yates, J. J. A. Baselmans, David Johannes Thoen, Seyed Mohammad Hassan Javadzadeh, Paul P. van der Werf, Andrey M. Baryshev, T. M. Klapwijk

Published Jul 15, 2013• 41 citations
arXivHTMLPDF

Abstract

We experimentally demonstrate the principle of an on-chip submillimeter wave filter bank spectrometer, using superconducting microresonators as narrow band-separation filters. The filters are made of NbTiN/SiNx/NbTiN microstrip line resonators, which have a resonance frequency in the range of 614-685 GHz, two orders of magnitude higher in frequency than what is currently studied for use in circuit quantum electrodynamics and photodetectors. The frequency resolution of the filters decreases from 350 to 140 with increasing frequency, most likely limited by dissipation of the resonators.

DOI
10.1063/1.4813816

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Abstract Superconducting on-chip filter banks provide a scalable, space saving solution to create imaging spectrometers at millimetre and submillimetre wavelengths. We present an easy to realise, lithographed superconducting filter design with a high tolerance to fabrication error. Using a capacitively coupled λ/2\lambda /2λ/2 λ / 2 microstrip resonator to define a narrow ( λ/Δλ=300\lambda /\Delta \lambda = 300λ/Δλ=300 λ / Δ λ = 300 ) spectral pass band, the filtered output of a given spectrometer channel directly connects to a lumped-element kinetic inductance detector. We show the tolerance analysis of our design, demonstrating <11%<11\%<11% < 11 % change in filter quality factor to any one realistic fabrication error and a full filter-bank efficiency forecast to be 50% after accounting for fabrication errors and dielectric loss tangent.
We present a high efficiency, moderate resolution on-chip superconducting filterbank spectrometer designed for line intensity mapping and broadband wave-like dark matter searches. Existing implementations used by the millimeter-wave community rely on resistive feedline termination for standing wave mitigation which caps the per-channel efficiency ηchη_\mathrm{ch}ηch​ at 50\% and utilize microstrip resonators which highly couple the resolving power R=ν/δν\mathcal{R}=ν/δνR=ν/δν and ηchη_\mathrm{ch}ηch​ to thin-film dielectric loss. The architecture presented in this paper addresses these limitations by eliminating the termination resistor and employing niobium coplanar waveguide resonators patterned directly on single-crystal silicon, which fixes the resonator's internal quality factor by the silicon substrate property rather than by the loss tangent of a deposited film. The resolving power is set by the impedance ratio between the resonator and feedline. Electromagnetic and circuit simulations of a ten-channel filterbank near 90~GHz at unity oversampling show R=1170\mathcal{R}=1170R=1170 and ηch>78%η_\mathrm{ch}> 78\%ηch​>78%, with no significant trend in efficiency across channels. A ten-channel prototype, designed for R=92±5\mathcal{R}=92\pm5R=92±5 and ηch=(81±3)%η_\mathrm{ch}=(81\pm3)\%ηch​=(81±3)% over 90--106~GHz with a 560~nm interlayer based on simulations, was fabricated and optically characterized, yielding R=208±74\mathcal{R}=208\pm74R=208±74 and ηch=(77±6)%η_\mathrm{ch}=(77\pm6)\%ηch​=(77±6)%. Measured ηchη_\mathrm{ch}ηch​ well above the 50\% termination limit, together with demonstrated impedance tuning of R\mathcal{R}R, validate the design principles of this filterbank spectrometer and establishes a route to high-efficiency, high-resolution on-chip spectrometer arrays.
We present techniques to miniaturize superconducting ultra narrowband filters for on-chip applications. The filters are designed for 2 GHz, 5 GHz and 10 GHz operating frequencies. The expected bandwidths of the designed filters are 2-20 MHz. The designs are of 7 stages Chebyshev filters having maximum passband ripples of 0.5 dB. On-chip filters are particularly interesting as they are applicable for monolithic design with the RSFQ circuit aiming qubit applications. One of the designs is a quasi-lumped filter where the effective wave propagation constant has been increased by the addition of lumped components to the superconducting microstrip line (SMSL). Additionally, this design provides the optimum width of an SMSL without violating design rules. The other design consists of distributed and lumped components. The area of the filter is in the range of 1-2 square mm. We present the filter topologies and corresponding experimental results for the frequency response of these on-chip filters designed for Hypres 4.5 kA/cm2 fabrication process.
Integrated superconducting spectrometers (ISSs) provide the instantaneous bandwidth, sensitivity, and scalable architecture for large-scale spectroscopic surveys in submillimeter-wave astronomy and cosmology. However, the accuracy with which the resonant frequencies of superconducting microstrip band pass filters can be spaced, has limited the spectral resolution for these spectrometers with continuous spectral coverage to FΔF<500\frac{F}{ΔF} < 500ΔFF​<500. The origin of this frequency scatter has been largely unknown. In this work, we demonstrate a four-fold improvement in the frequency spacing of superconducting microstrip resonators by optimizing electron-beam lithography. We find that reducing the beam step size (BSS) on the nanometer scale reduces the random frequency scatter, and that avoiding main-field stitching across filter patterns can eliminate a systematic frequency shift between groups of resonators, indicating the different origins of these two modes of frequency deviation. These findings demonstrate that nanometer-scale control of lithographic processes is imperative for the realization of the next-generation integrated superconducting spectrometers with higher spectral resolution.