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Bulletin of the American Physical Society

Fabrication and Characterization of Aluminum Airbridges for Superconducting Qubit Circuits

Zijun Chen, A. Megrant, J. Kelly, R. Barends, Joerg Bochmann, Yu Chen, Benjamin Chiaro, A. Dunsworth, Evan R. Jeffrey, J. Mutus, P. J. J. O’Malley, Charles Neill, P. Roushan, D. Sank, A. Vainsencher, J. Wenner, T. White, Andrew N. Cleland, John M. Martinis

Published Mar 5, 2014• 0 citations
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Superconducting microwave circuits based on coplanar waveguides (CPW) are susceptible to parasitic slotline modes which can lead to loss and decoherence. We motivate the use of superconducting airbridges as a reliable method for preventing the propagation of these modes. We describe the fabrication of these airbridges on superconducting resonators, which we use to measure the loss due to placing airbridges over CPW lines. We find that the additional loss at single photon levels is small, and decreases at higher drive powers.
Airbridges are extensively employed in superconducting quantum circuits to suppress parasitic slotline modes in coplanar waveguide and minimize crosstalk between control lines. Here, we introduce a fabrication technique for airbridges, leveraging niobium as the bridge layer and aluminum as the sacrificial layer to preclude the introduction of lossy dielectrics or residues upon release. Additionally, we utilize a triangular evaporation method to significantly bolster the structural integrity of the airbridges. Our experimental evaluation, focused on resonators equipped with these airbridges, reveals that the resultant additional loss per bridge is minimal, quantified at (5.0±2.8)×10−9 in the single-photon regime and (6.3±0.9)×10−9 at high drive powers. This advancement underscores the potential of niobium airbridges in facilitating the development of large-scale and high-performance superconducting quantum circuits.