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arXiv:1310.2325 · Applied Physics Letters

Fabrication and characterization of aluminum airbridges for superconducting microwave circuits

Zijun Chen, A. Megrant, J. Kelly, R. Barends, J. Bochmann, Yu Chen, B. Chiaro, A. Dunsworth, E. Jeffrey, J. Y. Mutus, P. J. J. O'Malley, C. Neill, P. Roushan, D. Sank, A. Vainsencher, J. Wenner, T. C. White, A. N. Cleland, John M. Martinis

Published Feb 3, 2014• 152 citations
arXivHTMLPDF

Abstract

Superconducting microwave circuits based on coplanar waveguides (CPW) are susceptible to parasitic slotline modes which can lead to loss and decoherence. We motivate the use of superconducting airbridges as a reliable method for preventing the propagation of these modes. We describe the fabrication of these airbridges on superconducting resonators, which we use to measure the loss due to placing airbridges over CPW lines. We find that the additional loss at single photon levels is small, and decreases at higher drive powers.

DOI
10.1063/1.4863745

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Superconducting microwave circuits based on coplanar waveguides (CPW) are susceptible to parasitic slotline modes which can lead to loss and decoherence. We motivate the use of superconducting airbridges as a reliable method for preventing the propagation of these modes. We describe the fabrication of these airbridges on superconducting resonators, which we use to measure the loss due to placing airbridges over CPW lines. We find that the additional loss at single photon levels is small, and decreases at higher drive powers.
Airbridges are extensively employed in superconducting quantum circuits to suppress parasitic slotline modes in coplanar waveguide and minimize crosstalk between control lines. Here, we introduce a fabrication technique for airbridges, leveraging niobium as the bridge layer and aluminum as the sacrificial layer to preclude the introduction of lossy dielectrics or residues upon release. Additionally, we utilize a triangular evaporation method to significantly bolster the structural integrity of the airbridges. Our experimental evaluation, focused on resonators equipped with these airbridges, reveals that the resultant additional loss per bridge is minimal, quantified at (5.0±2.8)×10−9 in the single-photon regime and (6.3±0.9)×10−9 at high drive powers. This advancement underscores the potential of niobium airbridges in facilitating the development of large-scale and high-performance superconducting quantum circuits.
Superconducting quantum electrical circuit based on Co-planar waveguide technology is considered one of the most promising candidates for practical realization of a\nquantum computer in future. For purpose of designing a multi-qubit quantum processor which is the heart of a quantum computer, it is required to couple qubits to a large number of superconducting transmission lines and resonators. Placing all these transmission lines and\nresonators in a practical design unavoidably creates bending and discontinuities in the ground\nplanes which have higher order parasitic modes that can be excited. These undesired parasitic\nmodes are detrimental for quantum measurement, for example during readout of a qubit.\nUnwanted modes can easily interfere with a resonator frequency when coupling to the qubit.\nThese parasitic modes can propagate throughout CPW structure and make unequal ground\npotential at the corresponding ground planes. The easiest way to suppress these parasitic\nmodes is to connect two unequal ground potential with superconducting air-bridges in order\nto bring them under equal potential in superconducting state. However, connecting airbridges on top of CPW adds shunt capacitor which may cause undesired reflection in the\nCPW.\nIn this thesis work, we designed superconducting air-bridges on top of\nsuperconducting CPW transmission line which is a subsystem of large quantum electrical\ncircuit. Our focus was to reduce added shunt capacitance by choosing the right height of these\nair-bridges. To keep the reflection coming from the air-bridge at minimum level, an airbridge\nheight of 8.5μm~15μm was chosen. The performance was verified by EM simulation\nand these heights were selected for device fabrication. We developed a new fabrication\nmethod for processing 8.5μm~15μm high aluminum air-bridges for quantum electrical\ncircuits. The method is compatible with the quantum circuit and easily reproducible. Finally,\ninput reflection measurement (S11) at cryogenic temperature was performed for 8.5μm high,\n300μm long aluminum air-bridges with aluminum CPW transmission line. Negligible amount\nof input reflection (S11) was observed from these measurements which is consistent with the\nresult of EM simulation.
In superconducting quantum circuits, airbridges are critical for eliminating parasitic slotline modes of coplanar waveguide circuits and reducing crosstalks between direct current magnetic flux biases. Here, we present a technique for fabricating superconducting airbridges. With this technique, a single layer of photoresist is employed, and the gradient exposure process is used to define the profile of airbridges. In order to properly obtain the bridge profile, we design exposure dosage based on residual photoresist thickness and laser power calibrations. Compared with other airbridge fabrication techniques, the gradient exposure fabrication technique provides the ability to produce lossless superconducting airbridges with flexible size and, thus, is more suitable for large-scale superconducting quantum circuits. Furthermore, this method reduces the complexity of the fabrication process and provides a high fabrication yield.
Abstract Dielectric losses are one of the key factors limiting the coherence of superconducting qubits. The impact of materials and fabrication steps on dielectric losses can be evaluated using coplanar waveguide (CPW) microwave resonators. Here, we report on superconducting CPW microwave resonators with internal quality factors systematically exceeding 5 × 106 at high powers and 2 × 106 (with the best value of 4.4 × 106) at low power. Such performance is demonstrated for 100-nm-thick aluminum resonators with 7–10.5 um center trace on high-resistivity silicon substrates commonly used in Josephson-junction based quantum circuit. We investigate internal quality factors of the resonators with both dry and wet aluminum etching, as well as deep and isotropic reactive ion etching of silicon substrate. Josephson junction compatible CPW resonators fabrication process with both airbridges and silicon substrate etching is proposed. Finally, we demonstrate the effect of airbridges’ positions and extra process steps on the overall dielectric losses. The best quality factors are obtained for the wet etched aluminum resonators and isotropically removed substrate with the proposed ultrasonic metal edge microcutting.
Extraneous high frequency chip modes parasitic to superconducting quantum circuits can result in decoherence when these modes are excited. To suppress these modes, superconducting air bridges (AB) are commonly used to electrically connect ground planes together when interrupted by transmission lines. Here, we demonstrate the use of two-photon photolithography to build a supporting 3D resist structure in conjunction with a liftoff process to create AB. The resulting aluminum AB have a superconducting transition temperature of Tc=1.08 K and exhibit good mechanical strength up to lengths of 100 μm. A measurable amount of microwave loss is observed when 35 AB were placed over a high-Q Ta quarter-wave coplanar waveguide resonator.
Superconducting coplanar waveguide (CPW) can be widely used as two-dimensional (2D) resonator, transmission line or feedline, providing an important component for superconducting quantum circuit which is a promising candidate for quantum information processing. Due to the discontinuities and asymmetries in the ground planes, CPW usually exhibits the spurious resonance, which is a common source of decoherence in circuit quantum electrodynamics experiments. To mitigate the spurious resonance, we fabricated superconducting aluminum air-bridges on Nb CPW. The fabricated air-bridges are approximately 3 μm high and up to 120 μm long. Compared with other methods, the fabrication procedures of our air-bridges are simpler, and the air-bridge can withstand strong ultrasound.