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Chinese Physics B

The influence of divergence angle on the deposition of neutral chromium atoms using a laser standing wave

Wentao Zhang, Baohua Zhu, Jing Huang, Xianming Xiong, Qubo Jiang

Published Mar 1, 2012• 7 citations
Publisher

Abstract

The characteristics of neutral chromium atoms in the standing wave field are discussed. Based on a semi-classical model, the motion equation of neutral atoms in the laser standing wave field is analyzed, and the trajectories of the atoms are obtained by simulations with the different divergence angles of the atomic beam. The simulation results show that the full width at half maximum (FWHM) of the stripe is 2.75 nm and the contrast is 38.5: 1 when the divergence angle equals 0 mrad, the FWHM is 24.1 nm and the contrast is 6.8:1 when the divergence angle equals 0.2 mrad and the FWHMs are 58.6 and 137.8 nm, and the contrasts are 3.3: 1 and 1.6: 1 when the divergence angles equal 0.5 and 1.0 mrad, respectively.

DOI
10.1088/1674-1056/21/3/033301

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The characteristics of neutral chromium atoms in the standing wave field are discussed. Based on a semi-classical model, the motion equation of neutral atoms in the laser standing wave field is analyzed, and the trajectories of the atoms are obtained by simulations with the different divergence angles of the atomic beam. The simulation results show that the full width at half maximum (FWHM) of the stripe is 2.75 nm and the contrast is 38.5: 1 when the divergence angle equals 0 mrad, the FWHM is 24.1 nm and the contrast is 6.8:1 when the divergence angle equals 0.2 mrad and the FWHMs are 58.6 and 137.8 nm, and the contrasts are 3.3: 1 and 1.6: 1 when the divergence angles equal 0.5 and 1.0 mrad, respectively.
Direct-write atom lithography is a new technique in which resonant light is used to pattern an atomic beam and the nanostructures are formed when the atoms are deposited on the substrate. The characteristics of chromium atoms deposit on a substrateare are discussed. We simulated and analysed the characteristics of nanostructure under different laser power and on different y-plane. At the same time, the characteristics of nanostructure are analysed with respect to the effects of atomic beam divergence, the resulting full width at half maximum and contrast are shown under respective conditions.
Direct-write atom lithography is a new technique in which resonant light is used to pattern an atomic beam and the nanostructures are formed when the atoms deposit on a substrate. The motorial characteristics of chromium atoms in an elliptical standing wave filed are discussed, and the simulation results are given with different deflective angles of elliptical standing wave. The full width at half maximum (FWHM) is 3.2 nm and the contrast is 36 ∶1 with a deflective angle of 0. The FWHM is 6.5nm and the contrast is 24 ∶1 with a deflective angel of 15, but when the deflective angle reaches 30, the stripe splits and two-peak configuration is formed.
We analyze by direct numerical simulations the effects of the wave nature of an atom on lithography with a laser standing wave. Specific calculations are done for chromium atom deposition with the experimental parameters given in the literature. In the absence of source imperfections and atomic motion during and after the deposition most of the feature width comes from diffractive aberration. Spontaneous emission broadens the linewidth further, giving a full width at half maximum about 8.9 nm and a contrast about 26:1. These are what may be achieved ultimately with the said experimental parameters and show that the nonclassical properties of the atom cannot simply be ignored. We then suggest some strategies for improving atom lithography experiments.
In order to study the effect of substrate diffraction on laser-focused Cr atom deposition,simulation and comparative analysis were performed based on the scalar optical diffraction theory under the presence and absence of substrate diffraction.The variation of stripe value of atomic wave-packet probability distribution which stands for the deposited lines with different atomic wave-packet velocities was focused.The results show that because of substrate diffraction,the max value of wave-packet probability distribution has 14.9% average increase and the full width of half maximum(FWHM) has 14.3% average decrease for different longitudinal most probable velocities when transverse velocity remains constant;the max value of wave-packet probability distribution has 14.5% average increase and the FWHM has 16.9% average decrease for different transverse velocities when the most probable longitudinal velocity remains constant.The research results provide a richer theoretical guidance for the experiment.
Direct write atom lithography is a new technique in which resonant light is used to pattern an atomic beam and the nanostructures are formed when the atoms deposit on the substrate. The motion of sodium atoms in standing wave filed is discussed. Based on the semi-classical model, this paper analyses the motion equation of sodium atom in the laser standing wave field, and then gets the trajectory of the atoms in the standing wave field by analytical simulation for different longitudinal and transverse velocities. The simulative results show that the FWHM width of stripes was 2.78 nm and the contrast was 38.5 ∶1 for the optimal longitudinal velocity, while that of the stripes was 29.1 nm and the contrast was 15 ∶1 for non-optimal longitudinal velocities. At the same time, the results show that the FWHM width of stripes was 4.2 nm and the contrast was 20 ∶1 when the divergence of atomic beam was 0.15 mrad. Whereas, the stripes presented Multi-peaked configuration and the quality deteriorated with the divergence of atomic beam increased to 1.5 mrad.
In order to acquire high collimating neutral Cr atomic beam,a laser collimating field is designed which is composed of three groups of laser beams to collimate high temperature Cr atomic beam. To reflect better the uncertainty of atomic motion in actual status and the influence of atomic isotopes on experiments,Monte Carlo random method is used to simulate the atomic initial state in the actual state. Based on stress distribution of atoms in the laser collimating field,motion characteristics of neutral Cr atomic beam in the actual state are quantitatively analyzed under the laser collimating field,and this motion path in the three-dimensional space and three-dimensional distribution of atomic landing point status are analyzed. The results show that the maximum divergency angle decreases to 1. 5 mrad in x direction and decreases to 1. 6 mrad in y direction after collimating Cr atomic beam,and atomic flux increases twice.Study results provide more detailed data for experiment and more ideal cold atomic beam for further more precise nanometer grating and nanodots.