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Fabrication of High-Tc Hot-Electron Bolometric Mixers for Submillimeter Heterodyne Applications

Michael J. Burns, Alan W. Kleinsasser, Boris S. Karasik, Michael C. Gaidis, William R. McGrath

Published Jan 1, 1997• 0 citations
OpenAlex

Abstract

Superconducting hot-electron bolometers are the most promising candidate for heterodyne mixers at frequencies above 1 THz. These devices operate by heating of electrons in the superconductor, and thus have no energy gap related frequency limitation, such as exists in SIS mixers, for example. Nb hot-electron bolometric mixers have recently demonstrated superior performance to competing Schottky mixers at frequencies above 1 THz, but of course must be operated at liquid helium temperatures. YBa 2Cu307_,5 hot-electron bolometric mixers introduce the possibility of sensitive, low power heterodyne detectors operating at temperatures approaching 90 K for high-background applications, such as earth observing missions. We describe the fabrication of high-T, devices based on ultrathin (<20 nm) YBa2Cu307_ 5 films for use as 2.5 THz mixers.

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Superconducting hot-electron bolometers (HEB) represent a promising candidate for heterodyne mixing at frequencies exceeding 1 THz. Nb HEB mixers offer performance competitive with tunnel junctions without the frequency limit imposed by the superconducting energy gap. Although the performance of YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// HEB mixers is not projected to be superior to that of Nb devices, which operate at low temperatures, they introduce the possibility of sensitive, low power heterodyne detectors operating at temperatures approaching 90 K for applications requiring portability and closed-cycle refrigeration. We report on the fabrication and characterization, both DC and RF, of high-T/sub c/ mixers based on ultra-thin (/spl les/20 nm) YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// films patterned to micrometer dimensions and incorporated into 2.5 THz planar mixer circuits.

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A~~~i~~~o~s

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Boris S. Karasik, Anders J. Skalare, William R. McGrath +7 more

Superconductive hot-electron bolometer (HEB) mixers have been built and tested in the frequency range from 1.1 THz to 2.5 THz. The mixer device is a 0.15 - 0.3 micrometer microbridge made from a 10 nm thick Nb film. This device employs diffusion as a cooling mechanism for hot electrons. The double sideband noise temperature was measured to be less than or equal to 3000 K at 2.5 THz and the mixer IF bandwidth is expected to be at least 10 GHz for a 0.1 micrometer long device. The local oscillator (LO) power dissipated in the HEB microbridge was 20 - 100 nW. Further improvement of the mixer characteristics can be potentially achieved by using Al microbridges. The advantages and parameters of such devices are evaluated. The HEB mixer is a primary candidate for ground based, airborne and spaceborne heterodyne instruments at THz frequencies. HEB receivers are planned for use on the NASA Stratospheric Observatory for Infrared Astronomy (SOFIA) and the ESA Far Infrared and Submillimeter Space Telescope (FIRST). The prospects of a submicron-size YBa2Cu3O7-(delta ) (YBCO) HEB are discussed. The expected LO power of 1 - 10 (mu) W and SSB noise temperature of approximately equals 2000 K may make this mixer attractive for various remote sensing applications.

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE•Nov 13, 1998•1 citation
Superconducting hot-electron bolometers are the most promising candidate for heterodyne mixers at frequencies above 1 THz. These devices operate by heating of electrons in the superconductor, and thus have no energy gap related frequency limitation, such as exists in SIS mixers, for example. Nb hot-electron bolometric mixers have recently demonstrated superior performance to competing Schottky mixers at frequencies above 1 THz, but of course must be operated at liquid helium temperatures. YBa 2Cu307_,5 hot-electron bolometric mixers introduce the possibility of sensitive, low power heterodyne detectors operating at temperatures approaching 90 K for high-background applications, such as earth observing missions. We describe the fabrication of high-T, devices based on ultrathin (<20 nm) YBa2Cu307_ 5 films for use as 2.5 THz mixers.
Superconducting hot-electron bolometers (HEB) represent a promising candidate for heterodyne mixing at frequencies exceeding 1 THz. Nb HEB mixers offer performance competitive with tunnel junctions without the frequency limit imposed by the superconducting energy gap. Although the performance of YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// HEB mixers is not projected to be superior to that of Nb devices, which operate at low temperatures, they introduce the possibility of sensitive, low power heterodyne detectors operating at temperatures approaching 90 K for applications requiring portability and closed-cycle refrigeration. We report on the fabrication and characterization, both DC and RF, of high-T/sub c/ mixers based on ultra-thin (/spl les/20 nm) YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// films patterned to micrometer dimensions and incorporated into 2.5 THz planar mixer circuits.
Superconducting hot-electron bolometers (HEB) represent a promising candidate for heterodyne mixing at fre- quencies exceeding 1 Twz. M, WEB mixers offer performance competitive with tunnel junctions without the frequency limit imposed by the superconducting energy gap. Afthough the performance of YBazCu&-s HEB mixers is not projected to be superior to that of Nb devices, which operate at low tempera- tures, they introduce the possibility of sensitive, low power het- erodyne detectors operating at temperatures approaching 90 K for appl~ca~ions requiring portability and closed-cycle refrig- eration. We report on the fabrication and characterization, , of high-T, mixers based on ultra-thin (GO nm) YBa2Cu30~ films patterned to micrometer dimensions and incorporated into 2.5 TNZ planar mixer circuits.
Recently a novel superconductive hot-electron micro-bolometer has been proposed which is both fast and sensitive (D. E. Prober, Appl. Phys. Lett. 62, 2119, 1993). This device has several important properties which make it useful as a heterodyne sensor for radioastronomy applications at frequencies above 1 THz. The thermal response time of the device is fast enough, several 10's of picoseconds, to allow for IF's of several GHz. This bolometer mixer should operate well up to at least 10 THz. There is no energy gap limitation as in an SIS mixer, since the mixing process relies on heating of the electron gas. In fact, rf power is absorbed more uniformly above the gap frequency. The mixer noise should be near quantum-limited, and the local oscillator (LO) power requirement is very low: / 10 nW for a Nb device. One of the unique features of this device is that it employs rapid electron diffusion into a normal metal, rather than phonon emission, as the thermal conductance that cools the heated electrons. In order for diffusion to dominate over phonon emission, the device must be short, less than 0.5.
Small volume high-Tc super-conducting YBa2Cu3O7 (YBCO) thin films are used as low power, very wide bandwidth mixers in the frequency range of 75 GHz to 2.5 THz. The YBCO films are patterned into lattice-cooled hot-electron bolometers (HEB) coupled to an integrated Au thin-film antenna and transmission line. Near 77 K, these mixers have responsivity as high as 780 V/W using only 8 nW of local oscillator (LO) power at 585 GHz. The responsivity can be shown to be truly bolometric. Direct heterodyne and homodyne down-conversion mixing using local-oscillator frequencies of 75 GHz and 585 GHz show overall conversion gains of -35 dB, which includes a -18 dB coupling loss, using only approximately 1 (mu) W of LO power. The gain bandwidth shows a simple Lorentzian roll-off with -3 dB point of 5 to 8 GHz. The large gain bandwidth and small power requirements make these high-Tc superconducting mixers an attractive alternative to existing Schottky diode and conventional superconducting receiver technologies.
Experimental work on the development of a quasi-optical heterodyne receiver for the THz frequency range is reported. The mixing device is a superconducting hot electron bolometer (HEB) made from ultrathin, d = 3 - 5 nm, niobium nitride (NbN) films. Work described in this thesis comprises: The design of a prototype receiver using quasi-optical coupling. Device fabrication involving reactive magnetron sputtering of NbN films and lithographic definition of the antenna integrated mixer. An investigation of the receiver performance at frequencies between 0.6 THz and 2.5 THz. The best performance is obtained with HEB mixers made from NbN films with a thickness d = 3-3.5 nm and a critical temperature T c = 9 - 9.5 K. Double-side band receiver noise temperatures are 530 K at 0.6 THz, 650 K at 1.6 THz and 1100 K at 2.5 THz. Corrected for losses in the receiver input optics, these values amount to only 10 times the theoretical quantum limit. MgO as the substrate material has been shown to provide improved acoustic coupling between NbN film and the substrate compared to other materials such as Si or sapphire. A maximum IF gain bandwidth of 4.5 GHz has been measured under the same operating conditions which yield lowest noise temperature. The local oscilltor power requirement is ~250 nW absorbed in the bolometer. Quasi-optically coupled HEB mixers have become the device-of-choice for radio astronomical applications in the frequency regime at and above 1 THz.
Superconductive hot-electron bolometer (HEB) mixers have been built and tested in the frequency range from 1.1 THz to 2.5 THz. The mixer device is a 0.15 - 0.3 micrometer microbridge made from a 10 nm thick Nb film. This device employs diffusion as a cooling mechanism for hot electrons. The double sideband noise temperature was measured to be less than or equal to 3000 K at 2.5 THz and the mixer IF bandwidth is expected to be at least 10 GHz for a 0.1 micrometer long device. The local oscillator (LO) power dissipated in the HEB microbridge was 20 - 100 nW. Further improvement of the mixer characteristics can be potentially achieved by using Al microbridges. The advantages and parameters of such devices are evaluated. The HEB mixer is a primary candidate for ground based, airborne and spaceborne heterodyne instruments at THz frequencies. HEB receivers are planned for use on the NASA Stratospheric Observatory for Infrared Astronomy (SOFIA) and the ESA Far Infrared and Submillimeter Space Telescope (FIRST). The prospects of a submicron-size YBa2Cu3O7-(delta ) (YBCO) HEB are discussed. The expected LO power of 1 - 10 (mu) W and SSB noise temperature of approximately equals 2000 K may make this mixer attractive for various remote sensing applications.