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Fabrication and characteristics evaluation of superconducting single photon detector on Si substrate

Tomohiro Higashi, Shigehito Miki, Taro Yamashita +4 more

IEICE Technical Report; IEICE Tech. Rep.Jan 17, 20130 citations

Fabrication and characterization of waveguide-coupled superconducting nanowire single-photon detectors

Kentaro Waki, Taro Yamashita, Shin‐ichiro Inoue +5 more

IEICE Technical Report; IEICE Tech. Rep.Oct 8, 20140 citations

NbN nanowire superconducting single photon detectors fabricated on MgO substrates

David Bitauld, Francesco Marsili, Andrea Fiore +5 more

We report on the fabrication and characterization of high performance nanowire superconducting single photon detectors (SSPD) on MgO substrates. The deposition of the superconducting material (NbN) has been performed by magnetron sputtering at 400°C. This deposition temperature is low enough to be compatible with the fabrication on traditional optical materials like GaAs. First, SSPD meanders covering a surface of 5 × 5 µm2 were characterized. We measured quantum efficiencies up to 20% at 1300 nm. Then, we used a straight 250 µm-long NbN nanowire to perform a spatially resolved measurement of the efficiency. Both efficiency dips and peaks were observed. The dips were correlated to lithographic defects, as confirmed by scanning electron microscopy. Conversely, no evidence of a lithographic origin of efficiency peaks was found.We report on the fabrication and characterization of high performance nanowire superconducting single photon detectors (SSPD) on MgO substrates. The deposition of the superconducting material (NbN) has been performed by magnetron sputtering at 400°C. This deposition temperature is low enough to be compatible with the fabrication on traditional optical materials like GaAs. First, SSPD meanders covering a surface of 5 × 5 µm2 were characterized. We measured quantum efficiencies up to 20% at 1300 nm. Then, we used a straight 250 µm-long NbN nanowire to perform a spatially resolved measurement of the efficiency. Both efficiency dips and peaks were observed. The dips were correlated to lithographic defects, as confirmed by scanning electron microscopy. Conversely, no evidence of a lithographic origin of efficiency peaks was found.

Journal of Modern OpticsJan 20, 20093 citations

Fabrication and test of Superconducting Single Photon Detectors

Roberto Leoni, F. Mattioli, Maria Gabriella Castellano +9 more

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated EquipmentJan 5, 200627 citations

High efficiency NbN nanowire superconducting single photon detectors fabricated on MgO substrates from a low temperature process

Francesco Marsili, David Bitauld, Andrea Fiore +5 more

We demonstrate high-performance nanowire superconducting single photon detectors (SSPDs) on bN thin films grown at a temperature compatible with monolithic integration. NbN films ranging from 150 nm to 3 nm in thickness were deposited by dc magnetron sputtering on MgO substrates at 400 degrees C SSPDs were fabricated on high quality NbN films of different thickness (7 to 3 nm) deposited under optimal conditions. Electrical and optical characterizations were performed on the SSPDs. The highest QE value measured at 4.2K is 20% at 1300 nm.We demonstrate high-performance nanowire superconducting single photon detectors (SSPDs) on bN thin films grown at a temperature compatible with monolithic integration. NbN films ranging from 150 nm to 3 nm in thickness were deposited by dc magnetron sputtering on MgO substrates at 400 degrees C SSPDs were fabricated on high quality NbN films of different thickness (7 to 3 nm) deposited under optimal conditions. Electrical and optical characterizations were performed on the SSPDs. The highest QE value measured at 4.2K is 20% at 1300 nm.

arXiv:0712.3295Optics ExpressJan 1, 200864 citations

NbN nanowire superconducting single photon detectors fabricated on MgO substrates

Francesco Marsili, David Bitauld, Alessandro Gaggero +6 more

High sensitivity ultrafast nanowire superconducting single photon detectors (SSPD) in the near infrared wavelength range have been fabricated with ultrathin (3.5nm) NbN films grown on R-plane sapphire substrates by dc reactive magnetron sputtering in Ar+N2mixture. These results show for the first time that high performance NbN SSPDs can be realized on different substrates and at lower deposition temperature than previously reported, and opens the way to integration with advanced solid state optical structures. SSPDs have been fabricated by a two mask process using electron beam lithography and reactive ion etching on 3.5nm thick NbN films deposited under optimal conditions on MgO.High sensitivity ultrafast nanowire superconducting single photon detectors (SSPD) in the near infrared wavelength range have been fabricated with ultrathin (3.5nm) NbN films grown on R-plane sapphire substrates by dc reactive magnetron sputtering in Ar+N2mixture. These results show for the first time that high performance NbN SSPDs can be realized on different substrates and at lower deposition temperature than previously reported, and opens the way to integration with advanced solid state optical structures. SSPDs have been fabricated by a two mask process using electron beam lithography and reactive ion etching on 3.5nm thick NbN films deposited under optimal conditions on MgO.

Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC)Jun 1, 20070 citations

Characterization of Superconducting Single Photon Detectors Fabricated on MgO Substrates

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