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European Microwave Conference (EuMC)

Property Calculations of a Superconducting Coplanar Waveguide Resonator

J. Kebler, Roland Dill, P. Russer, Alejandro A. Valenzuela

Published Oct 1, 1990• 6 citations
Publisher

Abstract

We present calculations of the properties of the first coplanar waveguide transmission line resonators patterned from high-Tc superconducting films at 8.8 and 6.5 GHz [1, 2]. Based on field calculations of the corresponding coplanar waveguides with infinite conductivity, performed by a partial wave synthesis (mode-matching method) [3], we obtain the superconductor losses subsequently using London's theory. Due to the high conductivity of the superconductive material both the electric and magnetic fields within the superconductor may be assumed to be parallel to the surface planes. For the small conductor thickness the tangential electrical field on each surface plane depends on the tangential magnetic fields on both surface planes. This relation is modelled by the surface impedance matrix Zs. The substrate losses are treated in the field calculations and are also taken into account. The calculated overall Q values are compared with the measured values and it has to be pointed out, that the superconducting thin films are due to the available material datas of the YBaCuO superconductor and the used substrate materials of a very good quality, because they reach nearly their upper limit given by the known material datas.

DOI
10.1109/euma.1990.336141

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We present calculations of the properties of the first coplanar waveguide transmission line resonators patterned from high-Tc superconducting films at 8.8 and 6.5 GHz [1, 2]. Based on field calculations of the corresponding coplanar waveguides with infinite conductivity, performed by a partial wave synthesis (mode-matching method) [3], we obtain the superconductor losses subsequently using London's theory. Due to the high conductivity of the superconductive material both the electric and magnetic fields within the superconductor may be assumed to be parallel to the surface planes. For the small conductor thickness the tangential electrical field on each surface plane depends on the tangential magnetic fields on both surface planes. This relation is modelled by the surface impedance matrix Zs. The substrate losses are treated in the field calculations and are also taken into account. The calculated overall Q values are compared with the measured values and it has to be pointed out, that the superconducting thin films are due to the available material datas of the YBaCuO superconductor and the used substrate materials of a very good quality, because they reach nearly their upper limit given by the known material datas.
The geometric, kinetic, and total inductances and the attenuation constant are theoretically analyzed for a thin-film superconducting coplanar waveguide resonator consisting of a current-carrying central conductor, adjacent slots, and ground planes that return the current. The analysis focuses on films of thickness d obeying d<2λ (λ is the London penetration depth), for which the material properties are characterized by the two-dimensional screening length Λ=2λ2/d. Introducing a cut-off procedure that guarantees that the magnitudes of the currents in the central conductor and the ground planes are equal, new and simpler results are obtained for the kinetic inductance and the attenuation constant for small Λ. Exact results for arbitrary Λ are presented for the geometric, kinetic, and total inductances in the limit of tiny slot widths, and approximate results are presented for arbitrary slot widths.
The objective of this thesis is to evaluate a generic process for fabrication and characterization of the Superconductive coplanar waveguide (CPW) resonators. Superconductive CPW resonators with various lengths and shapes are designed to investigate their electrical and magnetic properties as well as resonance properties and sensitivities. In the first part of thesis, two different models are introduced in order to estimate the nonlinear kinetic inductance of a superconducting CPW resonator. The first model is based on Bean critical-state model and the second one is based on current dependence of London penetration depth. The existence of a shift in resonant frequency of Superconductive CPW resonator caused by a non-linear kinetic inductance is also shown experimentally. Simulations were carried out to estimate the nonlinear kinetic inductance due to the self- induced magnetic field penetration. The rest of the thesis is concerned with development of very smooth Aluminum (Al) thin films with RMS (Root Mean Square) roughness 1~nm and CAD (Computer Aid Design) of superconductive CPW resonators. Experimental investigation of a generic fabrication technique for superconductive CPW resonator is carried out. Many resonators are fabricated with different design parameters, such as centerline or gap width, film thickness and gap capacitors length. The fabrication process is described in detail. Electron Beam Lithography is used to fabricate Nb and Al CPW resonators which are coupled to outer conductors via gap capacitors. We have fabricated GHz frequency CPW resonators with quality factors, Q up 5X10^5.
The objective of this thesis is to evaluate a generic process for fabrication and characterization of the Superconductive coplanar waveguide (CPW) resonators. Superconductive CPW resonators with various lengths and shapes are designed to investigate their electrical and magnetic properties as well as resonance properties and sensitivities. In the first part of thesis, two different models are introduced in order to estimate the nonlinear kinetic inductance of a superconducting CPW resonator. The first model is based on Bean criticalstate model and the second one is based on current dependence of London penetration depth, λL(I). The existence of a shift in resonant frequency, f0, of Superconductive CPW resonator caused by a non-linear kinetic inductance is also shown experimentally. Simulations were carried out to estimate the nonlinear kinetic inductance due to the selfinduced magnetic field penetration. The rest of the thesis is concerned with development of very smooth Aluminum (Al) thin films with RMS (Root Mean Square) roughness ∼ 1 nm and CAD (Computer Aid Design) of superconductive CPW resonators. Experimental investigation of a generic fabrication technique for superconductive CPW resonator is carried out. Many resonators are fabricated with different design parameters, such as centerline or gap width, film thickness and gap capacitors length. The fabrication process is described in detail. Electron Beam Lithography is used to fabricate Nb and Al CPW resonators which are coupled to outer conductors via gap capacitors. We have fabricated GHz frequency CPW resonators with quality factors, Q up to 5× 10.
We present a systematic analysis of the internal losses of superconducting coplanar waveguide microwave resonators based on niobium thin films on silicon substrates. In particular, we investigate losses introduced by Nb/Al interfaces in the center conductor, which is important for experiments where Al based Josephson junctions are integrated into Nb based circuits. We find that these interfaces can be a strong source for two-level state (TLS) losses, when the interfaces are not positioned at current nodes of the resonator. In addition to TLS losses, for resonators including Al, quasiparticle losses become relevant above 200 mK. Finally, we investigate how losses generated by eddy currents in conductive material on the backside of the substrate can be minimized by using thick enough substrates or metals with high conductivity on the substrate backside.
We measured the quality factor (Q) and hence the losses of thin film superconducting Nb coplanar waveguide resonators fabricated with processes and materials similar to those used for Josephson effect qubits, where such losses can cause significant decoherence. Intrinsic Q-values range from several thousand to almost 106 depending on the process details. Reactive ion etching appears to reduce the resonator Q-values and the lift-off process can also degrade the Q-value for some resists. The resistivity of the Si substrates affects the intrinsic Q at 1 K, where the resonators were measured. The Q-values obtained for optimized processing are sufficiently high as to suggest that qubits fabricated by a similar technique would not be limited by losses associated with the film or substrate.
Superconducting coplanar-waveguide (CPW) resonators are one of the key devices in circuit quantum electrodynamics (cQED). Their performance can be limited by dielectric losses in the substrate and in the material interfaces. Reliable modeling is required to aid in the design of low-loss CPW structures for cQED. We analyze the geometric dependence of the dielectric losses in CPW structures using finite-element modeling of the participation ratios of the lossy regions. In a practical scenario, uncertainties in the the dielectric constants and loss tangents of these regions introduce uncertainties in the theoretically predicted participation ratios. We present a method for combining loss simulations with measurements of two-level-system-limited quality factors and resonance frequencies of CPW resonators. Namely, we solve an inverse problem to find model parameters producing the measured values. High quality factors are obtainable by properly designing the cross-sectional geometries of the CPW structures, but more accurate modeling and design methods for low-loss CPW resonators are called for major future improvements. Our nonlinear optimization methodology for solving the aforementioned inverse problem is a step in this direction.