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Optics Letters

Atomic vapor cells for chip-scale atomic clocks with improved long-term frequency stability

Svenja A. Knappe, Vladislav P. Gerginov, Peter D. D. Schwindt, Vishal Shah, H. G. Robinson, Leo W. Hollberg, John E. Kitching

Published Sep 15, 2005• 217 citations
Publisher

Abstract

A novel technique for microfabricating alkali atom vapor cells is described in which alkali atoms are evaporated into a micromachined cell cavity through a glass nozzle. A cell of interior volume 1 mm3, containing 87Rb and a buffer gas, was made in this way and integrated into an atomic clock based on coherent population trapping. A fractional frequency instability of 6 x 10(-12) at 1000 s of integration was measured. The long-term drift of the F=1, mF=0-->F=2, mF=0 hyperfine frequency of atoms in these cells is below 5 x 10(-11)/day.

DOI
10.1364/ol.30.002351

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A novel technique for microfabricating alkali atom vapor cells is described in which alkali atoms are evaporated into a micromachined cell cavity through a glass nozzle. A cell of interior volume 1 mm3, containing 87Rb and a buffer gas, was made in this way and integrated into an atomic clock based on coherent population trapping. A fractional frequency instability of 6 x 10(-12) at 1000 s of integration was measured. The long-term drift of the F=1, mF=0-->F=2, mF=0 hyperfine frequency of atoms in these cells is below 5 x 10(-11)/day.
We describe the fabrication of chip-sized alkali atom vapor cells using silicon micromachining and anodic bonding technology. Such cells may find use in highly miniaturized atomic frequency references or magnetometers. The cells consist of cavities etched in silicon, with internal volumes as small as 1 mm3. Two techniques for introducing cesium and a buffer gas into the cells are described: one based on chemical reaction between cesium chloride and barium azide, and the other based on direct injection of elemental cesium within a controlled anaerobic environment. Cesium optical absorption and coherent population trapping resonances were measured in the cells.
This paper describes the fabrication of chip-scale alkali atom vapor cells, for use in highly miniaturized atomic frequency references, using silicon micromachining and anodic bonding technology. The cells consist of silicon cavities with internal volume ranging from a few mm/sup 3/ to less than 1 mm/sup 3/. The cells were filled with cesium and nitrogen buffer gas either by chemical reaction of cesium chloride and barium azide, or by direct injection of elemental cesium within a controlled anaerobic environment. Cesium optical absorption spectra were obtained from the cells, and coherent population trapping resonances with linewidths of about 1 kHz were measured.
This paper presents the latest progress in the development, fabrication, and characterization of microfabricated atomic frequency references at NIST. With volumes below 10 mm3 the physics packages contain the complete integrated assembly for probing the ground-state hyperfine splitting frequency of the alkali atoms by coherent population trapping (CPT). This technique allows for a simple and compact device containing a vertical-cavity surface-emitting laser (VCSEL), optics to shape the laser beam, a vapor cell containing the atoms, and a detector. We present an improved technique for microfabricating the miniature alkali vapor cells. When integrated into a CPT clock, a clear reduction of long-term frequency drifts is observed. This leads to a fractional frequency instability of less than 10-11 at one hour of integration, a more than one order of magnitude improvement over previous results. We identify the remaining sensitivities of the clock frequency to environmental influences and propose ways to reduce them.
Herein, a microfabricated millimeter-level vapor alkali cell with a high hermeticity is fabricated through a wet etching and single-chip anodic bonding process. The vapor cell, containing Rb and N2, was investigated in a coherent population trapping (CPT) setup for the application of a chip-scale atomic clock (CSAC). The contrast of CPT resonance is up to 1.1% within the only 1 mm length of light interacting with atom. The effects of some critical external parameters on the CPT resonance, such as laser intensity, cell temperature, and buffer gas pressure, are thoroughly studied and optimized. The improved microfabricated vapor cell also exhibited great potential for other chip-scale atomic devices.
A universal method for fabrication of miniature cells for frequency standards and quantum magnetometers containing 87Rb atoms in the atmosphere of inert gas neon based on integrated technologies is considered. The results of experimental studies of coherent population trapping signals observed for a series of cells which provided recovery of vapors of an alkali metal from the rubidium dichromate salt with the help of laser radiation are presented. The coherent population trapping signals with a typical linewidth of 2–3 kHz and a signal-to-noise ratio of 1500 in the 1-Hz bandwidth were observed, which allows one to provide a relative frequency stability of atomic clock of 10−11 at 100 s.
We demonstrate a microfabricated atomic clock physics package based on coherent population trapping (CPT) on the D1 line of 87Rb atoms. The package occupies a volume of 12 mm3 and requires 195 mW of power to operate at an ambient temperature of 200 degrees C. Compared to a previous microfabricated clock exciting the D2 transition in Cs [1], this 87Rb clock shows significantly improved short- and long-term stability. The instability at short times is 4 x?10-11 / tau?/2 and the improvement over the Cs device is due mainly to an increase in resonance amplitude. At longer times (tau?> 50 s), the improvement results from the reduction of a slow drift to ?5 x 10-9 / day. The drift is most likely caused by a chemical reaction of nitrogen and barium inside the cell. When probing the atoms on the D1 line, spin-exchange collisions between Rb atoms and optical pumping appear to have increased importance compared to the D2 line.