We present a lithographically manufactured chip with niobium thin-film pancake coils, and a washerlike structure above this coil for focusing flux. Due to a wide range of coupling coefficients, various samples can be investigated in flip-chip or on-chip configuration, with the aim of evaluating the superconducting current-phase relation. With this, structures with dimensions in the order of 10 μm were coupled to the resonance circuit with coupling coefficients from 10−3 up to 0.9. Resonance frequencies in the 10 MHz range and quality factors of about 500 were obtained with external capacitors. Furthermore, the chip is designed to facilitate the manufacture of superconducting qubits in the center of the coil. This offers the possibility of combining on one chip novel technologies for fabricating superconducting qubits along with high-quality tank circuits for studying the qubits.
We present a lithographically manufactured chip with niobium thin-film pancake coils, and a washerlike structure above this coil for focusing flux. Due to a wide range of coupling coefficients, various samples can be investigated in flip-chip or on-chip configuration, with the aim of evaluating the superconducting current-phase relation. With this, structures with dimensions in the order of 10 μm were coupled to the resonance circuit with coupling coefficients from 10−3 up to 0.9. Resonance frequencies in the 10 MHz range and quality factors of about 500 were obtained with external capacitors. Furthermore, the chip is designed to facilitate the manufacture of superconducting qubits in the center of the coil. This offers the possibility of combining on one chip novel technologies for fabricating superconducting qubits along with high-quality tank circuits for studying the qubits.
We have designed and characterized a micro-SQUID with dispersive readout for use in low temperature scanning probe microscopy systems. The design features a capacitively shunted RF SQUID with a tunable resonance frequency from 5 to 12 GHz, micrometer spatial resolution, and integrated superconducting coils for local application of magnetic fields. The SQUID is operated as a nonlinear oscillator with a flux- and power-dependent resonance frequency. Measurements for device characterization and noise benchmarking were carried out at 4 K. The measured flux noise above 10 kHz at 4 K is 80 nΦ0 Hz−1∕2 at a bandwidth of 200 MHz. Estimations suggest that one can benefit from parametric gain based on inherent nonlinearity of the Josephson junction and reduce the flux noise to 30 nΦ0Hz–1∕2 at 100 mK, which corresponds to 10.6 μBHz–1∕2 for a magnetic moment located at the center of the pickup loop.Measuring the magnetic response of mesoscopic samples or mapping it vs. position for extended systems is effective methods for revealing the fundamental quantum properties of condensed matter systems. Over the past few decades, many advanced magnetic imaging schemes have been developed, including magnetic force microscopy,1 scanning Hall probe microscopy,2 superconducting interference devices (SQUIDs),3,4 and NV center based magnetometry.5 The high sensitivity, low back action, and low power dissipation of SQUIDs make them attractive for many types of low temperature experiments. One classic example is the central role of scanning SQUID microscopy in tests of pairing symmetry of high-Tc cuprate superconductors.6 Other prominent applications are the thermodynamic characteristics of persistent currents in normal metal rings7 and proof of edge states in topological insulators in the quantum spin Hall regime.8A key performance for a SQUID is its flux sensitivity. Parametric amplification has been harnessed in nano-SQUIDs based on aluminum junctions9,10 in order to reduce the flux noise down to 30 nΦ0Hz–1∕2 with a bandwidth exceeding 60 MHz.10 Recent studies on parametric amplifiers and dispersive readout of superconducting qubits also harness the nonlinearity of the Josephson junction to boost sensitivity.11–13In scanning SQUID microscopy, signal sources often behave dipole-like, such as superconducting vortices in mesoscopic dots or currents in mesoscopic rings. Smaller SQUIDs provide better coupling to smaller samples which leads to higher spin sensitivity3,14 as the magnetic field of a dipole decreases with 1/r3. Various approaches have been pursued to reduce the size. The smallest nano-SQUID to date has been fabricated by evaporating Nb or Pb15 onto the apex of a sharp quartz tip reaching a loop diameter of below nm and a spin sensitivity of 0.38 μBHz−1/2 at tens of kHz bandwidth. Compared to such size-optimized devices, micro-SQUIDs fabricated using a standard Nb technique have the advantage of on-chip field coils and modulation coils,14 and can be operated at 4 K allowing for a wide range of applications. However, these come at the cost of larger pick-up loops of a few microns and a resulting poorer spin sensitivity of 200 μBHz−1/2 for a magnetic moment located at the center of the pickup loop.The limitation of large pickup loops was previously only overcome by devices with pickup loops defined by the focused-ion-beam,16 but has recently also been achieved by improvements in lithography and shown to offer better spatial resolution as well.17 Here, we present a scanning micro-SQUID which is based on the same fabrication technology incorporating another major advancement. Our design exploits the parametric amplification based on nonlinearities of the SQUID to boost sensitivity. The combination of a smaller pickup loop and parametric amplification of the signal leads to better spin sensitivity (10.6 μBHz−1/2) and higher bandwidth (200 MHz) compared to traditional DC micro-SQUIDs in which the flux sensitivity is mainly limited by internal dissipation.Our devices were fabricated at Hypres Inc. using planarized Nb/AlOx/Nb trilayer Josephson junction technology, including two planarized Nb layers with approximately 0.8 μm minimum feature size. The SQUID consists of a superconducting ring shunted by one Josephson junction with a designed critical current of 20 μA [Fig. 1(a)]. With this geometry, the SQUID is gradiometric, i.e., the effect of any homogeneous background magnetic field approximately cancels out. The smallest pickup loops implemented have an inner (outer) diameter of 1 μm (2 μm). The superconducting loop is shunted by an on-chip parallel-plate capacitor with amorphous silicon dioxide as dielectric which was designed to have a capacitance of 80 pF. The superconducting loop and the capacitor form a resonator with a flux dependent resonance frequency from 5 to 12 GHz. The pickup loops are placed on opposite corners of the parallel-plate capacitor at a distance of about 450 μm so that one loop can be located in close proximity to the sample while the other is kept far away from it. External fields can be applied to the sample by local single-turn field coils situated around each pickup loop. The field coils are fully integrated into the chip layout and can also be used to bias the SQUID at its most sensitive point. Compared to using additional modulation coils,14 this approach has the advantage of reducing the total device inductance, which leads to a higher sensitivity.18 In a scanning microscope, the field coil at the rear end (away from the sample) can be used to bias the SQUID or operate it in flux feedback such that resulting stray fields will not act on the sample, apart from a weak screening current through the pickup loop. The effective diameter of each coil is 7.5 μm, resulting in a mutual inductance of about 0.34 Φ0/mA (for the smallest pickup loop). The SQUID resonator is connected by an on-chip Z0 = 50 Ω coplanar waveguide (CPW) transmission line to the bonding pads. The two field coils are connected by two smaller CPWs to the bottom edge bonding pads [Fig. 1(c)], ending in two parallel-stripline waveguides running alongside the edges of the capacitor towards the respective field coils. Based on estimations, it should thus be possible to apply high frequency signals of at least several GHz to SQUID and sample.
Magnetically levitated superconducting microparticles provide a promising platform for fundamental quantum experiments and quantum-limited sensing. In the Meissner state, the levitated particle is trapped without mechanical clamping, allowing its center-of-mass motion to exhibit ultralow dissipation. The particle's displacement can be read out dispersively via magnetic flux coupling to superconducting resonators. A challenge for magnetomechanical coupling is to realize a flux-tunable microwave circuit that provides strong flux-to-frequency transduction, low dissipation, and a sufficiently large linear operating range for readout and cooling. This thesis develops and characterizes a chip-based superconducting platform for realizing this transduction.Chip-based levitation of a superconducting microparticle is demonstrated at 40 mK. Passive cryogenic vibration isolation is developed to increase the mechanical quality factors of the levitated particle. For coupling to a microwave circuit, a superconducting flip-chip process based on indium microspheres was developed. The need for Au passivation of Nb or NbN under-bump metallization is demonstrated, and indium-based superconducting interconnects are shown to carry ampere-scale currents. Flux-tunable resonators with 100-200 µm SQUID loops and integrated input coils are designed, fabricated, and characterized. A peak flux responsivity of 20 GHz/Φ₀ is achieved, with one flux quantum modulation requiring only 10-20 µA of input-coil current. Two integrated flux-biasing architectures are developed with flip-chip and on-chip input coils, achieving a total flux transfer efficiency of 1.6%. Junction asymmetry is shown to suppress branch-switching behavior associated with finite SQUID screening.Together, these results establish the superconducting subsystems required for dispersive microwave readout of the center-of-mass motion of a levitated microparticle. Such a magnetomechanical coupling provides a route toward cooling the center-of-mass motion to the ground state, paving the way for the preparation of nonclassical motional states. More broadly, such systems are well-suited for quantum-limited force and acceleration sensing, as well as for probing quantum physics in a previously unexplored mass regime.
We present a design and implementation of a frequency-tunable superconducting resonator. The resonance frequency tunability is achieved by flux-coupling a superconducting LC loop to a current-biased feedline; the resulting screening current leads to a change of the kinetic inductance and shift in the resonance frequency. The thin-film aluminum resonator consists of an interdigitated capacitor and thin line inductors forming a closed superconducting loop. The magnetic flux from the nearby niobium current feedline induces Meissner shielding currents in the resonator loop leading to a change in the kinetic part of the total inductance of the resonator. We demonstrate continuous frequency tuning within 160 MHz around the resonant frequency of 2.7 GHz. We show that: (1) frequency up-conversion is achieved when a kilohertz ac modulation signal is superimposed onto the dc bias resulting in sidebands to the resonator tone; (2) three-wave mixing is attained by parametrically pumping the nonlinear kinetic inductance using a strong rf pump signal in the feedline. The simple architecture is amenable to large-array multiplexing and on-chip integration with other circuit components. The concept could be applied in flux magnetometers, up-converters, and parametric amplifiers operating above 4 K when alternative high-critical-temperature material with high kinetic inductance is used.
Trapped-ion qubits are one approach among many for achieving scalable quantum computers. An ion trap has to be operated with several dc and radio frequency (rf) signals to trap and control its qubits. Many ion trap setups are operated at cryogenic temperatures to reduce thermal influences, to reach very high vacuum, and to achieve high fidelity for quantum operations. A resonance circuit, consisting of a coil and the capacitance of the trap electrodes, is used to step-up a low power rf signal to high amplitudes in close proximity to the ion trap. These ac fields are used to confine ions70μmabove a surface ion trap chip. An increased quality factor (Q-factor) of the resonance circuit leads to a higher voltage gain, but the experiment also benefits from a better attenuation of parasitic frequency components in the confining electric field. The Q-factor is inversely proportional to the trap capacitance. Since ion traps are growing in size due to a larger number of qubits, the capacitance is increasing. Therefore, the development of a coil with low losses becomes even more important. In this work, we present the setup of a superconducting coil for a high-Q resonator, measurements of the Q-factor, and its temperature dependency. The coil is made of a niobium-titanium (NbTi) wire wound on a threaded bobbin made of ceramics and equipped with further thermalization structures. The superconducting resonator is a very promising approach to satisfy the needs for future trapped-ion quantum computing setups.
Fast and high-fidelity qubit readout requires strong coupling between the readout resonator and the feedline. However, such coupling unavoidably enhances qubit decay through the Purcell effect. We present a four-pole broadband Purcell filter implemented on a 3D flip-chip platform to overcome this trade-off. The filter provides a flat 1 GHz passband centered at 7.68 GHz and achieves more than 45 dB suppression at typical qubit frequencies. We demonstrate the filter's compatibility with multiplexed readout using a test chip that integrates six floating readout resonators strongly coupled within the passband. The chip is fabricated using a 150 nm Niobium (Nb) thin-film process and characterized at 20 mK in a cryogenic measurement setup. We also develop an analytical model that accurately captures the filter response and determines the resonance frequencies and external quality factors of the floating resonators directly from their physical geometry, enabling rapid circuit synthesis and design optimization. The proposed design is compact and fabrication-tolerant, making it a practical solution for large-scale superconducting quantum processors.
We developed a novel magnetic coupling module, formed of a monolayer superconducting flux concentrator that is integrated with a coplanar resonator, strongly coupled to high-temperature superconducting radio frequency superconducting quantum interference device (SQUID). Three types of resonators, including a long stripline resonator between the input loop and the pick-up loop of the flux concentrator, a complementary split ring resonator, and a spiral shape inside the input loop, are explored. The resonance quality factor of different patterns of these three types of the resonators, as well as their coupling to the SQUID, is evaluated using finite-element-method simulations. Several readout methods are tested to couple the electronic system to the resonators by inductive (coil) or capacitive (transmission line) methods, and the optimum readout is reported for each of the resonators. Among the evaluated resonator types, a spiral shape with an optimal behavior at the resonance frequency of 836 MHz, showing the highest quality factor together with the strongest coupling to the SQUID, compared to other types of the resonators, is fabricated using a 200-nm-thick YBCO film on a 1-mm-thick crystalline LaAlO3substrate. The flux concentrator of the module is optimized by the variation of the linewidth of its different parts and also its input loop radius to obtain the maximum flux transformation efficiency.