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Applied Physics Letters

Low noise superconducting single photon detectors on silicon

Sander N. Dorenbos, Elisabeth Reiger, Umberto Perinetti, Val Zwiller, T. Zijlstra, T. M. Klapwijk

Published Sep 29, 2008• 141 citations
Publisher

Abstract

We have fabricated superconducting nanowire single photon detectors made of NbTiN on a silicon substrate. This type of material reduces the dark count rate by a factor of 10 compared to identical NbN detectors, enabling single photon detection with unprecedented signal to noise ratio: we report a noise equivalent power of 10−19 W Hz−1/2 at 4.2 K. The compatibility of our superconducting device with silicon enables its integration with complex structures.

DOI
10.1063/1.2990646

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We have fabricated superconducting nanowire single photon detectors made of NbTiN on a silicon substrate. This type of material reduces the dark count rate by a factor of 10 compared to identical NbN detectors, enabling single photon detection with unprecedented signal to noise ratio: we report a noise equivalent power of 10−19 W Hz−1/2 at 4.2 K. The compatibility of our superconducting device with silicon enables its integration with complex structures.
Superconducting nanowire single-photon detectors are an ideal match for integrated quantum photonic circuits due to their high detection efficiency for telecom wavelength photons. Quantum optical technology also requires single-photon detection with low dark count rate and high timing accuracy. Here we present very low noise superconducting nanowire single-photon detectors based on NbTiN thin films patterned directly on top of Si3N4 waveguides. We systematically investigate a large variety of detector designs and characterize their detection noise performance. Milli-Hz dark count rates are demonstrated over the entire operating range of the nanowire detectors which also feature low timing jitter. The ultra-low dark count rate, in combination with the high detection efficiency inherent to our travelling wave detector geometry, gives rise to a measured noise equivalent power at the 10(-20) W/Hz(1/2) level.
We fabricated superconducting nanowire single-photon detectors (SNSPDs) made of NbTiN and NbN thin films in the same fabrication batch. Various parameters, such as critical temperature, resistivity, switching current, and kinetic inductance, were compared between the two types of SNSPDs. These data indicate that NbTiN SNSPD surpasses NbN SNSPD in many aspects, including a shorter recovery time due to smaller kinetic inductance, a lower timing jitter due to higher switching current, and better uniformity. Based on the measurement of 28 out of 121 NbTiN SNSPDs on a 2-in Si wafer, 71% of detectors show a system detection efficiency of over 50% at a dark count rate of 100 Hz, with the maximum efficiency being 77.5%.
Single photon detectors are essential part of most optical quantum information applications. Among all candidates, superconducting nanowire single photon detectors (SNSPD) have the advantages of low jitter, low dark count rates and high maximum count rate. Commercial systems based on these detector elements currently cost on order $50-100K. In this project a circular meander design of a free-space SNSPD is fabricated and tested in house. Although the absolute absorption efficiency of the detector is low, because it was fabricated on a substrate optimized for other applications, the measured and modelled values for both incident polarizations agree within the uncertainties. The bias current dependence is almost constant from 50% to 100% of the breakdown threshold value, which should allow operation at intrinsic dark count rates extrapolated to be < 1 Hz at 2.05 K.
We present high performance fiber-coupled niobium titanium nitride superconducting nanowire single photon detectors fabricated on thermally oxidized silicon substrates. By applying a double sided cavity structure, simulated absorptance in the nanowire meander reached 97% at 1550 nm wavelength. The fabricated device showed a system detection efficiency (DE) of 74% at 1550 nm, dark count rate of 100 c/s, and a full width at half maximum timing jitter of 68 ps under a bias current of 18.0 μA with a practical Gifford-McMahon cryocooler system.
Superconducting nanowire single-photon detectors are widely used for detecting individual photons across various wavelengths from ultraviolet to near-infrared range. Recently, there has been increasing interest in enhancing their sensitivity to single photons in the mid-infrared spectrum, driven by applications in quantum communication, spectroscopy, and astrophysics. Here, we present our efforts to expand the spectral detection capabilities of U-shaped NbTiN-based superconducting nanowire single-photon detectors, fabricated in a 2-wire configuration on a silicon-on-insulator substrate, into the mid-infrared range. We demonstrate saturated internal detection efficiency extending up to a wavelength of 3.5 μm for a 5 nm thick and 50 nm wide NbTiN nanowire with a dark count rate less than 10 counts per second at 0.9 K and a rapid recovery time of 4.3 ns. The detectors are engineered for integration on waveguides in a silicon-on-insulator platform for compact, multi-channel device applications.
Nanowire superconducting single-photon detectors (SSPDs) consist of a superconducting wire of nanoscale cross-section [1], typically 4×100 nm2. A current close to the device critical current renders the nanowire sensitive to single photons. SSPDs are known for their high efficiency, low jitter, low dark count rate and fast reset time. An important challenge for future application of SSPDs is to extend the useful wavelength range towards the infrared without comprising detector speed or dark count rate. To this end, we explore optical designs with wider nanowires that utilize efficient detection of single photons at the edge of the nanowire. Silicon nanowires on top of a NbN nanowire increase both the calculated total absorption and the internal detection efficiency significantly compared to a standard meandering wire geometry.