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Thin Solid Films

Laser-focused atomic deposition – nanofabrication via atom optics

Jabez J. McClelland, R. J. Celotta

Published May 1, 2000• 22 citations
Publisher
DOI
10.1016/s0040-6090(00)00679-9

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Laser manipulation of atoms and nanofabrication

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Fundamental interaction processes between atoms and photons are exploited to control external degrees of freedom of the atoms. Laser light, when properly tuned near an atomic resonance, exerts such forces that the atoms are repelled from or attracted to the regions with low light intensities. We use these forces to manipulate atom beams on nanometer-scale. In the simplest approach to nanofabrication via atom optics, a laser standing wave serves as a 'mask' through which the atoms are deposited onto a substrate. In this thesis we first present the modeling results on the focusing properties of a standing wave laser field and on the surface diffusion and growth phenomena in laser-focused atomic deposition. The development of our experimental facility for laser-manipulated deposition with chromium atoms (based on the obtained modeling results) is reported on. Thereafter, we demonstrate laser manipulation of chromium atoms and fabrication of nanostructures with these atoms. The results obtained in Nijmegen and also those obtained in collaboration with J.J. McClelland's group from the National Institute of Standards and Technology (Gaithersburg, Maryland, USA) are analyzed with the aim of understanding the role of atom-optical and surface growth phenomena in the fabrication process of laser-focused nanostructures

•Jan 1, 2001•5 citations
Fundamental interaction processes between atoms and photons are exploited to control external degrees of freedom of the atoms. Laser light, when properly tuned near an atomic resonance, exerts such forces that the atoms are repelled from or attracted to the regions with low light intensities. We use these forces to manipulate atom beams on nanometer-scale. In the simplest approach to nanofabrication via atom optics, a laser standing wave serves as a 'mask' through which the atoms are deposited onto a substrate. In this thesis we first present the modeling results on the focusing properties of a standing wave laser field and on the surface diffusion and growth phenomena in laser-focused atomic deposition. The development of our experimental facility for laser-manipulated deposition with chromium atoms (based on the obtained modeling results) is reported on. Thereafter, we demonstrate laser manipulation of chromium atoms and fabrication of nanostructures with these atoms. The results obtained in Nijmegen and also those obtained in collaboration with J.J. McClelland's group from the National Institute of Standards and Technology (Gaithersburg, Maryland, USA) are analyzed with the aim of understanding the role of atom-optical and surface growth phenomena in the fabrication process of laser-focused nanostructures