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Japanese Journal of Applied Physics

Laser-Diode-Tuned Sequential Laser Atom Cooling and Trapping for Nanofabrications : Instrumentation, Measurement, and Fabrication Technology

Hong‐Bo Sun, Hironobu Inouye, Yasushi Inouye, Kenji Okamoto, Satoshi Kawata

Published Jul 1, 2001• 0 citations
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We developed an atom-optical system that utilized a laser diode (LD) for both laser atom cooling and trapping. The LD is easy to maintain and operate, and is therefore suitable for engineering applications. The neutral atom beam of chromium was collimated by Doppler cooling and focused by a standing wave lens, and then directly deposited onto a silicon substrate. A nanograting structure with periodicity identical to the wavelength of the standing wave, 212.78 nm, was successfully achieved. The atom beam generation, collimating, focusing and deposition processes were experimentally and theoretically investigated.
We developed a laser-beam-controlled atom-manipulation system to deposit nanometric structure of atoms on a substrate. Atom beam of chromium is thermally evaporated and collimated with Doppler cooling technique using frequency-tuned laser diode. The gradient force is exerted on atoms by a standing wave over the substrate, and atoms are trapped in a low potential region of the standing wave. Consequently, a series of lines are formed on the substrate with the same periodicity to the standing wave. We present the analysis of trajectories of atoms in the light force potential to find conditions of the laser power, the sign and the degree of the detuning of the laser frequency from the resonance frequency of the atom, to reduce the width of the structure.