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Microelectronic Engineering

Fabrication routes for sub-micron whole-wafer Nb/Al2O3/Nb tunnel junctions

Eugenie C. Kirk, D. G. Hasko, Mark G. Blamire, Jan E. Evetts, H. Ahmed

Published Apr 1, 1990• 2 citations
Publisher
DOI
10.1016/0167-9317(90)90083-6

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