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Applied Physics Letters

Very high-current-density Nb/AlN/Nb tunnel junctions for low-noise submillimeter mixers

Jonathan H. Kawamura, David Miller, Jian Chen, Jonas Stasys Zmuidzinas, B. Bumble, Henry George LeDuc, Jeff A. Stern

Published Apr 10, 2000• 55 citations
Publisher

Abstract

We have fabricated and tested submillimeter-wave superconductor–insulator–superconductor (SIS) mixers using very high-current-density Nb/AlN/Nb tunnel junctions (Jc≈30 kA cm−2). The junctions have low-resistance-area products (RNA≈5.6 Ω μm2), good subgap-to-normal resistance ratios Rsg/RN≈10, and good run-to-run reproducibility. From Fourier transform spectrometer measurements, we infer that ωRNC=1 at 270 GHz. This is a factor of 2.5 improvement over what is generally available with Nb/AlOx/Nb junctions suitable for low-noise mixers. The AlN-barrier junctions are indeed capable of low-noise operation: we measure an uncorrected double-sideband receiver noise temperature of TRX=110 K at 533 GHz for an unoptimized device. In addition to providing wider bandwidth operation at lower frequencies, the AlN-barrier junctions will considerably improve the performance of THz SIS mixers by reducing rf loss in the tuning circuits.

DOI
10.1063/1.126272

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Applied Physics Letters•Oct 14, 1996•19 citations
We have fabricated and tested submillimeter-wave superconductor–insulator–superconductor (SIS) mixers using very high-current-density Nb/AlN/Nb tunnel junctions (Jc≈30 kA cm−2). The junctions have low-resistance-area products (RNA≈5.6 Ω μm2), good subgap-to-normal resistance ratios Rsg/RN≈10, and good run-to-run reproducibility. From Fourier transform spectrometer measurements, we infer that ωRNC=1 at 270 GHz. This is a factor of 2.5 improvement over what is generally available with Nb/AlOx/Nb junctions suitable for low-noise mixers. The AlN-barrier junctions are indeed capable of low-noise operation: we measure an uncorrected double-sideband receiver noise temperature of TRX=110 K at 533 GHz for an unoptimized device. In addition to providing wider bandwidth operation at lower frequencies, the AlN-barrier junctions will considerably improve the performance of THz SIS mixers by reducing rf loss in the tuning circuits.
We have developed a low-noise 850 GHz superconductor–insulator–superconductor quasiparticle mixer with NbTiN thin-film microstrip tuning circuits and hybrid Nb/AlN/NbTiN tunnel junctions. The mixer uses a quasioptical configuration with a planar twin-slot antenna feeding a two-junction tuning circuit. At 798 GHz, we measured an uncorrected double-sideband receiver noise temperature of TRX=260 K at 4.2 K bath temperature. This mixer outperforms current Nb SIS mixers by a factor of nearly 2 near 800 GHz. The high-gap frequency and low loss at 800 GHz make NbTiN an attractive material with which to fabricate tuning circuits for SIS mixers. NbTiN mixers can potentially operate up to the gap frequency, 2Δ/h∼1.2 THz.
We have designed, fabricated, and tested superconductor-insulator-superconductor (SIS) mixers based on Nb/AlN/NbN twin tunnel junctions for waveguide receivers operating in a frequency range of 790-950 GHz. Electromagnetic simulations and measurement results of the mixer performance are presented. The junctions have a high gap voltage of 3.15 mV and a high current density of about 30 kA/cm2, providing a wide receiver band, which was confirmed by Fourier transform spectrometer (FTS) and noise temperature measurements. The corrected receiver noise temperature varies from 240 K at low frequencies to 550 K at the high end of the band. The influence of the SIS junction heating on its characteristics has been studied and compared to another similar high current density technologies. The heating does not have a critical impact on the mixer performance.
We discuss fabrication and characteristics of superconductor-insulator-superconductor (SIS) junctions which typically exhibit a 3.5 mV sum-gap voltage. Junctions have a sub-gap to normal state resistance ratio of R/sub SG//R/sub N/=27 for resistance-area products down to R/sub N/A=8 /spl Omega/ /spl mu/m/sup 2/ and high quality junctions have been produced with RNA products as low as 4 /spl Omega/ /spl mu/m/sup 2/. The device structure incorporates a Nb base electrode, a tunnel barrier formed by plasma nitridation of a thin Al proximity layer, and a NbTiN counter-electrode. Results for all Nb junctions with high current density aluminum-nitride barriers are also shown. Nitridation of the aluminum layer is investigated by control of the dc floating potential on a separate rf driven electrode in the vacuum process chamber. Devices are integrated to a mixer antenna structure incorporating NbTiN as a ground plane. The wire circuit layer can be either normal metal or NbTiN. Annealing results show improved I-V characteristics with increased RNA products. Recent receiver measurements employing these junctions exhibit low noise performance up to 900 GHz.
Superconductor–insulator–superconductor (SIS) mixers remain the choice of heterodyne mixers for single-dish telescopes and interferometers at millimeter and submillimeter wavelengths. Compared with conventional Nb/AlOx/Nb superconducting tunnel junctions, Nb/AlN/NbN ones have larger gap voltage and may reach critical-current density beyond 10kA/cm2, which are both of particularly interest in developing broadband SIS mixers. Here we report on the design and measurement of an SIS mixer based on Nb/AlN/NbN parallel connected twin junctions (PCTJ) incorporating NbTiN/SiO2/Al microstrip circuit. The junctions have a gap voltage of 3.18mV and a critical-current density of 15kA/cm2. The measured receiver noise temperature reach 5hν/kB among 200-260GHz band, and the mixer’s fractional bandwidth is about 40% centered at 230GHz.
Heterodyne mixers based on superconducting SIS (superconductor-insulator-superconductor) tunnel junctions have been demonstrated to be the most sensitive coherent detectors at millimeter and submillimeter wavelengths. In fact, conventional superconducting SIS mixers with Nb/AlOx/Nb junction and Nb/SiO2/Nb tuning circuit have shown good performances with the noise temperature reaching as low as three times the quantum limit below 0.7THz, which is the gap frequency of Nb-based SIS junctions. However, due to the large loss in Nb thin-film superconducting microstrip lines, the noise performance of Nb SIS mixers deteriorates significantly above 0.7THz. With a gap frequency double that of Nb-based SIS junctions, NbN-based SIS junctions are of particular interest for the development of heterodyne mixers in the terahertz region. Considering the bandwidth and output power of local-oscillator (LO) signal sources are quite limited around 1THz, we firstly develop a waveguide NbN-based SIS mixer at 0.5THz. Three types of SIS junctions, i.e., long junction, parallel-connected tunnel junction (PCTJ) and distributed junction array (DJ) are investigated. They are all comprised of NbN-AlN-NbN tri-layer fabricated on an MgO substrate and have the same current density (Jc) of 10kA/cm2. In this paper, we describe their design, fabrication and preliminary experimental results.
We demonstrate low-noise heterodyne mixing with NbN/AlN/NbN tunnel junctions in the submillimeter-wave region. The prepared junction size was 1 μm in diameter and the current density was about 20 kA/cm2, supplying a small ωCJRN product (ωCJRN=3 at 300 GHz). The mixer used a lens-coupled log-period antenna and an integrated tuning circuit which incorporated a radial short stub tuner for resonating out the junction capacitance. The junctions showed good dc I–V characteristics, excellent submillimeter-wave responses and sensitive heterodyne mixing responses. From 254 to 350 GHz the average receiver noise temperature measured using the standard Y-factor method was about 250 K double sideband (DSB). The lowest receiver noise temperature, 200 K (DSB), was obtained around 303 GHz.