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Applied Physics Letters

Superconductor-normal metal-superconductor Josephson junctions with Ti interlayer

Ludwig Fritzsch, M. Schubert, G. Wende, H.‐G. Meyer

Published Sep 14, 1998• 20 citations
Publisher

Abstract

Single nonhysteretic superconductor-metal-superconductor Josephson junctions consisting of Nb-Ti-Nb were prepared using the well-known anodization process for the isolation of the junctions. The 4×4 μm2 junctions show overdamped Josephson current-voltage characteristics at 4.2 K. The characteristic voltage IcRn is about 8.0 μV at a critical current density jc of about 29 kA/cm2. Under the influence of 10.5 GHz microwave irradiation the constant-voltage steps of n=0 and ±1 are observed with current amplitudes of about 3 mA.

DOI
10.1063/1.122211

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Applied Physics Letters•Jun 30, 1997•68 citations
Single nonhysteretic superconductor-metal-superconductor Josephson junctions consisting of Nb-Ti-Nb were prepared using the well-known anodization process for the isolation of the junctions. The 4×4 μm2 junctions show overdamped Josephson current-voltage characteristics at 4.2 K. The characteristic voltage IcRn is about 8.0 μV at a critical current density jc of about 29 kA/cm2. Under the influence of 10.5 GHz microwave irradiation the constant-voltage steps of n=0 and ±1 are observed with current amplitudes of about 3 mA.
Superconductor-normal metal-superconductor (SNS) junctions are well-suited for large-scale integrated superconducting circuits. Potential applications are programmable voltage standards, digital-to-analog converters and large-scale RSFQ circuits. The application of SNS junctions provides some advantages, e.g. a simplified fabrication technology and reduced parasitic inductances. But it requires a technological process with dimensions down to the submicrometer region to achieve sufficiently high characteristic voltages I/sub C/R/sub N/. In our process the normal metal interlayer is titanium. Therefore the sidewall insulation of the junctions can be made by anodization, as it is known from the Nb-Al technology. Nb-Ti-Nb Josephson junctions and junction arrays were fabricated down to the submicrometer range with I/sub C/R/sub N/ values up to 87 microvolt depending on the titanium thickness. Their measured critical currents have a small spread of about 10 percent. Shapiro steps are observed under the influence of microwave irradiation. For the application of such junctions in a programmable Josephson voltage standard a new type of microwave circuit using coplanar strips is proposed and successfully tested in 10 V SIS circuits.
Several applications of Josephson junctions (JJs) in low-temperature superconducting circuits such as programmable voltage standards and SFQ logical circuits or SQUID sensors require JJs with sub-µm dimensions. A method for preparing superconductor-isolator-superconductor (SIS) JJs as well as superconductor-normal metal-superconductor (SNS) JJs was developed which allows the preparation of both types of junctions by nearly the same technological process. Titanium is used as the normal metal for the SNS JJ. Ti can be anodically oxidized and a technology similar to the well-tried Nb-Al technology for SIS JJs can be applied to the SNS system, too. By electron-beam exposure of a negative deep UV photoresist (ma-N 2400) a stable resist mask is generated which has to withstand the following three self-aligned process steps: etching of the Nb counterelectrode by RIE, isolation by anodization and lifting of a SiO planarization layer. By this process SNS (Nb-Ti-Nb) and SIS (Nb-Al/AlO x -Nb) Josephson junctions with smallest junction areas of 0.49 µm 2 were prepared and characterized by dc measurements and under the influence of microwave irradiation. The Nb-Ti-Nb junctions have I c R n products of 87 µV. They can be used for programmable Josephson voltage standard circuits at frequencies of 70 GHz.
Overdamped Nb/Al-AlOx/Nb Josephson junctions are an intermediate state between the SIS and SNS Josephson junctions. With a proper choice of fabrication parameters, stable and reproducible nonhysteretic curent-voltage characteristics have been obtained Featuring critical current densities up to 70 kA/cm2and characteristic voltages up to 450 μV at 4.2 K, overdamped junctions are suitable for many aplications ranging from RSFQ electronic circuits to programmable and ac voltage standards. Tests on single junctions arrays of series-connected junctions have shown a suitable behaviour when driven by a microwave with frequencies around 75 GHz. The quantized steps have proven to be stable and flat at nV level. These junctions also shown an improved temperature dependence, which can be interesting in view of the development instrumentation with an integrated quantum voltage reference operated in a closed cycle refrigerator.
We have fabricated overdamped NbN Josephson junctions based on Nb/AlO x /Nb trilayer technology. The junctions have the structure of NbN/Nb/AlO x /Nb/NbN, where Nb/AlO x /Nb acts as a junction barrier. The overdamped junctions showed a critical current density J c and characteristic voltage as high as 0.44 kA/cm2 and 160 µV at 10 K, respectively. The junction characteristics at 4.2 K were investigated from the viewpoint of their dependence on the film thickness of the Nb layers. The junction uniformity was also evaluated. The standard deviation, 1-σ, was 2.1% for a series of 64 5×5 µm2 junctions at 4.2 K.
For a study of the supercurrent–phase relationship, we have fabricated Nb/Al/AlOx/Al/AlOx/Al/Nb-based Josephson junctions of low critical current density. At 4.2 K, junctions of a nominal area of 10×10 μm2 showed a nonhysteretic dc current–voltage characteristic with a critical current of about 10 μA. Similar junctions were part of washer-type rf superconductor quantum interference devices. These samples were inductively coupled to high-quality tank circuits for measurements at 4.2 K or at higher temperatures up to values close to the critical temperature of niobium. In this range, the current–phase relation, as deduced from impedance measurements of the phase-biased junction, did not deviate significantly from the sinusoidal shape.
We present characteristics of overdamped Josephson junctions consisting of Nb/AlOx/Al/ AlOx/Nb structures. The junctions were fabricated using a well-developed Nb/AlOx/Nb-junction technology and showed well-defined Josephson characteristics at 4.2 K. The characteristic voltage Vc [the product of the critical current Ic and the effective normal resistance Rn(eff)] of junctions, which determines high-frequency performance of the junction, was in the range of 0.1–0.5 mV, and the critical current density Jc in the range of 102–104 A/cm2. Maximum-to-minimum variations in Ic over a wafer were ±4% for junctions with Vc=0.15 mV and ±13% for junctions with Vc=0.5 mV.