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Journal of Low Temperature Physics

Ultra-thin TaN Films for Superconducting Nanowire Single-Photon Detectors

K. Ilin, M. Hofherr, Dagmar Rall, M. Siegel, Alexey Semenov, Andreas Engel, K. Inderbitzin, Adrian Aeschbacher, A. Schilling

Published Nov 30, 2011• 36 citations
Publisher
DOI
10.1007/s10909-011-0424-3

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